JP4016622B2 - 吸着保持器、搬送装置、基板の搬送方法、及び、電気光学装置の製造方法 - Google Patents

吸着保持器、搬送装置、基板の搬送方法、及び、電気光学装置の製造方法 Download PDF

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Publication number
JP4016622B2
JP4016622B2 JP2001258212A JP2001258212A JP4016622B2 JP 4016622 B2 JP4016622 B2 JP 4016622B2 JP 2001258212 A JP2001258212 A JP 2001258212A JP 2001258212 A JP2001258212 A JP 2001258212A JP 4016622 B2 JP4016622 B2 JP 4016622B2
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pair
substrate
holding
arms
suction
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Expired - Fee Related
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Japanese (ja)
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JP2003068824A (ja
JP2003068824A5 (enrdf_load_stackoverflow
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務 佐々木
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Seiko Epson Corp
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Seiko Epson Corp
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JP2001258212A 2001-08-28 2001-08-28 吸着保持器、搬送装置、基板の搬送方法、及び、電気光学装置の製造方法 Expired - Fee Related JP4016622B2 (ja)

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JP2001258212A JP4016622B2 (ja) 2001-08-28 2001-08-28 吸着保持器、搬送装置、基板の搬送方法、及び、電気光学装置の製造方法

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JP2001258212A JP4016622B2 (ja) 2001-08-28 2001-08-28 吸着保持器、搬送装置、基板の搬送方法、及び、電気光学装置の製造方法

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JP2003068824A JP2003068824A (ja) 2003-03-07
JP2003068824A5 JP2003068824A5 (enrdf_load_stackoverflow) 2005-02-24
JP4016622B2 true JP4016622B2 (ja) 2007-12-05

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20220402145A1 (en) * 2021-06-16 2022-12-22 Sheng Chuan Technology Co., Ltd. Wafer suspension fork

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005144597A (ja) * 2003-11-14 2005-06-09 Ishikawajima Harima Heavy Ind Co Ltd ワーク保持ハンド取付装置
JP2006321575A (ja) * 2005-05-17 2006-11-30 Matsushita Electric Ind Co Ltd ディスプレイパネルの製造装置および製造方法
JP4660586B2 (ja) * 2008-12-02 2011-03-30 オリンパス株式会社 基板搬送装置、及び、基板搬送方法
JP5989994B2 (ja) * 2012-01-11 2016-09-07 株式会社ディスコ 搬送機構
JP6104695B2 (ja) * 2013-04-30 2017-03-29 ミライアル株式会社 非対称溝形状ウェーハカセット
JP2017098275A (ja) * 2014-03-28 2017-06-01 パナソニックＩｐマネジメント株式会社 半導体ウエハ搬送装置およびそれを利用した太陽電池の製造方法
JP7187147B2 (ja) * 2017-12-12 2022-12-12 東京エレクトロン株式会社 搬送装置のティーチング方法及び基板処理システム
KR200494783Y1 (ko) * 2018-01-10 2021-12-24 히라따기꼬오 가부시키가이샤 흡착 핸드
CN113121088B (zh) * 2021-04-20 2022-07-15 重庆星源玻璃器皿有限责任公司 玻璃制品吹制设备
CN117104886B (zh) * 2023-09-04 2024-04-19 深圳市博视科技有限公司 一种用于电子设备生产的板材上下料装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20220402145A1 (en) * 2021-06-16 2022-12-22 Sheng Chuan Technology Co., Ltd. Wafer suspension fork

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JP2003068824A (ja) 2003-03-07

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