JP3949135B2 - 圧電ポンプおよびスターリング冷却庫 - Google Patents

圧電ポンプおよびスターリング冷却庫 Download PDF

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Publication number
JP3949135B2
JP3949135B2 JP2004333189A JP2004333189A JP3949135B2 JP 3949135 B2 JP3949135 B2 JP 3949135B2 JP 2004333189 A JP2004333189 A JP 2004333189A JP 2004333189 A JP2004333189 A JP 2004333189A JP 3949135 B2 JP3949135 B2 JP 3949135B2
Authority
JP
Japan
Prior art keywords
internal
casing
space
piezoelectric element
inlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2004333189A
Other languages
English (en)
Japanese (ja)
Other versions
JP2006144591A (ja
Inventor
張　　恒良
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP2004333189A priority Critical patent/JP3949135B2/ja
Priority to KR1020077013161A priority patent/KR20070073973A/ko
Priority to EP05806011A priority patent/EP1813811A1/fr
Priority to PCT/JP2005/020694 priority patent/WO2006054488A1/fr
Priority to US11/666,151 priority patent/US20080101965A1/en
Priority to CNA2005800391131A priority patent/CN101057077A/zh
Publication of JP2006144591A publication Critical patent/JP2006144591A/ja
Application granted granted Critical
Publication of JP3949135B2 publication Critical patent/JP3949135B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/08—Machines, pumps, or pumping installations having flexible working members having tubular flexible members
    • F04B43/09—Pumps having electric drive
    • F04B43/095—Piezoelectric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/16—Casings; Cylinders; Cylinder liners or heads; Fluid connections
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
    • F25B9/14—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2210/00—Working fluid
    • F05B2210/10—Kind or type
    • F05B2210/11—Kind or type liquid, i.e. incompressible
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2260/00—Function
    • F05B2260/60—Fluid transfer
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2280/00—Materials; Properties thereof
    • F05B2280/60—Properties or characteristics given to material by treatment or manufacturing
    • F05B2280/6015—Resin
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2253/00—Other material characteristics; Treatment of material
    • F05C2253/20—Resin
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S417/00—Pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Reciprocating Pumps (AREA)
  • Details Of Reciprocating Pumps (AREA)
  • Devices That Are Associated With Refrigeration Equipment (AREA)
JP2004333189A 2004-11-17 2004-11-17 圧電ポンプおよびスターリング冷却庫 Expired - Fee Related JP3949135B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2004333189A JP3949135B2 (ja) 2004-11-17 2004-11-17 圧電ポンプおよびスターリング冷却庫
KR1020077013161A KR20070073973A (ko) 2004-11-17 2005-11-11 압전 펌프 및 스터링 냉각고
EP05806011A EP1813811A1 (fr) 2004-11-17 2005-11-11 Pompe piezoelectrique et refrigerateur stirling
PCT/JP2005/020694 WO2006054488A1 (fr) 2004-11-17 2005-11-11 Pompe piezoelectrique et refrigerateur stirling
US11/666,151 US20080101965A1 (en) 2004-11-17 2005-11-11 Piezoelectric Pump and Stirling Refrigerator/Freezer
CNA2005800391131A CN101057077A (zh) 2004-11-17 2005-11-11 压电泵及斯特林制冷库

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004333189A JP3949135B2 (ja) 2004-11-17 2004-11-17 圧電ポンプおよびスターリング冷却庫

Publications (2)

Publication Number Publication Date
JP2006144591A JP2006144591A (ja) 2006-06-08
JP3949135B2 true JP3949135B2 (ja) 2007-07-25

Family

ID=36407032

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004333189A Expired - Fee Related JP3949135B2 (ja) 2004-11-17 2004-11-17 圧電ポンプおよびスターリング冷却庫

Country Status (6)

