WO2006054488A1 - Pompe piezoelectrique et refrigerateur stirling - Google Patents

Pompe piezoelectrique et refrigerateur stirling Download PDF

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Publication number
WO2006054488A1
WO2006054488A1 PCT/JP2005/020694 JP2005020694W WO2006054488A1 WO 2006054488 A1 WO2006054488 A1 WO 2006054488A1 JP 2005020694 W JP2005020694 W JP 2005020694W WO 2006054488 A1 WO2006054488 A1 WO 2006054488A1
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WO
WIPO (PCT)
Prior art keywords
internal
casing
space
outlet
inlet
Prior art date
Application number
PCT/JP2005/020694
Other languages
English (en)
Japanese (ja)
Inventor
Hengliang Zhang
Original Assignee
Sharp Kabushiki Kaisha
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Kabushiki Kaisha filed Critical Sharp Kabushiki Kaisha
Priority to EP05806011A priority Critical patent/EP1813811A1/fr
Priority to US11/666,151 priority patent/US20080101965A1/en
Publication of WO2006054488A1 publication Critical patent/WO2006054488A1/fr

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/08—Machines, pumps, or pumping installations having flexible working members having tubular flexible members
    • F04B43/09—Pumps having electric drive
    • F04B43/095—Piezoelectric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/16—Casings; Cylinders; Cylinder liners or heads; Fluid connections
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
    • F25B9/14—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2210/00—Working fluid
    • F05B2210/10—Kind or type
    • F05B2210/11—Kind or type liquid, i.e. incompressible
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2260/00—Function
    • F05B2260/60—Fluid transfer
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2280/00—Materials; Properties thereof
    • F05B2280/60—Properties or characteristics given to material by treatment or manufacturing
    • F05B2280/6015—Resin
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2253/00—Other material characteristics; Treatment of material
    • F05C2253/20—Resin
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S417/00—Pumps

Definitions

  • the present invention relates to a piezoelectric pump and a Stirling Refrigerator / Freezer, and more particularly to a piezoelectric pump that efficiently circulates fluid in a negative pressure / positive pressure state and a Stirling refrigerator equipped with the piezoelectric pump. About.
  • a piezoelectric pump using a piezoelectric element such as crystal or lithium niobate has been conventionally used.
  • FIG. 6 is a cross-sectional view showing an example of a conventional piezoelectric pump.
  • the piezoelectric pump 106 includes a casing 132 and a working space 134 and a back pressure space 135 in the casing 132 as shown in FIG.
  • the working space 134 and the back pressure space 135 are separated by the piezoelectric element 136.
  • the casing on the working space 134 side is provided with an inlet portion 137 for sucking the medium and an outlet portion 138 for discharging the medium.
  • the casing on the back pressure space 135 side is provided with the pressure of the back pressure space 135.
  • a back pressure hole 135A for adjustment is provided.
  • the inlet portion 137 and the outlet portion 138 are provided with check valves 139 and 140 that do not allow the medium to flow backward, respectively.
  • the piezoelectric element 136 When the above-described piezoelectric pump 106 is operated, an electric signal is given to the piezoelectric element 136. As a result, the piezoelectric element 136 performs an amplitude motion in the direction of the dashed arrow in FIG. At this time, the end of the piezoelectric element 136 is fixed to the casing 132, and the piezoelectric element 136 performs an amplitude motion while being deformed into a convex shape. As a result, the volume of the working space 134 varies, the pressure in the working space 134 varies according to the deformation state of the piezoelectric element 136, and the medium is sucked and discharged.
  • the volume of the back pressure space 135 also changes.
  • the pressure in the back pressure space 135 fluctuates, the movement direction of the piezoelectric element 136 is reversed.
  • the operation efficiency of the piezoelectric pump 106 is reduced.
  • the pressure in the back pressure space 135 is constant regardless of the deformation state of the piezoelectric element 136.
  • a back pressure hole 135A is provided on the back pressure space 135 side of the casing 132.
