JP2003089877A5 - - Google Patents

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Publication number
JP2003089877A5
JP2003089877A5 JP2001281960A JP2001281960A JP2003089877A5 JP 2003089877 A5 JP2003089877 A5 JP 2003089877A5 JP 2001281960 A JP2001281960 A JP 2001281960A JP 2001281960 A JP2001281960 A JP 2001281960A JP 2003089877 A5 JP2003089877 A5 JP 2003089877A5
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JP
Japan
Prior art keywords
purge gas
vacuum
exhaust system
introduction pipe
gas introduction
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Application number
JP2001281960A
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Japanese (ja)
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JP2003089877A (en
JP3919490B2 (en
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Priority to JP2001281960A priority Critical patent/JP3919490B2/en
Priority claimed from JP2001281960A external-priority patent/JP3919490B2/en
Publication of JP2003089877A publication Critical patent/JP2003089877A/en
Publication of JP2003089877A5 publication Critical patent/JP2003089877A5/ja
Application granted granted Critical
Publication of JP3919490B2 publication Critical patent/JP3919490B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Claims (6)

真空チャンバに接続された真空ポンプと、
ガス供給源からのパージガスを前記真空ポンプの排気配管に導入するパージガス導入配管と、
前記パージガス導入配管に設置された圧力センサとを備えたことを特徴とする真空排気システム。A vacuum pump connected to the vacuum chamber;
A purge gas introduction pipe for introducing a purge gas from a gas supply source into an exhaust pipe of the vacuum pump,
A vacuum exhaust system comprising: a pressure sensor installed in the purge gas introduction pipe. 前記パージガス導入配管を介して導入されるパージガスの流量が前記排気配管を介して前記真空ポンプにより排気されるガスの流量よりも多いことを特徴とする請求項１に記載の真空排気システム。2. The vacuum exhaust system according to claim 1, wherein a flow rate of the purge gas introduced through the purge gas introduction pipe is larger than a flow rate of the gas exhausted by the vacuum pump through the exhaust pipe. 3. 前記パージガス導入配管を介して導入されるパージガスの圧力が前記排気配管を介して前記真空ポンプにより排気されるガスの圧力よりも高いことを特徴とする請求項１に記載の真空排気システム。The vacuum exhaust system according to claim 1, wherein a pressure of a purge gas introduced through the purge gas introduction pipe is higher than a pressure of a gas exhausted by the vacuum pump through the exhaust pipe. 前記圧力センサと前記パージガス導入配管との間にバルブを設けたことを特徴とする請求項１乃至３のいずれか一項に記載の真空排気システム。The vacuum exhaust system according to any one of claims 1 to 3, wherein a valve is provided between the pressure sensor and the purge gas introduction pipe. 前記圧力センサを前記パージガス導入配管の中心よりも上方の位置に配置したことを特徴とする請求項１乃至４のいずれか一項に記載の真空排気システム。The vacuum exhaust system according to any one of claims 1 to 4, wherein the pressure sensor is disposed at a position higher than a center of the purge gas introduction pipe. 前記圧力センサのダイアフラム面を下方に向けたことを特徴とする請求項１乃至４のいずれか一項に記載の真空排気システム。The vacuum exhaust system according to any one of claims 1 to 4, wherein a diaphragm surface of the pressure sensor faces downward.
JP2001281960A 2001-09-17 2001-09-17 Vacuum exhaust system Expired - Fee Related JP3919490B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001281960A JP3919490B2 (en) 2001-09-17 2001-09-17 Vacuum exhaust system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001281960A JP3919490B2 (en) 2001-09-17 2001-09-17 Vacuum exhaust system

Publications (3)

Publication Number Publication Date
JP2003089877A JP2003089877A (en) 2003-03-28
JP2003089877A5 true JP2003089877A5 (en) 2004-12-16
JP3919490B2 JP3919490B2 (en) 2007-05-23

Family

ID=19105684

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001281960A Expired - Fee Related JP3919490B2 (en) 2001-09-17 2001-09-17 Vacuum exhaust system

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JP (1) JP3919490B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102061457B (en) * 2010-10-28 2012-10-31 理想能源设备(上海)有限公司 Gas phase reaction device

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