Country Link
US (1) US20080101965A1 (fr)
EP (1) EP1813811A1 (fr)
JP (1) JP3949135B2 (fr)
KR (1) KR20070073973A (fr)
CN (1) CN101057077A (fr)
WO (1) WO2006054488A1 (fr)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8485793B1 (en) * 2007-09-14 2013-07-16 Aprolase Development Co., Llc Chip scale vacuum pump
CN101634292B (zh) * 2009-08-10 2011-04-13 胡军 用于cpu散热冷却系统的压电陶瓷泵
CN102678527A (zh) * 2012-05-23 2012-09-19 浙江师范大学 压电振子双侧驱动流体的串联泵
US10181372B2 (en) * 2013-04-24 2019-01-15 Siemens Healthcare Limited Assembly comprising a two-stage cryogenic refrigerator and associated mounting arrangement
KR20140147345A (ko) * 2013-06-19 2014-12-30 삼성전기주식회사 마이크로 펌프 장치
JP2015117647A (ja) * 2013-12-19 2015-06-25 東芝テック株式会社 圧電ポンプおよび圧電ポンプを備えるインクジェット記録装置
LT2930363T (lt) * 2014-04-10 2021-01-11 Stichting Nationaal Lucht- En Ruimtevaart Laboratorium Pjezoelektrinio siurblio konstrukcija ir joje esanti slėginė grandinė
KR20150124390A (ko) * 2014-04-25 2015-11-05 주식회사 서남 극저온 냉동 시스템
CN106150986A (zh) * 2015-03-25 2016-11-23 深圳市华简泵业科技有限公司 压电泵陶瓷片定位方法
CN104929916A (zh) * 2015-07-13 2015-09-23 李伦 双腔压电气体泵
JP6695154B2 (ja) * 2016-01-28 2020-05-20 東芝テック株式会社 インク循環装置及びプリンタ
TWI658211B (zh) * 2016-10-27 2019-05-01 Nitto Kohki Co., Ltd. Liquid pump
JP2018103380A (ja) * 2016-12-22 2018-07-05 東芝テック株式会社 液体循環モジュール、液体吐出装置、及び液体吐出方法
CN106766540A (zh) * 2017-03-31 2017-05-31 宁波华斯特林电机制造有限公司 一种多档冷箱
CN108168135A (zh) * 2018-02-21 2018-06-15 杨厚成 一种声能制冷机及其膨胀活塞
US10753653B2 (en) * 2018-04-06 2020-08-25 Sumitomo (Shi) Cryogenic Of America, Inc. Heat station for cooling a circulating cryogen
CN108870793A (zh) * 2018-08-02 2018-11-23 杨厚成 一种声能自由活塞式制冷机
US11464140B2 (en) 2019-12-06 2022-10-04 Frore Systems Inc. Centrally anchored MEMS-based active cooling systems
US11710678B2 (en) 2018-08-10 2023-07-25 Frore Systems Inc. Combined architecture for cooling devices
CN109162902B (zh) * 2018-09-20 2023-12-15 长春工业大学 一种浮动式工字型阀压电泵
WO2021086873A1 (fr) 2019-10-30 2021-05-06 Frore System Inc. Système d'écoulement d'air à base de mems
US11510341B2 (en) 2019-12-06 2022-11-22 Frore Systems Inc. Engineered actuators usable in MEMs active cooling devices
US11796262B2 (en) 2019-12-06 2023-10-24 Frore Systems Inc. Top chamber cavities for center-pinned actuators
US11765863B2 (en) 2020-10-02 2023-09-19 Frore Systems Inc. Active heat sink
CN113237246B (zh) * 2021-04-15 2022-01-14 成都仙德科技有限公司 一种斯特林制冷制热一体机
US11614177B2 (en) 2021-08-16 2023-03-28 Mueller Refrigeration, LLC Seal arrangement and check valve including same
CN114825166B (zh) * 2022-04-20 2023-04-11 温州市龙湾永强供电公司 一种无线通讯式多功能大型输电线路检修装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10213077A (ja) * 1997-01-30 1998-08-11 Kasei Optonix Co Ltd ポンプ用リード弁
JP4456689B2 (ja) * 1999-03-29 2010-04-28 日本特殊陶業株式会社 圧電アクチュエータ
CA2431677A1 (fr) * 2000-09-18 2002-03-21 Par Technologies, Llc Organe de commande piezo-electrique et pompe utilisant ce dernier
US7198250B2 (en) * 2000-09-18 2007-04-03 Par Technologies, Llc Piezoelectric actuator and pump using same
JP2004101050A (ja) * 2002-09-09 2004-04-02 Sharp Corp 冷却庫
US7219848B2 (en) * 2004-11-03 2007-05-22 Meadwestvaco Corporation Fluid sprayer employing piezoelectric pump

Also Published As

Publication number Publication date
WO2006054488A1 (fr) 2006-05-26
CN101057077A (zh) 2007-10-17
EP1813811A1 (fr) 2007-08-01
KR20070073973A (ko) 2007-07-10
US20080101965A1 (en) 2008-05-01
JP2006144591A (ja) 2006-06-08

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