  • thermosiphon a high temperature portion for releasing the compression heat of the working gas due to the reverse Stirling cycle to the outside, a low temperature portion for absorbing the expansion heat of the working gas due to the reverse Stirling cycle from the outside, Cooling heat that transports the cold heat of the low temperature section with a low temperature side circulation circuit that has a closed circuit force that connects a low temperature side condenser thermally coupled to the low temperature section and a plurality of low temperature side evaporators to form a thermosiphon
  • a Stirling refrigeration system is disclosed in which a carrier medium is enclosed in a low-temperature side circulation circuit.
  • the heat in the high temperature part is dissipated from the high temperature side heat exchange cycle (heat dissipation system).
  • the high temperature side heat exchange cycle includes a high temperature side evaporator and a high temperature side condenser connected by piping, and heat is transferred and released by the thermosyphon principle.
  • a casing, a piezoelectric vibrator provided inside the casing, and a pump chamber on one side of the piezoelectric vibrator are provided.
  • a piezoelectric pump having a suction check valve and a discharge check valve is disclosed.
  • the pump chamber communicates with an anti-pump chamber located on the opposite side of the pump chamber with respect to the piezoelectric vibrator.
  • Patent Document 1 Japanese Patent Laid-Open No. 2003-50073
  • Patent Document 2 Registered Utility Model No. 2505727
  • a casing is formed by using a plurality of opposing members so as to form a space inside.
  • sealing between a plurality of members is generally performed using an O-ring or the like.
  • a slow leak of the working medium occurs, in a closed system in which the pressure in the circuit is lower or higher than the atmospheric pressure (referred to herein as a negative pressure state or a positive pressure state). It cannot be used for a long time.
  • a problem is caused by the piezoelectric pump shown in Conventional Example 2. Will not be resolved.
  • the piezoelectric element used in the piezoelectric pump has low heat resistance, in order to improve the sealing performance, when joining the plurality of members by welding, how to transfer the welding heat to the piezoelectric element. The question is whether to do it. By reducing the amount of heat transmitted to the piezoelectric element, the function of the piezoelectric element is improved, and as a result, the fluid circulation efficiency is improved.
  • the present invention has been made in view of the above-described problems, and an object of the present invention is to provide a piezoelectric pump and a Stirling cooler that efficiently circulates fluid in a negative pressure-positive pressure state. It is in.
  • a piezoelectric pump includes a casing formed by joining a plurality of metal members, a piezoelectric element that partitions a space in the casing into first and second internal spaces, a casing, and a piezoelectric element. And a non-metallic first and second internal parts for holding the piezoelectric element.
  • the plurality of metal members constituting the casing are joined by welding.
  • a piezoelectric pump that can be used for a long time in a closed system that operates at a pressure lower or higher than atmospheric pressure is provided. Further, by providing a non-metallic internal part between the metal casing and the piezoelectric element and separating the casing and the piezoelectric element, it is possible to suppress welding heat from being transmitted to the piezoelectric element.
  • the first and second internal parts are made of resin, and the first and second internal parts respectively define outer peripheries of the first and second internal spaces, and the first and second internal parts It is preferable to hold the piezoelectric element so that the piezoelectric element is sandwiched between them.
  • a piezoelectric pump can be manufactured at low cost by using a resin that can be easily molded and holding the piezoelectric element with a simple structure.
  • the piezoelectric pump is formed on a first internal component, and an inlet portion through which a working medium directed to the first internal space serving as a suction pipe force working space outside the casing passes, (1) An outlet formed on an internal part and through which a working medium that passes from the first inner space to a discharge pipe outside the casing passes, and a first installed between the inlet and the first inner space.
  • the first and second check valve installation portions where the first and second check valves are respectively installed, and the plurality of groove portions where the plurality of O-rings are respectively installed. Is preferably provided.
  • the communication device further includes a communication portion that communicates the second internal space as the back pressure space with the inlet portion or the outlet portion, and the communication portion is formed by holes or grooves formed in the first and second internal components. Preferably, it is configured.
  • the pressure in the working space (first internal space) and the back pressure space (second internal space) can be made substantially equal. Further, by providing a groove hole in the internal part made of resin, the communication part can be easily formed without providing a communication pipe outside the casing. As a result, a compact piezoelectric pump that circulates fluid efficiently can be formed at low cost.
  • the communication portion communicates with a joint portion of a plurality of metal members in the casing.
  • the communication part can be used as a leak check hole of the casing.
