JP3897357B2 - 撮像素子、撮像システムおよび撮像方法 - Google Patents

撮像素子、撮像システムおよび撮像方法 Download PDF

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Publication number
JP3897357B2
JP3897357B2 JP50032296A JP50032296A JP3897357B2 JP 3897357 B2 JP3897357 B2 JP 3897357B2 JP 50032296 A JP50032296 A JP 50032296A JP 50032296 A JP50032296 A JP 50032296A JP 3897357 B2 JP3897357 B2 JP 3897357B2
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pixel
charge
imaging device
imaging
circuit
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JP50032296A
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Japanese (ja)
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JPH10505469A (ja
Inventor
オラヴア，リスト．オラヴイ
ピユーステイア，ヨウニ，イラリ
スールマン，トム，グンナル
サラキノス，ミルテアデイス，エヴアンジエロス
スパテイオテイス，コンスタンテイノス，エヴアンジエロス
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ゴールドパワー リミテッド
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Priority claimed from GB9410973A external-priority patent/GB2289979A/en
Priority claimed from GB9502419A external-priority patent/GB2289981A/en
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/29—Measurement performed on radiation beams, e.g. position or section of the beam; Measurement of spatial distribution of radiation
    • G01T1/2914—Measurement of spatial distribution of radiation
    • G01T1/2921—Static instruments for imaging the distribution of radioactivity in one or two dimensions; Radio-isotope cameras
    • G01T1/2928—Static instruments for imaging the distribution of radioactivity in one or two dimensions; Radio-isotope cameras using solid state detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/24—Measuring radiation intensity with semiconductor detectors
    • G01T1/247—Detector read-out circuitry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/29—Measurement performed on radiation beams, e.g. position or section of the beam; Measurement of spatial distribution of radiation
    • G01T1/2914—Measurement of spatial distribution of radiation
    • G01T1/2964—Scanners
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
    • H01L27/14601—Structural or functional details thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
    • H01L27/14665—Imagers using a photoconductor layer
    • H01L27/14676—X-ray, gamma-ray or corpuscular radiation imagers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
    • H01L27/148—Charge coupled imagers
    • H01L27/14831—Area CCD imagers
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/40—Extracting pixel data from image sensors by controlling scanning circuits, e.g. by modifying the number of pixels sampled or to be sampled
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/48—Increasing resolution by shifting the sensor relative to the scene
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/70—SSIS architectures; Circuits associated therewith
    • H04N25/71—Charge-coupled device [CCD] sensors; Charge-transfer registers specially adapted for CCD sensors
    • H04N25/74—Circuitry for scanning or addressing the pixel array
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/70—SSIS architectures; Circuits associated therewith
    • H04N25/76—Addressed sensors, e.g. MOS or CMOS sensors
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/70—SSIS architectures; Circuits associated therewith
    • H04N25/76—Addressed sensors, e.g. MOS or CMOS sensors
    • H04N25/77—Pixel circuitry, e.g. memories, A/D converters, pixel amplifiers, shared circuits or shared components
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/70—SSIS architectures; Circuits associated therewith
    • H04N25/76—Addressed sensors, e.g. MOS or CMOS sensors
    • H04N25/77—Pixel circuitry, e.g. memories, A/D converters, pixel amplifiers, shared circuits or shared components
    • H04N25/772—Pixel circuitry, e.g. memories, A/D converters, pixel amplifiers, shared circuits or shared components comprising A/D, V/T, V/F, I/T or I/F converters
    • H04N25/773—Pixel circuitry, e.g. memories, A/D converters, pixel amplifiers, shared circuits or shared components comprising A/D, V/T, V/F, I/T or I/F converters comprising photon counting circuits, e.g. single photon detection [SPD] or single photon avalanche diodes [SPAD]
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/70—SSIS architectures; Circuits associated therewith
    • H04N25/76—Addressed sensors, e.g. MOS or CMOS sensors
    • H04N25/7795—Circuitry for generating timing or clock signals
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N5/00—Details of television systems
    • H04N5/30—Transforming light or analogous information into electric information
    • H04N5/32—Transforming X-rays
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N5/00—Details of television systems
    • H04N5/30—Transforming light or analogous information into electric information
    • H04N5/32—Transforming X-rays
    • H04N5/321—Transforming X-rays with video transmission of fluoroscopic images
    • H04N5/325—Image enhancement, e.g. by subtraction techniques using polyenergetic X-rays
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/70—SSIS architectures; Circuits associated therewith
    • H04N25/76—Addressed sensors, e.g. MOS or CMOS sensors
    • H04N25/779—Circuitry for scanning or addressing the pixel array

