JPH10123175A5 - - Google Patents

Info

Publication number
JPH10123175A5
JPH10123175A5 JP1996299277A JP29927796A JPH10123175A5 JP H10123175 A5 JPH10123175 A5 JP H10123175A5 JP 1996299277 A JP1996299277 A JP 1996299277A JP 29927796 A JP29927796 A JP 29927796A JP H10123175 A5 JPH10123175 A5 JP H10123175A5
Authority
JP
Japan
Prior art keywords
opening
under test
device under
cutouts
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1996299277A
Other languages
English (en)
Japanese (ja)
Other versions
JP4074677B2 (ja
JPH10123175A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP29927796A priority Critical patent/JP4074677B2/ja
Priority claimed from JP29927796A external-priority patent/JP4074677B2/ja
Publication of JPH10123175A publication Critical patent/JPH10123175A/ja
Publication of JPH10123175A5 publication Critical patent/JPH10123175A5/ja
Application granted granted Critical
Publication of JP4074677B2 publication Critical patent/JP4074677B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP29927796A 1996-10-24 1996-10-24 検査用ヘッド Expired - Lifetime JP4074677B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29927796A JP4074677B2 (ja) 1996-10-24 1996-10-24 検査用ヘッド

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29927796A JP4074677B2 (ja) 1996-10-24 1996-10-24 検査用ヘッド

Publications (3)

Publication Number Publication Date
JPH10123175A JPH10123175A (ja) 1998-05-15
JPH10123175A5 true JPH10123175A5 (enExample) 2004-08-19
JP4074677B2 JP4074677B2 (ja) 2008-04-09

Family

ID=17870470

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29927796A Expired - Lifetime JP4074677B2 (ja) 1996-10-24 1996-10-24 検査用ヘッド

Country Status (1)

Country Link
JP (1) JP4074677B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI491887B (zh) * 2013-01-21 2015-07-11 Mjc Probe Inc 探針模組
JP6360502B2 (ja) * 2015-07-31 2018-07-18 日本電子材料株式会社 プローブカード

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59762Y2 (ja) * 1979-02-07 1984-01-10 日本電子材料株式会社 プロ−ブカ−ド
JPS5834935B2 (ja) * 1980-07-03 1983-07-29 日本電子材料株式会社 半導体ウエハ−試験用探針器
JPS5878436A (ja) * 1981-11-05 1983-05-12 Seiichiro Sogo テストプロ−ブ組立体
JPH0523537U (ja) * 1991-09-05 1993-03-26 関西日本電気株式会社 プローブカード
JPH0629359A (ja) * 1992-07-07 1994-02-04 Toho Denshi Kk ガイドマスク式プローブ基板
JP2544071B2 (ja) * 1993-01-22 1996-10-16 株式会社東京カソード研究所 プロ―ブカ―ド用探針

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