  • the piezoelectric pump is formed on a first internal part, and a first suction pipe force outside the casing passes through a working medium facing the first internal space as a working space.
  • a second inlet pipe formed on the second internal part and through which the working medium directed to the second internal space as the working space outside the casing passes, and on the first internal part
  • the first internal space force is formed on the second outlet part and the first outlet part through which the working medium that flows toward the first discharge pipe outside the casing passes, and from the second internal space to the first outlet part outside the casing.
  • first to fourth check valve forces S are installed in the first and second internal parts, respectively, and the first to fourth check valve installation portions and the plurality of groove portions in which the plurality of O-rings are respectively installed. It is preferable to set up with.
  • both sides of the piezoelectric element can be used as the working space.
  • a recess or groove in an internal part made of a resin it is possible to easily form an installation base or groove on which a check valve or an O-ring is provided. As a result, a piezoelectric pump that circulates fluid efficiently is provided at low cost.
  • This communication hole can be used as a leak check hole of the casing.
  • the piezoelectric pump is formed on a first internal component, and a suction pipe force outside the casing, a first inlet portion through which a working medium that passes through the first internal space as the working space passes, (2) Force at the first inlet formed on the internal part
  • a first outlet portion through which the working medium toward the discharge pipe passes, a second outlet portion formed on the second internal part and through which the working medium directed toward the first outlet portion passes, 1 and 2 are formed by holes or grooves formed in the second internal part
  • the first communication part is formed by holes and grooves formed in the first and second internal parts.
  • a second communication part for communicating the first outlet with the second outlet part, the first and second inlet parts, and the first and second parts.
  • First and second check valves installed between the first and second outlet spaces, and third and fourth check valves respectively installed between the first and second outlet portions and the first and second inner spaces.
  • the first to fourth check valves are installed in the first and second internal parts, respectively, the first to fourth check valves are installed, and the plurality of grooves are installed with a plurality of O-rings. Is preferably provided.
  • both sides of the piezoelectric element can be used as the working space.
  • the first and second communication portions can be formed without providing a communication pipe outside the casing.
  • by providing recesses and grooves in the internal parts made of grease it is possible to easily form installation bases and grooves on which check valves and O-rings are provided. As a result, a compact piezoelectric pump that efficiently circulates fluid is provided at low cost.
  • one of the first and second communicating portions may be communicated with a joint portion of the metal member in the casing.
  • the communication part can be used as a leak check hole of the casing.
  • another O-ring for sealing the first communication part or the second communication part may be further provided at the joint surface between the first internal part and the second internal part.
  • each of the plurality of metal members constituting the casing may have a flange portion, and the casing may be formed by welding the front end portions of the flange portion. Thereby, a welding location and a piezoelectric element can be further moved away. Therefore, the effect of suppressing heat input to the piezoelectric element can be further enhanced.
  • the above-described piezoelectric pump is provided in the working medium circulation circuit on the high temperature side.
  • a piezoelectric pump in which a slow leak does not occur even if it is used for a long time in a negative pressure / positive pressure sealed system.
  • FIG. 1 is an example of a piping system diagram of a Stirling refrigerator.
  • FIG. 2 is a cross-sectional view of the piezoelectric pump according to the first embodiment of the present invention.
  • FIG. 3 is a cross-sectional view of a piezoelectric pump according to Embodiment 2 of the present invention.
  • FIG. 4 is a cross-sectional view of a piezoelectric pump according to Embodiment 3 of the present invention.
  • FIG. 5 is an example of a side sectional view showing a Stirling refrigerator in a Stirling refrigerator.
  • FIG. 6 is a cross-sectional view of a conventional piezoelectric pump.
  • cooling box is a concept including all of “refrigerator”, “freezer”, and “freezer refrigerator”.
  • a Stirling cooler as a Stirling engine-equipped device equipped with a Stirling refrigerator will be described.
  • a Stirling engine-equipped device in which the piezoelectric pump according to the present invention is installed is a Stirling cooler. Not limited to
  • the Stirling engine is also used as a generator, for example.
  • FIG. 1 is an example of a piping system diagram of a Stirling cooler in which a piezoelectric pump according to Embodiments 1 to 3 of the present invention to be described later is provided in a working medium circulation circuit on a high temperature side.
