JP2003089877A5 - - Google Patents

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Publication number
JP2003089877A5
JP2003089877A5 JP2001281960A JP2001281960A JP2003089877A5 JP 2003089877 A5 JP2003089877 A5 JP 2003089877A5 JP 2001281960 A JP2001281960 A JP 2001281960A JP 2001281960 A JP2001281960 A JP 2001281960A JP 2003089877 A5 JP2003089877 A5 JP 2003089877A5
Authority
JP
Japan
Prior art keywords
purge gas
vacuum
exhaust system
introduction pipe
gas introduction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2001281960A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003089877A (ja
JP3919490B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2001281960A priority Critical patent/JP3919490B2/ja
Priority claimed from JP2001281960A external-priority patent/JP3919490B2/ja
Publication of JP2003089877A publication Critical patent/JP2003089877A/ja
Publication of JP2003089877A5 publication Critical patent/JP2003089877A5/ja
Application granted granted Critical
Publication of JP3919490B2 publication Critical patent/JP3919490B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2001281960A 2001-09-17 2001-09-17 真空排気システム Expired - Fee Related JP3919490B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001281960A JP3919490B2 (ja) 2001-09-17 2001-09-17 真空排気システム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001281960A JP3919490B2 (ja) 2001-09-17 2001-09-17 真空排気システム

Publications (3)

Publication Number Publication Date
JP2003089877A JP2003089877A (ja) 2003-03-28
JP2003089877A5 true JP2003089877A5 (https=) 2004-12-16
JP3919490B2 JP3919490B2 (ja) 2007-05-23

Family

ID=19105684

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001281960A Expired - Fee Related JP3919490B2 (ja) 2001-09-17 2001-09-17 真空排気システム

Country Status (1)

Country Link
JP (1) JP3919490B2 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102061457B (zh) * 2010-10-28 2012-10-31 理想能源设备(上海)有限公司 气相反应装置

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