JP3919490B2 - 真空排気システム - Google Patents

真空排気システム Download PDF

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Publication number
JP3919490B2
JP3919490B2 JP2001281960A JP2001281960A JP3919490B2 JP 3919490 B2 JP3919490 B2 JP 3919490B2 JP 2001281960 A JP2001281960 A JP 2001281960A JP 2001281960 A JP2001281960 A JP 2001281960A JP 3919490 B2 JP3919490 B2 JP 3919490B2
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JP
Japan
Prior art keywords
purge gas
vacuum pump
pressure sensor
introduction pipe
gas introduction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2001281960A
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English (en)
Japanese (ja)
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JP2003089877A (ja
JP2003089877A5 (https=
Inventor
登喜男 深井
清司 柳澤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
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Publication date
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Priority to JP2001281960A priority Critical patent/JP3919490B2/ja
Publication of JP2003089877A publication Critical patent/JP2003089877A/ja
Publication of JP2003089877A5 publication Critical patent/JP2003089877A5/ja
Application granted granted Critical
Publication of JP3919490B2 publication Critical patent/JP3919490B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Chemical Vapour Deposition (AREA)
JP2001281960A 2001-09-17 2001-09-17 真空排気システム Expired - Fee Related JP3919490B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001281960A JP3919490B2 (ja) 2001-09-17 2001-09-17 真空排気システム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001281960A JP3919490B2 (ja) 2001-09-17 2001-09-17 真空排気システム

Publications (3)

Publication Number Publication Date
JP2003089877A JP2003089877A (ja) 2003-03-28
JP2003089877A5 JP2003089877A5 (https=) 2004-12-16
JP3919490B2 true JP3919490B2 (ja) 2007-05-23

Family

ID=19105684

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001281960A Expired - Fee Related JP3919490B2 (ja) 2001-09-17 2001-09-17 真空排気システム

Country Status (1)

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JP (1) JP3919490B2 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102061457B (zh) * 2010-10-28 2012-10-31 理想能源设备(上海)有限公司 气相反应装置

Also Published As

Publication number Publication date
JP2003089877A (ja) 2003-03-28

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