JPH11288535A5 - - Google Patents

Info

Publication number
JPH11288535A5
JPH11288535A5 JP1998087601A JP8760198A JPH11288535A5 JP H11288535 A5 JPH11288535 A5 JP H11288535A5 JP 1998087601 A JP1998087601 A JP 1998087601A JP 8760198 A JP8760198 A JP 8760198A JP H11288535 A5 JPH11288535 A5 JP H11288535A5
Authority
JP
Japan
Prior art keywords
bearing
hydrostatic bearing
internal space
vacuum chamber
restrictor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1998087601A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11288535A (ja
JP4026219B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP08760198A priority Critical patent/JP4026219B2/ja
Priority claimed from JP08760198A external-priority patent/JP4026219B2/ja
Publication of JPH11288535A publication Critical patent/JPH11288535A/ja
Publication of JPH11288535A5 publication Critical patent/JPH11288535A5/ja
Application granted granted Critical
Publication of JP4026219B2 publication Critical patent/JP4026219B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP08760198A 1998-03-31 1998-03-31 ディスク原盤作成装置 Expired - Fee Related JP4026219B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP08760198A JP4026219B2 (ja) 1998-03-31 1998-03-31 ディスク原盤作成装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP08760198A JP4026219B2 (ja) 1998-03-31 1998-03-31 ディスク原盤作成装置

Publications (3)

Publication Number Publication Date
JPH11288535A JPH11288535A (ja) 1999-10-19
JPH11288535A5 true JPH11288535A5 (enExample) 2005-07-28
JP4026219B2 JP4026219B2 (ja) 2007-12-26

Family

ID=13919512

Family Applications (1)

Application Number Title Priority Date Filing Date
JP08760198A Expired - Fee Related JP4026219B2 (ja) 1998-03-31 1998-03-31 ディスク原盤作成装置

Country Status (1)

Country Link
JP (1) JP4026219B2 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001242300A (ja) 2000-03-02 2001-09-07 Sony Corp 電子ビーム照射装置
JP2002140840A (ja) * 2000-11-01 2002-05-17 Pioneer Electronic Corp 光ディスク及びその原盤製造装置
JP2002257998A (ja) * 2001-02-28 2002-09-11 Sony Corp 電子ビーム照射装置及び電子ビーム照射装置における真空シール方法
EP1560071A4 (en) 2002-10-28 2008-02-13 Matsushita Electric Industrial Co Ltd METHOD AND SYSTEM FOR EXPOSING AN ELECTRON BEAM
KR100927906B1 (ko) 2008-10-02 2009-11-23 (주)코셈 전자빔을 이용한 데이터 기록장치 및 전자빔을 이용한 데이터 기록방법

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