JP4038599B2 - クリーニング方法 - Google Patents

クリーニング方法 Download PDF

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Publication number
JP4038599B2
JP4038599B2 JP14087497A JP14087497A JP4038599B2 JP 4038599 B2 JP4038599 B2 JP 4038599B2 JP 14087497 A JP14087497 A JP 14087497A JP 14087497 A JP14087497 A JP 14087497A JP 4038599 B2 JP4038599 B2 JP 4038599B2
Authority
JP
Japan
Prior art keywords
gas
cleaning
clf
shower head
processing container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP14087497A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10317142A (ja
Inventor
国弘 多田
秀樹 吉川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=15278774&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=JP4038599(B2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP14087497A priority Critical patent/JP4038599B2/ja
Priority to TW087107130A priority patent/TW375780B/zh
Priority to KR1019980017329A priority patent/KR100628607B1/ko
Publication of JPH10317142A publication Critical patent/JPH10317142A/ja
Priority to KR1020060026867A priority patent/KR100727733B1/ko
Application granted granted Critical
Publication of JP4038599B2 publication Critical patent/JP4038599B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • A—HUMAN NECESSITIES
    • A42—HEADWEAR
    • A42B—HATS; HEAD COVERINGS
    • A42B1/00—Hats; Caps; Hoods
    • A42B1/24—Hats; Caps; Hoods with means for attaching articles thereto, e.g. memorandum tablets or mirrors
    • A—HUMAN NECESSITIES
    • A42—HEADWEAR
    • A42B—HATS; HEAD COVERINGS
    • A42B1/00—Hats; Caps; Hoods
    • A42B1/004—Decorative arrangements or effects
    • A—HUMAN NECESSITIES
    • A44—HABERDASHERY; JEWELLERY
    • A44B—BUTTONS, PINS, BUCKLES, SLIDE FASTENERS, OR THE LIKE
    • A44B1/00—Buttons
    • A—HUMAN NECESSITIES
    • A44—HABERDASHERY; JEWELLERY
    • A44B—BUTTONS, PINS, BUCKLES, SLIDE FASTENERS, OR THE LIKE
    • A44B17/00—Press-button or snap fasteners
    • A—HUMAN NECESSITIES
    • A44—HABERDASHERY; JEWELLERY
    • A44B—BUTTONS, PINS, BUCKLES, SLIDE FASTENERS, OR THE LIKE
    • A44B18/00—Fasteners of the touch-and-close type; Making such fasteners
    • A—HUMAN NECESSITIES
    • A63—SPORTS; GAMES; AMUSEMENTS
    • A63H—TOYS, e.g. TOPS, DOLLS, HOOPS OR BUILDING BLOCKS
    • A63H3/00—Dolls
    • A63H3/14—Dolls into which the fingers of the hand can be inserted, e.g. hand-puppets
    • A—HUMAN NECESSITIES
    • A44—HABERDASHERY; JEWELLERY
    • A44D—INDEXING SCHEME RELATING TO BUTTONS, PINS, BUCKLES OR SLIDE FASTENERS, AND TO JEWELLERY, BRACELETS OR OTHER PERSONAL ADORNMENTS
    • A44D2203/00—Fastening by use of magnets

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Drying Of Semiconductors (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Physical Vapour Deposition (AREA)
JP14087497A 1997-05-15 1997-05-15 クリーニング方法 Expired - Fee Related JP4038599B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP14087497A JP4038599B2 (ja) 1997-05-15 1997-05-15 クリーニング方法
TW087107130A TW375780B (en) 1997-05-15 1998-05-08 Process for cleaning a film forming device
KR1019980017329A KR100628607B1 (ko) 1997-05-15 1998-05-14 클리닝방법,성막장치및성막방법
KR1020060026867A KR100727733B1 (ko) 1997-05-15 2006-03-24 성막 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14087497A JP4038599B2 (ja) 1997-05-15 1997-05-15 クリーニング方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2007133570A Division JP2007204855A (ja) 2007-05-20 2007-05-20 成膜装置

Publications (2)

Publication Number Publication Date
JPH10317142A JPH10317142A (ja) 1998-12-02
JP4038599B2 true JP4038599B2 (ja) 2008-01-30

Family

ID=15278774

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14087497A Expired - Fee Related JP4038599B2 (ja) 1997-05-15 1997-05-15 クリーニング方法

Country Status (3)

Country Link
JP (1) JP4038599B2 (ko)
KR (2) KR100628607B1 (ko)
TW (1) TW375780B (ko)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI297510B (ko) * 2000-09-08 2008-06-01 Tokyo Electron Ltd
JP4720019B2 (ja) * 2001-05-18 2011-07-13 東京エレクトロン株式会社 冷却機構及び処理装置
KR100425789B1 (ko) * 2001-12-07 2004-04-06 주성엔지니어링(주) 인젝터 및 인젝터 히팅장치
KR100828522B1 (ko) * 2002-07-06 2008-05-13 삼성전자주식회사 패턴 마스크 클리닝 장치 및 이를 갖는 노광 설비
KR100447284B1 (ko) 2002-07-19 2004-09-07 삼성전자주식회사 화학기상증착 챔버의 세정 방법
US20050221020A1 (en) * 2004-03-30 2005-10-06 Tokyo Electron Limited Method of improving the wafer to wafer uniformity and defectivity of a deposited dielectric film
WO2007026762A1 (ja) * 2005-08-31 2007-03-08 Tokyo Electron Limited クリーニング方法
KR100706810B1 (ko) * 2006-02-07 2007-04-12 삼성전자주식회사 박박 형성 장치의 세정 방법 및 이를 이용한 박막 형성방법
KR100766342B1 (ko) * 2006-05-16 2007-10-11 세메스 주식회사 웨트 스테이션 및 웨트 스테이션 세척방법
KR100761757B1 (ko) * 2006-08-17 2007-09-28 삼성전자주식회사 막 형성 방법
JP5439771B2 (ja) * 2008-09-05 2014-03-12 東京エレクトロン株式会社 成膜装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3247270B2 (ja) * 1994-08-25 2002-01-15 東京エレクトロン株式会社 処理装置及びドライクリーニング方法

Also Published As

Publication number Publication date
KR100727733B1 (ko) 2007-06-13
KR20060086893A (ko) 2006-08-01
KR19980087036A (ko) 1998-12-05
JPH10317142A (ja) 1998-12-02
KR100628607B1 (ko) 2006-11-30
TW375780B (en) 1999-12-01

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