TW375780B - Process for cleaning a film forming device - Google Patents
Process for cleaning a film forming deviceInfo
- Publication number
- TW375780B TW375780B TW087107130A TW87107130A TW375780B TW 375780 B TW375780 B TW 375780B TW 087107130 A TW087107130 A TW 087107130A TW 87107130 A TW87107130 A TW 87107130A TW 375780 B TW375780 B TW 375780B
- Authority
- TW
- Taiwan
- Prior art keywords
- treatment chamber
- cleaning
- compound
- film forming
- target portion
- Prior art date
Links
Classifications
-
- A—HUMAN NECESSITIES
- A42—HEADWEAR
- A42B—HATS; HEAD COVERINGS
- A42B1/00—Hats; Caps; Hoods
- A42B1/24—Hats; Caps; Hoods with means for attaching articles thereto, e.g. memorandum tablets or mirrors
-
- A—HUMAN NECESSITIES
- A42—HEADWEAR
- A42B—HATS; HEAD COVERINGS
- A42B1/00—Hats; Caps; Hoods
- A42B1/004—Decorative arrangements or effects
-
- A—HUMAN NECESSITIES
- A44—HABERDASHERY; JEWELLERY
- A44B—BUTTONS, PINS, BUCKLES, SLIDE FASTENERS, OR THE LIKE
- A44B1/00—Buttons
-
- A—HUMAN NECESSITIES
- A44—HABERDASHERY; JEWELLERY
- A44B—BUTTONS, PINS, BUCKLES, SLIDE FASTENERS, OR THE LIKE
- A44B17/00—Press-button or snap fasteners
-
- A—HUMAN NECESSITIES
- A44—HABERDASHERY; JEWELLERY
- A44B—BUTTONS, PINS, BUCKLES, SLIDE FASTENERS, OR THE LIKE
- A44B18/00—Fasteners of the touch-and-close type; Making such fasteners
-
- A—HUMAN NECESSITIES
- A63—SPORTS; GAMES; AMUSEMENTS
- A63H—TOYS, e.g. TOPS, DOLLS, HOOPS OR BUILDING BLOCKS
- A63H3/00—Dolls
- A63H3/14—Dolls into which the fingers of the hand can be inserted, e.g. hand-puppets
-
- A—HUMAN NECESSITIES
- A44—HABERDASHERY; JEWELLERY
- A44D—INDEXING SCHEME RELATING TO BUTTONS, PINS, BUCKLES OR SLIDE FASTENERS, AND TO JEWELLERY, BRACELETS OR OTHER PERSONAL ADORNMENTS
- A44D2203/00—Fastening by use of magnets
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14087497A JP4038599B2 (ja) | 1997-05-15 | 1997-05-15 | クリーニング方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
TW375780B true TW375780B (en) | 1999-12-01 |
Family
ID=15278774
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW087107130A TW375780B (en) | 1997-05-15 | 1998-05-08 | Process for cleaning a film forming device |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP4038599B2 (zh) |
KR (2) | KR100628607B1 (zh) |
TW (1) | TW375780B (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6905079B2 (en) | 2000-09-08 | 2005-06-14 | Tokyo Electron Limited | Shower head structure and cleaning method thereof |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4720019B2 (ja) | 2001-05-18 | 2011-07-13 | 東京エレクトロン株式会社 | 冷却機構及び処理装置 |
KR100425789B1 (ko) * | 2001-12-07 | 2004-04-06 | 주성엔지니어링(주) | 인젝터 및 인젝터 히팅장치 |
KR100828522B1 (ko) * | 2002-07-06 | 2008-05-13 | 삼성전자주식회사 | 패턴 마스크 클리닝 장치 및 이를 갖는 노광 설비 |
KR100447284B1 (ko) | 2002-07-19 | 2004-09-07 | 삼성전자주식회사 | 화학기상증착 챔버의 세정 방법 |
US20050221020A1 (en) * | 2004-03-30 | 2005-10-06 | Tokyo Electron Limited | Method of improving the wafer to wafer uniformity and defectivity of a deposited dielectric film |
US7691208B2 (en) | 2005-08-31 | 2010-04-06 | Tokyo Electron Limited | Cleaning method |
KR100706810B1 (ko) * | 2006-02-07 | 2007-04-12 | 삼성전자주식회사 | 박박 형성 장치의 세정 방법 및 이를 이용한 박막 형성방법 |