  • the Stirling refrigerator 1 includes a Stirling refrigerator 4 (Stirling engine) having a heat dissipating part 2 and a heat absorbing part 3, a high-temperature side evaporator 5 attached to the heat dissipating part 2, 1st high-temperature side circulation circuit (first circulation circuit) including high-temperature side condenser 7 and pipes 2A and 2B, and high temperature Side evaporator 5, circulation pump 6, dew prevention pipe 9 and pipes 2C, 2D, 2E, 2F, 2nd high temperature side circulation circuit (second circulation circuit), and low temperature side condenser 10 attached to heat absorption part 3 And a low temperature side circulation circuit including the low temperature side evaporator 11 and the pipes 3A and 3B.
  • first circulation circuit including high-temperature side condenser 7 and pipes 2A and 2B
  • high temperature Side evaporator 5 1st high-temperature side circulation circuit (first circulation circuit) including high-temperature side condenser 7 and pipes 2A and 2B, and high temperature Side
  • the first high temperature side circulation circuit cools the heat dissipating part 2 of the Stirling refrigerator 4, and the second high temperature side circulation circuit supplies heat to the dew condensation prevention pipe 9. Further, the low-temperature side circulation circuit performs heat exchange between the air in the refrigerator and the heat absorption part 3 of the Stirling refrigerator 4.
  • Water (H20) or the like is sealed as a refrigerant in the first and second high-temperature side circulation circuits.
  • the refrigerant evaporated in the high temperature side evaporator 5 reaches the high temperature side condenser 7 via the pipe 2A (high temperature side conduit) (broken arrow in FIG. 1).
  • the refrigerant is condensed by heat exchange with the outside air in the high-temperature side condenser 7.
  • a fan 8 for generating an air flow is provided in the vicinity of the high-temperature side condenser 7.
  • the condensed refrigerant returns to the high temperature side evaporator 5 via the pipe 2B (high temperature side return pipe).
  • the high-temperature side condenser 7 is used so that the heat generated in the heat dissipating section 2 can be transferred using the natural circulation caused by the evaporation and condensation of the refrigerant. It is arranged above the high temperature side evaporator 5. In order to adjust the boiling point of the refrigerant, the pressure in the circulation circuit system is adjusted (substantially reduced in vacuum).
  • a pipe 2 C is connected to the lower part of the high temperature side evaporator 5.
  • High-temperature side evaporator 5 Power pipe Liquid refrigerant flows into pipe 2C.
  • the refrigerant flowing into the pipe 2C reaches the circulating pump 6 provided below the Stirling refrigerator 4 through the pipe 2D.
  • the refrigerant discharged from the circulation pump 6 is sent to the dew condensation prevention pipe 9 through the pipe 2E.
  • the refrigerant flowing in the dew generation preventing noise 9 is kept at a relatively high temperature by the heat given from the heat dissipating part 2 of the Stirling refrigerator 4. Therefore, by providing the dew prevention pipe 9 on the front surface of the refrigerator, it is possible to suppress dew generation at the door portion and the like.
  • the refrigerant that has flowed through the dew prevention pipe 9 returns to the high temperature side evaporator 5 through the pipe 2F.
  • forced circulation by the circulation pump 6 is performed in the second high temperature side circulation circuit.
  • Carbon dioxide, hydrocarbons, or the like is sealed as a refrigerant in the low temperature side circulation circuit.
  • the refrigerant condensed in the low temperature side condenser 10 reaches the low temperature side evaporator 11 via the pipe 3A (low temperature side conduit).
  • Low temperature side evaporator 11 As the refrigerant evaporates, heat exchange takes place Is called.
  • a fan 12 for generating an air flow is provided in the vicinity of the low-temperature side evaporator 11. After the heat exchange, the gasified refrigerant returns to the low temperature side condenser 10 via the pipe 3B (low temperature side return pipe).
  • the low-temperature side evaporator 11 is thus connected to the low-temperature side condensation so that the cold heat generated in the heat-absorbing section 3 can be transmitted using the natural circulation caused by the evaporation and condensation of the refrigerant. It is arranged below the vessel 10. Also, in order to adjust the boiling point of the refrigerant, the pressure in the circulation circuit system is adjusted (substantially reduced to a vacuum state).
