JP4026219B2 - ディスク原盤作成装置 - Google Patents

ディスク原盤作成装置 Download PDF

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Publication number
JP4026219B2
JP4026219B2 JP08760198A JP8760198A JP4026219B2 JP 4026219 B2 JP4026219 B2 JP 4026219B2 JP 08760198 A JP08760198 A JP 08760198A JP 8760198 A JP8760198 A JP 8760198A JP 4026219 B2 JP4026219 B2 JP 4026219B2
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Japan
Prior art keywords
master
electron beam
disk
rotation
vacuum chamber
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Expired - Fee Related
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JP08760198A
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English (en)
Japanese (ja)
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JPH11288535A (ja
JPH11288535A5 (enExample
Inventor
祐一 安芸
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
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Sony Corp
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Priority to JP08760198A priority Critical patent/JP4026219B2/ja
Publication of JPH11288535A publication Critical patent/JPH11288535A/ja
Publication of JPH11288535A5 publication Critical patent/JPH11288535A5/ja
Application granted granted Critical
Publication of JP4026219B2 publication Critical patent/JP4026219B2/ja
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    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/10—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using electron beam; Record carriers therefor

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Manufacturing Optical Record Carriers (AREA)
JP08760198A 1998-03-31 1998-03-31 ディスク原盤作成装置 Expired - Fee Related JP4026219B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP08760198A JP4026219B2 (ja) 1998-03-31 1998-03-31 ディスク原盤作成装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP08760198A JP4026219B2 (ja) 1998-03-31 1998-03-31 ディスク原盤作成装置

Publications (3)

Publication Number Publication Date
JPH11288535A JPH11288535A (ja) 1999-10-19
JPH11288535A5 JPH11288535A5 (enExample) 2005-07-28
JP4026219B2 true JP4026219B2 (ja) 2007-12-26

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ID=13919512

Family Applications (1)

Application Number Title Priority Date Filing Date
JP08760198A Expired - Fee Related JP4026219B2 (ja) 1998-03-31 1998-03-31 ディスク原盤作成装置

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JP (1) JP4026219B2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100927906B1 (ko) 2008-10-02 2009-11-23 (주)코셈 전자빔을 이용한 데이터 기록장치 및 전자빔을 이용한 데이터 기록방법

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001242300A (ja) * 2000-03-02 2001-09-07 Sony Corp 電子ビーム照射装置
JP2002140840A (ja) * 2000-11-01 2002-05-17 Pioneer Electronic Corp 光ディスク及びその原盤製造装置
JP2002257998A (ja) * 2001-02-28 2002-09-11 Sony Corp 電子ビーム照射装置及び電子ビーム照射装置における真空シール方法
US7176471B2 (en) 2002-10-28 2007-02-13 Matsushita Electric Industrial Co., Ltd. Electron beam exposure method and electron beam exposure apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100927906B1 (ko) 2008-10-02 2009-11-23 (주)코셈 전자빔을 이용한 데이터 기록장치 및 전자빔을 이용한 데이터 기록방법

Also Published As

Publication number Publication date
JPH11288535A (ja) 1999-10-19

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