JP4074677B2 - 検査用ヘッド - Google Patents

検査用ヘッド Download PDF

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Publication number
JP4074677B2
JP4074677B2 JP29927796A JP29927796A JP4074677B2 JP 4074677 B2 JP4074677 B2 JP 4074677B2 JP 29927796 A JP29927796 A JP 29927796A JP 29927796 A JP29927796 A JP 29927796A JP 4074677 B2 JP4074677 B2 JP 4074677B2
Authority
JP
Japan
Prior art keywords
needle
probe
substrate
presser
probes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP29927796A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10123175A (ja
JPH10123175A5 (enExample
Inventor
正 杉山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Micronics Japan Co Ltd
Original Assignee
Micronics Japan Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Micronics Japan Co Ltd filed Critical Micronics Japan Co Ltd
Priority to JP29927796A priority Critical patent/JP4074677B2/ja
Publication of JPH10123175A publication Critical patent/JPH10123175A/ja
Publication of JPH10123175A5 publication Critical patent/JPH10123175A5/ja
Application granted granted Critical
Publication of JP4074677B2 publication Critical patent/JP4074677B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP29927796A 1996-10-24 1996-10-24 検査用ヘッド Expired - Lifetime JP4074677B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29927796A JP4074677B2 (ja) 1996-10-24 1996-10-24 検査用ヘッド

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29927796A JP4074677B2 (ja) 1996-10-24 1996-10-24 検査用ヘッド

Publications (3)

Publication Number Publication Date
JPH10123175A JPH10123175A (ja) 1998-05-15
JPH10123175A5 JPH10123175A5 (enExample) 2004-08-19
JP4074677B2 true JP4074677B2 (ja) 2008-04-09

Family

ID=17870470

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29927796A Expired - Lifetime JP4074677B2 (ja) 1996-10-24 1996-10-24 検査用ヘッド

Country Status (1)

Country Link
JP (1) JP4074677B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI491887B (zh) * 2013-01-21 2015-07-11 Mjc Probe Inc 探針模組
JP6360502B2 (ja) * 2015-07-31 2018-07-18 日本電子材料株式会社 プローブカード

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59762Y2 (ja) * 1979-02-07 1984-01-10 日本電子材料株式会社 プロ−ブカ−ド
JPS5834935B2 (ja) * 1980-07-03 1983-07-29 日本電子材料株式会社 半導体ウエハ−試験用探針器
JPS5878436A (ja) * 1981-11-05 1983-05-12 Seiichiro Sogo テストプロ−ブ組立体
JPH0523537U (ja) * 1991-09-05 1993-03-26 関西日本電気株式会社 プローブカード
JPH0629359A (ja) * 1992-07-07 1994-02-04 Toho Denshi Kk ガイドマスク式プローブ基板
JP2544071B2 (ja) * 1993-01-22 1996-10-16 株式会社東京カソード研究所 プロ―ブカ―ド用探針

Also Published As

Publication number Publication date
JPH10123175A (ja) 1998-05-15

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