  • FIG. 2 is a cross-sectional view showing the piezoelectric pump according to the first embodiment.
  • the piezoelectric pump 6 includes a casing 32 formed by welding a plurality of metal members, and a space in the casing 32 as a working space 34 (first internal Space) and back pressure space 35 (second internal space), and a non-metallic internal component 33A, which is provided between the casing 32 and the piezoelectric element 36 and holds the piezoelectric element 36.
  • 33B first and second internal parts.
  • the internal parts 33A and 33B are made of a resin that is easily processed and molded.
  • the internal part 33A defines the outer periphery of the working space 34 (pump chamber), and the internal part 33B defines the outer periphery of the back pressure space 35.
  • a recess is formed between the internal parts 33A and 33B, and the piezoelectric element 36 is received and held in the recess. That is, the internal parts 33A and 33B hold the piezoelectric element 36 so as to sandwich the piezoelectric element 36.
  • the check valve 39 first check valve
  • Check valve 40 second check valve
  • the installation base on which the check valves 39 and 40 are respectively installed are provided in advance in the internal parts 33A and 33B. It is provided by processing.
  • the piezoelectric pump 6 has a communication portion 44 that allows the back pressure space 35 and the inlet portion 37 to communicate with each other.
  • the communication part 44 is configured by a hole or groove formed in the internal parts 33A and 33B.
  • the communication portion 44 reaches the inner surface of the casing 32 and communicates with the welded portions of the plurality of metal members.
  • a communication part for communicating the back pressure space 35 and the outlet part 38 may be provided.
  • the durability against leakage of the working medium can be improved by joining a plurality of members constituting the casing 32 by welding.
  • the piezoelectric pump 6 that can be used for a long time in a closed system of negative pressure and positive pressure.
  • the inner parts 33A and 33B made of resin are provided between the metal casing 32 and the piezoelectric element 36, and the casing 32 and the piezoelectric element 36 are separated from each other, so that the welding heat at the time of welding the metal member is increased. Can be prevented from being transmitted to the piezoelectric element 36. Therefore, the operation efficiency of the piezoelectric element 36 is improved, and as a result, the circulation efficiency of the working medium is improved.
  • the internal parts 33A and 33B a resin-made part that can be easily molded is used, and the piezoelectric pump 36 is held at a low cost by holding the piezoelectric element 36 with a simple structure as described above. Can be produced.
  • the installation base and groove in which the check valves 39 and 40 and the plurality of O-rings 43 are provided can be easily formed by providing recesses and grooves in the resin internal parts 33A and 33B. it can.
  • the communication portion 44 Furthermore, by forming the communication portion 44, the working space 34 (first internal space) and the back pressure air The pressure in the space 35 (second internal space) can be kept approximately equal. As a result, the circulation efficiency of the working medium is improved in the negative pressure / positive pressure state.
  • the communication part 44 can be easily formed without providing a communication pipe outside the casing by providing grooves in the internal parts 33A, 33B made of resin. As a result, the compact structure of the piezoelectric pump 6 can be realized at low cost. Further, the communication portion 44 can be used as a leak check hole (communication hole) of the casing by communicating the communication portion 44 with a welded portion of a plurality of metal members.
  • Each of the plurality of metal members constituting the casing 32 has a flange portion 46, and the casing 32 is formed by welding the front end portions of the flange portion 46.
  • the welded portion and the piezoelectric element 36 can be further away from each other. Therefore, the effect of suppressing heat input to the piezoelectric element 36 can be further enhanced.
  • FIG. 3 is a sectional view showing the piezoelectric pump according to the second embodiment.
  • the piezoelectric pump 6 according to the present embodiment is a modification of the piezoelectric pump 6 according to the first embodiment, and uses both sides of the piezoelectric element 36 as pump chambers (operating spaces 34A, 34B). Features.
  • the piezoelectric pump 6 is formed on the internal part 33A (first internal part), and from the inlet pipe 41 A (first suction pipe) outside the casing 32 to the working space 34A (first 1 Internal space) Directing force 37A (first inlet part) through which the working medium passes and the internal part 33B (second internal part) are formed on the inlet pipe 41B (second suction pipe) outside the casing 32
  • An inlet 37B (second inlet) through which the working medium directed to the working space 34B (second inner space) passes and an inner part 33A are formed on the inner part 33A, and the outlet pipe outside the casing 32 from the working space 34A.
