JP4016532B2 - フッ化窒素の分解用反応剤及び分解法 - Google Patents

フッ化窒素の分解用反応剤及び分解法 Download PDF

Info

Publication number
JP4016532B2
JP4016532B2 JP17912399A JP17912399A JP4016532B2 JP 4016532 B2 JP4016532 B2 JP 4016532B2 JP 17912399 A JP17912399 A JP 17912399A JP 17912399 A JP17912399 A JP 17912399A JP 4016532 B2 JP4016532 B2 JP 4016532B2
Authority
JP
Japan
Prior art keywords
group
compound
nitrogen fluoride
reactant
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP17912399A
Other languages
English (en)
Japanese (ja)
Other versions
JP2000296324A (ja
Inventor
仁志 跡辺
虎一 金子
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Showa Denko KK
Original Assignee
Showa Denko KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Showa Denko KK filed Critical Showa Denko KK
Priority to JP17912399A priority Critical patent/JP4016532B2/ja
Priority to TW088110967A priority patent/TW474834B/zh
Priority to US09/473,134 priority patent/US6146606A/en
Priority to KR1020000005763A priority patent/KR100356305B1/ko
Publication of JP2000296324A publication Critical patent/JP2000296324A/ja
Application granted granted Critical
Publication of JP4016532B2 publication Critical patent/JP4016532B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds
    • B01D53/685—Halogens or halogen compounds by treating the gases with solids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/20—Halogens or halogen compounds
    • B01D2257/204—Inorganic halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Biomedical Technology (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Treating Waste Gases (AREA)
  • Catalysts (AREA)
  • Exhaust Gas Treatment By Means Of Catalyst (AREA)
  • Devices And Processes Conducted In The Presence Of Fluids And Solid Particles (AREA)
JP17912399A 1999-02-09 1999-06-25 フッ化窒素の分解用反応剤及び分解法 Expired - Lifetime JP4016532B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP17912399A JP4016532B2 (ja) 1999-02-09 1999-06-25 フッ化窒素の分解用反応剤及び分解法
TW088110967A TW474834B (en) 1999-02-09 1999-06-29 Degrading agent and method of nitrogen fluorides
US09/473,134 US6146606A (en) 1999-02-09 1999-12-28 Reactive agent and process for decomposing nitrogen fluoride
KR1020000005763A KR100356305B1 (ko) 1999-02-09 2000-02-08 불화질소 분해용 반응제 및 이를 이용한 분해 방법

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP3088399 1999-02-09
JP11-30883 1999-02-09
JP17912399A JP4016532B2 (ja) 1999-02-09 1999-06-25 フッ化窒素の分解用反応剤及び分解法

Publications (2)

Publication Number Publication Date
JP2000296324A JP2000296324A (ja) 2000-10-24
JP4016532B2 true JP4016532B2 (ja) 2007-12-05

Family

ID=26369317

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17912399A Expired - Lifetime JP4016532B2 (ja) 1999-02-09 1999-06-25 フッ化窒素の分解用反応剤及び分解法

Country Status (3)

Country Link
JP (1) JP4016532B2 (ko)
KR (1) KR100356305B1 (ko)
TW (1) TW474834B (ko)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002143640A (ja) * 2000-11-10 2002-05-21 Sanwa Chemical Kk ハロゲン系ガスの除去方法
JP3816841B2 (ja) * 2002-06-25 2006-08-30 日本パイオニクス株式会社 窒素弗化物を含有するガスの浄化剤及び浄化方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0895801A3 (en) * 1997-08-07 1999-04-14 Showa Denko Kabushiki Kaisha Method for decomposing nitrogen fluoride or sulfur fluoride and decomposing reagent used therefor

Also Published As

Publication number Publication date
KR100356305B1 (ko) 2002-10-12
JP2000296324A (ja) 2000-10-24
KR20000076620A (ko) 2000-12-26
TW474834B (en) 2002-02-01

Similar Documents

Publication Publication Date Title
JP3713333B2 (ja) 弗化炭素類の分解法
US6146606A (en) Reactive agent and process for decomposing nitrogen fluoride
JP3789277B2 (ja) フッ素化合物の分解用反応剤、分解方法及びその用途
JP3592886B2 (ja) 弗化炭素類の分解方法および分解用反応剤
WO2003069228A1 (fr) Procede de traitement de gaz d'echappement
JP3249986B2 (ja) フロンの分解処理法および装置
JP4016532B2 (ja) フッ化窒素の分解用反応剤及び分解法
JP4264076B2 (ja) 弗化炭素類の分解装置
US6416726B2 (en) Method for decomposing nitrogen fluoride or sulfur fluoride and decomposing reagent used therefor
EP1123727A1 (en) Perfluoro compounds decomposition method and decomposition apparatus therefor
JP3718739B2 (ja) 弗化硫黄の分解法および分解用反応剤
JPH08187302A (ja) フロン分解法
JP3713366B2 (ja) 弗化窒素の分解方法および分解用反応剤
JP5294553B2 (ja) 炭素含有アルカリ土類金属酸化物の製造方法および有機ハロゲン化物の分解処理方法
JP3919328B2 (ja) 含フッ素化合物ガスの分解剤およびその製造法
WO1998001217A1 (fr) Procede et equipement de decompositions d'hydrocarbures fluores
JP2005095730A (ja) フッ素化合物の分解処理剤および分解処理方法
JP3734963B2 (ja) 混合溶融塩による有機塩素化合物等の無害化処理方法
JPH0312219A (ja) 有害成分の除去方法
JP2007237150A (ja) 排ガスの触媒除害処理方法
JPH0924242A (ja) フロン分解装置
JP5342805B2 (ja) ＨＦＣ−１３４ａの無害化処理方法および炭酸カルシウムの製造方法
JPH0924243A (ja) フロン分解剤
JPH06327931A (ja) 排ガスの浄化方法
JPH10165764A (ja) 三弗化窒素ガスの除害剤及び除害方法

Legal Events

Date Code Title Description
A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20070220

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20070416

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20070605

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20070730

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20070828

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20070910

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

Ref document number: 4016532

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100928

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100928

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130928

Year of fee payment: 6

EXPY Cancellation because of completion of term