JP4042095B2 - 高純度金属粉の製造方法および高純度金属粉の製造装置 - Google Patents

高純度金属粉の製造方法および高純度金属粉の製造装置 Download PDF

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JP4042095B2
JP4042095B2 JP2002063447A JP2002063447A JP4042095B2 JP 4042095 B2 JP4042095 B2 JP 4042095B2 JP 2002063447 A JP2002063447 A JP 2002063447A JP 2002063447 A JP2002063447 A JP 2002063447A JP 4042095 B2 JP4042095 B2 JP 4042095B2
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gas
metal powder
refining
plasma flame
hydrogen
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JP2003268422A (ja
JP2003268422A5 (enExample
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伸彦 千綿
剛 韓
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Proterial Ltd
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Hitachi Metals Ltd
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JP2002063447A 2002-03-08 2002-03-08 高純度金属粉の製造方法および高純度金属粉の製造装置 Expired - Fee Related JP4042095B2 (ja)

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JP2002063447A JP4042095B2 (ja) 2002-03-08 2002-03-08 高純度金属粉の製造方法および高純度金属粉の製造装置

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JP2003268422A5 JP2003268422A5 (enExample) 2005-08-25
JP4042095B2 true JP4042095B2 (ja) 2008-02-06

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190067658A (ko) * 2017-12-07 2019-06-17 한국생산기술연구원 고순도 구형 분말의 제조방법

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100584570B1 (ko) 2006-02-28 2006-05-30 한국기계연구원 플라즈마 반응장치
EP1942202A3 (en) * 2007-01-08 2010-09-29 Heraeus, Inc. High density, low oxygen Re and Re-based consolidated powder materials for use as deposition sources & methods of making the same
WO2009119196A1 (ja) * 2008-03-28 2009-10-01 日鉱金属株式会社 磁性材ターゲット用白金粉末、同粉末の製造方法、白金焼結体からなる磁性材ターゲットの製造方法及び同焼結磁性材ターゲット
CN103736435B (zh) * 2013-12-27 2015-11-18 中国神华能源股份有限公司 一种利用交流等离子体球化粉体的设备及系统
KR102273282B1 (ko) * 2020-01-30 2021-07-06 주식회사 나노코리아 금속 분말의 제조방법
KR102467741B1 (ko) * 2021-08-05 2022-11-16 한국핵융합에너지연구원 플라즈마를 이용한 아토마이징 시스템 및 아토마이징 방법
KR102491080B1 (ko) * 2021-08-05 2023-01-19 한국핵융합에너지연구원 플라즈마를 이용한 분말 구형화 장치

Family Cites Families (2)

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US5749937A (en) * 1995-03-14 1998-05-12 Lockheed Idaho Technologies Company Fast quench reactor and method
JP2001020065A (ja) * 1999-07-07 2001-01-23 Hitachi Metals Ltd スパッタリング用ターゲット及びその製造方法ならびに高融点金属粉末材料

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190067658A (ko) * 2017-12-07 2019-06-17 한국생산기술연구원 고순도 구형 분말의 제조방법
KR102020314B1 (ko) * 2017-12-07 2019-09-11 한국생산기술연구원 고순도 구형 분말의 제조방법

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