  • Check valves 40A and 40B (third and fourth check valves), working spaces 34A and 34B and piezoelectric element 3 And a plurality of O-rings 43 that seal the gaps between the inlets 37A and 37B and the outlets 38A and 38B and the inner surface of the casing 32, respectively.
  • the installation base on which the check valves 39A, 39B, 40A, 40B are respectively installed (the first to fourth check valve installation portions) and the groove portion on which each O-ring 43 is installed are The parts 33A and 33B are provided by machining in advance.
  • Piezoelectric pump 6 has leak check holes 44A (communication holes) in internal parts 33A and 33B that reach the inner surface of casing 32 from inlets 37A and 37B and communicate with the welded portions of a plurality of metal members. .
  • the leak check hole 44A may be provided only in one of the internal parts 33A and 33B. Instead of the leak check hole 44A, the leak check hole 44A reaches the inner surface of the casing 32 from the outlet portions 38A and 38B, and a plurality of metals.
  • a leak check hole communicating with the welded part of the manufactured member may be provided.
  • the piezoelectric pump 6 with high circulation efficiency that can be used for a long period in a closed system of negative pressure and positive pressure is provided at low cost.
  • the leakage check of the casing can be performed by communicating the leak check hole 44A with the welded portions of the plurality of metal members.
  • FIG. 4 is a cross-sectional view showing the piezoelectric pump according to the third embodiment.
  • the piezoelectric pump 6 according to the present embodiment is a modification of the piezoelectric pump 6 according to the first embodiment, and uses both sides of the piezoelectric element 36 as pump chambers (operating spaces 34A, 34B). Features.
  • the piezoelectric pump 6 is formed on the internal part 33A (first internal part), and the inlet 32 of the casing 32 outside the intake 41 (suction pipe) also has a working space 34A (first internal space). Formed on the inlet part 37A (first inlet part) and the internal part 33B (second internal part) through which the working medium that is directed to the directional force passes from the inlet part 37A to the working space 34B (second internal space).
  • the working medium is directed toward the outlet pipe 42 (discharge pipe) outside the working space 3 4A force casing 32
  • Outlet part 38A first outlet part
  • an outlet part 38B second outlet part formed on the internal part 33B through which the working medium passes from the working space 34B to the outlet part 38A, and the internal parts 33A, 3 Consists of holes or grooves formed in 3B, and includes inlet communication part 44B (first communication part) that communicates inlet parts 37A and 37B, and holes or grooves formed in internal parts 33A and 33B.
  • An outlet communication part 44C (second communication part) for communicating the outlet parts 38A and 38B, and check valves 39A and 39B (first and first valves) installed between the inlet parts 37A and 37B and the working spaces 34A and 34B, respectively. 2 check valves), check valves 40A and 40B (third and fourth check valves) installed between outlets 38A and 38B and working spaces 34A and 34B, and working spaces 34A and 34B.
  • the installation base on which the check valves 39A, 39B, 40A, 40B are installed (the first to fourth check valve installation parts) and the groove part on which each O-ring 43 is installed are: It is provided by machining the internal parts 33A and 33B in advance.
  • the inlet communication portion 44B reaches the inner surface of the casing 32 and communicates the welded portions of a plurality of metal members.
  • the inlet communication portion 44B can be used as a leak check hole.
  • the outlet communication portion 44C is sealed by providing an O-ring (other O-ring) on the joint surface of the internal parts 33A and 33B. Does not communicate.
  • the inlet communication portion 44B may be sealed, and the outlet communication portion 44C may be communicated with the welding location.
  • the piezoelectric pump 6 with high circulation efficiency that can be used for a long period in a closed system in a negative pressure / positive pressure state is provided at low cost.
  • the inlet communication portion 44B and the outlet communication portion 44C can be easily formed without providing a communication pipe outside the casing by providing grooves in the internal parts 33A and 33B made of resin. . As a result, a compact structure of the piezoelectric pump 6 is realized.