KR100766342B1 (ko) * | 2006-05-16 | 2007-10-11 | 세메스 주식회사 | 웨트 스테이션 및 웨트 스테이션 세척방법 |
KR100761757B1 (ko) * | 2006-08-17 | 2007-09-28 | 삼성전자주식회사 | 막 형성 방법 |
JP5439771B2 (ja) * | 2008-09-05 | 2014-03-12 | 東京エレクトロン株式会社 | 成膜装置 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3247270B2 (ja) * | 1994-08-25 | 2002-01-15 | 東京エレクトロン株式会社 | 処理装置及びドライクリーニング方法 |
-
1997
- 1997-05-15 JP JP14087497A patent/JP4038599B2/ja not_active Expired - Fee Related
-
1998
- 1998-05-08 TW TW087107130A patent/TW375780B/zh not_active IP Right Cessation
- 1998-05-14 KR KR1019980017329A patent/KR100628607B1/ko not_active IP Right Cessation
-
2006
- 2006-03-24 KR KR1020060026867A patent/KR100727733B1/ko not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6905079B2 (en) | 2000-09-08 | 2005-06-14 | Tokyo Electron Limited | Shower head structure and cleaning method thereof |
Also Published As
Publication number | Publication date |
---|---|
KR100727733B1 (ko) | 2007-06-13 |
KR20060086893A (ko) | 2006-08-01 |
KR100628607B1 (ko) | 2006-11-30 |
KR19980087036A (ko) | 1998-12-05 |
JP4038599B2 (ja) | 2008-01-30 |
JPH10317142A (ja) | 1998-12-02 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
TW375780B (en) | Process for cleaning a film forming device | |
EP0811579A3 (en) | UV-fluid treatment system and process | |
CA2126866A1 (en) | Preparation of Bone for Transplantation | |
ZA979217B (en) | Systems for the treatment of chemical wastes and methods for treating chemical wastes. | |
GR3029809T3 (en) | Process for the manufacture of 1,1,1,3,3-pentafluoropropane | |
WO2002012587A3 (en) | Processing apparatus and cleaning method | |
MY118229A (en) | Surface treatment of fluorinated contact lens materials | |
EP0354669A3 (en) | Dry etching apparatus with anhydrous hydrogen fluoride gas generator | |
TW200607853A (en) | Cleaning method and cleaning apparatus | |
MY117325A (en) | Method of heat treating object and apparatus for the same. | |
CA2287758A1 (en) | Method and apparatus for surface treating animal tissue | |
EP1195803A3 (en) | Post-etch cleaning treatment | |
EP0887845A3 (en) | Processing method and apparatus for removing oxide film | |
JPH0252084A (ja) | アフターグロープラズマによる表面浄化方法 | |
ES2187330A1 (es) | Proceso para desclorar y eliminar las impurezas del aceite. | |
EP1338850A3 (de) | Verfahren zur Garraumreinigung | |
ES2177311T3 (es) | Procedimiento para el deposito bajo vacio de un sustrato curvo. | |
EP0910116A3 (en) | Cleaning a potassium contaminated surface with pure hot water | |
GB2395771A (en) | Liquid heating apparatus | |
SE0201891L (sv) | Avlägsnande av vattenlösliga föreningar ur träflis före kokningen | |
CA2331126A1 (en) | Chemical cleaning system for electrochemical electrodes used in caustic environments | |
WO2004007819A3 (fr) | Procede et installation de traitement thermique de produits en carbone contenant du sodium | |
WO1999038482A8 (en) | Method for cleaning dentures | |
RU2082350C1 (ru) | Способ очистки зубного металлического протеза перед нанесением защитного покрытия | |
JPS5415366A (en) | Method of cleaning element for air preheater or the like |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
MK4A | Expiration of patent term of an invention patent |