  • the Stirling refrigerator 4 of the present embodiment is a free piston type Stirling engine, which includes a casing 30, a cylinder 13 assembled to the casing 30, and a cylinder. 13 reciprocating piston 14 and displacer 15, regenerator 16, working space 17 including compression space 17A and expansion space 17B, heat dissipating part 2, heat absorbing part 3, and linear as a piston drive means
  • a motor 23, a piston spring 24, a displacer spring 25, a displacer rod 26, and a back pressure space 27 are provided.
  • the outer shell (outer wall) of the Stirling refrigerator 4 is not composed of a single container, and the casing 30 (bessel portion) located on the back pressure space 27 side and the working space 17 Consists mainly of heat dissipating part 2, tube 18A and heat absorbing part 3 located on the side.
  • the casing 30 defines a back pressure space 27.
  • Various parts including a cylinder 13, a linear motor 23, a piston spring 24, and a displacer spring 25 are assembled in the casing 30.
  • the outer shell is filled with a working medium such as helium gas, hydrogen gas, or nitrogen gas.
  • the cylinder 13 has a substantially cylindrical shape, and receives therein a piston 14 and a displacer 15 as a free piston so as to be capable of reciprocating.
  • the piston 14 and the displacer 15 are coaxially spaced apart, and the piston 14 and the displacer 15 partition the working space 17 in the cylinder 13 into a compression space 17A and an expansion space 17B.
  • the working space 17 is a space located closer to the displacer 15 than the end face of the piston 14 on the displacer 15 side, and a compression space 17A is formed between the piston 14 and the displacer 15, and An expansion space 17B is formed between the part 3 and the part 3.
  • the compression space 17A is mainly surrounded by the heat dissipating part 2, and the expansion space 17B is mainly surrounded by the heat absorbing part 3.
  • regenerator 16 in which a film is wound while having a predetermined gap on the inner peripheral surface of the tube 18A is disposed.
  • Regenerator 1 The compression space 17 ⁇ / b> A and the expansion space 17 ⁇ / b> B communicate with each other through 6.
  • a closed circuit is formed in the Stirling refrigerator 4.
  • the working medium enclosed in the closed circuit flows in accordance with the operations of the piston 14 and the displacer 15, thereby realizing a reverse Stirling cycle described later.
  • a linear motor 23 is disposed in the back pressure space 27 located outside the cylinder 13.
  • the linear motor 23 has an inner yoke 20, a movable magnet portion 21, and an outer yoke 22, and the piston 14 is driven in the axial direction of the cylinder 13 by the linear motor 23.
  • One end of the piston 14 is connected to a piston spring 24 composed of a plate panel or the like.
  • the piston spring 24 functions as an elastic force applying means for applying an elastic force to the piston 14.
  • the piston 14 can be reciprocated in the cylinder 13 more stably and periodically.
  • One end of the displacer 15 is connected to a displacer spring 25 via a displacer rod 26.
  • the displacer rod 26 is disposed through the piston 14, and the displacer spring 25 is constituted by a plate panel or the like.
  • the peripheral edge of the displacer spring 25 and the peripheral edge of the piston spring 24 are supported by a support member that extends from the linear motor 23 to the back pressure space 27 side of the piston 14 (hereinafter sometimes referred to as rear).
  • a back pressure space 27 surrounded by a casing 30 is disposed on the side opposite to the displacer 15 with respect to the piston 14.
  • the back pressure space 27 includes an outer peripheral region located around the piston 14 in the casing 30 and a rear region located closer to the piston spring 24 (rear side) than the piston 14 in the casing 30.
  • a working medium is also present in the back pressure space 27.
  • a heat exchanger 18 and a heat exchanger 19 are provided on the inner peripheral surfaces of the heat radiating unit 2 and the heat absorbing unit 3, respectively.
  • the heat exchanges 18 and 19 perform heat exchange between the compression space 17A and the expansion space 17B and the heat radiation unit 2 and the heat absorption unit 3, respectively.
  • a balance mass 29 is attached to the rear side of the casing 30 via a plate panel 28.
  • the balance mass 29 is a mass member that absorbs the vibration of the casing 30 caused by the vibration of the piston 14 and the displacer 15. Specifically, when the piston 14 is vibrated in the casing 30 due to the vibration of the displacer 15, this case is used. As the balance mass 29 vibrates so as to follow the vibration of the single 30, the vibration of the Stirling refrigerator 4 is reduced.
  • the linear motor 23 is operated to drive the piston 14.
  • the piston 14 driven by the linear motor 23 approaches the displacer 15 and compresses the working medium (working gas) in the compression space 17A.
  • the high pressure working medium that has flowed into the expansion space 17B has the displacer 15 on the piston 14 side.
  • the present invention is applied to a piezoelectric pump and a Stirling cooler.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Reciprocating Pumps (AREA)
  • Details Of Reciprocating Pumps (AREA)
  • Devices That Are Associated With Refrigeration Equipment (AREA)

Abstract

La présente invention décrit une pompe piézoélectrique et un réfrigérateur Stirling. La pompe piézoélectrique (6) comprend un corps (32) formé en soudant une pluralité d’éléments métalliques les uns aux autres, un élément piézoélectrique (36) divisant un espace dans le corps (32) en un espace de fonctionnement (34) et un espace de contre-pression (35), ainsi que des parties internes en résine (33A, 33B) installées entre le corps (32) et l’élément piézoélectrique (36) et supportant l’élément piézoélectrique (36). Les parties internes (33A, 33B) sont formées en résine facile à usiner et à mouler. La partie interne (33A) spécifie la périphérie extérieure de l’espace de fonctionnement (34) et la partie interne (33B) spécifie la périphérie extérieure de l’espace de contre-pression (35). Du fait qu’une partie évidée est formée entre les parties internes (33A, 33B) en plaçant les parties internes (33A, 33B) en face l’une de l’autre, l’élément piézoélectrique (36) peut être stocké de façon retenue dans la partie évidée.
PCT/JP2005/020694 2004-11-17 2005-11-11 Pompe piezoelectrique et refrigerateur stirling WO2006054488A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP05806011A EP1813811A1 (fr) 2004-11-17 2005-11-11 Pompe piezoelectrique et refrigerateur stirling
US11/666,151 US20080101965A1 (en) 2004-11-17 2005-11-11 Piezoelectric Pump and Stirling Refrigerator/Freezer

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004-333189 2004-11-17
JP2004333189A JP3949135B2 (ja) 2004-11-17 2004-11-17 圧電ポンプおよびスターリング冷却庫

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WO2006054488A1 true WO2006054488A1 (fr) 2006-05-26

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US (1) US20080101965A1 (fr)
EP (1) EP1813811A1 (fr)
JP (1) JP3949135B2 (fr)
KR (1) KR20070073973A (fr)
CN (1) CN101057077A (fr)
WO (1) WO2006054488A1 (fr)

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KR20140147345A (ko) * 2013-06-19 2014-12-30 삼성전기주식회사 마이크로 펌프 장치
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DK2930363T3 (da) * 2014-04-10 2020-09-07 Stichting Nationaal Lucht En Ruimtevaart Laboratorium Piezoelektrisk pumpeindretning og dermed forsynet trykkredsløb
KR20150124390A (ko) * 2014-04-25 2015-11-05 주식회사 서남 극저온 냉동 시스템
CN106150986A (zh) * 2015-03-25 2016-11-23 深圳市华简泵业科技有限公司 压电泵陶瓷片定位方法
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JP6695154B2 (ja) * 2016-01-28 2020-05-20 東芝テック株式会社 インク循環装置及びプリンタ
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CN106766540A (zh) * 2017-03-31 2017-05-31 宁波华斯特林电机制造有限公司 一种多档冷箱
CN108168135A (zh) * 2018-02-21 2018-06-15 杨厚成 一种声能制冷机及其膨胀活塞
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CN108870793A (zh) * 2018-08-02 2018-11-23 杨厚成 一种声能自由活塞式制冷机
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US11464140B2 (en) * 2019-12-06 2022-10-04 Frore Systems Inc. Centrally anchored MEMS-based active cooling systems
CN109162902B (zh) * 2018-09-20 2023-12-15 长春工业大学 一种浮动式工字型阀压电泵
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US20080101965A1 (en) 2008-05-01
EP1813811A1 (fr) 2007-08-01
JP2006144591A (ja) 2006-06-08
CN101057077A (zh) 2007-10-17
JP3949135B2 (ja) 2007-07-25
KR20070073973A (ko) 2007-07-10

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