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Molecular Biology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Toxicology (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Measurement Of Radiation (AREA)
  • Studio Devices (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
  • Cameras In General (AREA)
  • Apparatus For Radiation Diagnosis (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Traffic Control Systems (AREA)
JP50032296A 1994-06-01 1995-05-29 撮像素子、撮像システムおよび撮像方法 Expired - Lifetime JP3897357B2 (ja)

Applications Claiming Priority (9)

Application Number Priority Date Filing Date Title
GB9410973A GB2289979A (en) 1994-06-01 1994-06-01 Imaging devices systems and methods
GB9421289A GB2289980A (en) 1994-06-01 1994-10-21 Imaging devices systems and methods
GB9502419A GB2289981A (en) 1994-06-01 1995-02-08 Imaging devices systems and methods
GB9502419.6 1995-04-24
GB9508294A GB2289983B (en) 1994-06-01 1995-04-24 Imaging devices,systems and methods
GB9410973.3 1995-04-24
GB9508294.7 1995-04-24
GB9421289.1 1995-04-24
PCT/EP1995/002056 WO1995033332A2 (en) 1994-06-01 1995-05-29 Imaging devices, systems and methods

Publications (2)

Publication Number Publication Date
JPH10505469A JPH10505469A (ja) 1998-05-26
JP3897357B2 true JP3897357B2 (ja) 2007-03-22

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP50032296A Expired - Lifetime JP3897357B2 (ja) 1994-06-01 1995-05-29 撮像素子、撮像システムおよび撮像方法

Country Status (17)

Country Link
US (5) US5812191A (fi)
EP (1) EP0763302B1 (fi)
JP (1) JP3897357B2 (fi)
CN (1) CN1132408C (fi)
AT (2) ATE172343T1 (fi)
AU (1) AU691926B2 (fi)
CA (1) CA2191100C (fi)
DE (2) DE69505375T2 (fi)
DK (1) DK0763302T3 (fi)
ES (1) ES2123991T3 (fi)
FI (1) FI114841B (fi)
GB (1) GB2289983B (fi)
HK (1) HK1014819A1 (fi)
IL (1) IL113921A (fi)
NO (1) NO320777B1 (fi)
NZ (1) NZ287868A (fi)
WO (1) WO1995033332A2 (fi)

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WO2009154136A1 (ja) * 2008-06-18 2009-12-23 浜松ホトニクス株式会社 固体撮像装置

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GB2289983B (en) 1996-10-16
FI964728A0 (fi) 1996-11-27
CN1155955A (zh) 1997-07-30
GB2289983A (en) 1995-12-06
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DE69505375T2 (de) 1999-04-08
ES2123991T3 (es) 1999-01-16
FI964728A (fi) 1996-12-02
US6856350B2 (en) 2005-02-15
CA2191100A1 (en) 1995-12-07
GB9508294D0 (en) 1995-06-14
US20020089595A1 (en) 2002-07-11
AU2672095A (en) 1995-12-21
DK0763302T3 (da) 1999-06-23
NO320777B1 (no) 2006-01-30
EP0763302A2 (en) 1997-03-19
US5812191A (en) 1998-09-22
AU691926B2 (en) 1998-05-28
NO965104L (no) 1997-02-03
DE69533967D1 (de) 2005-03-03
ATE172343T1 (de) 1998-10-15
HK1014819A1 (en) 1999-09-30
US8169522B2 (en) 2012-05-01
WO1995033332A2 (en) 1995-12-07
IL113921A (en) 1997-04-15
CA2191100C (en) 2001-09-11
FI114841B (fi) 2004-12-31
NZ287868A (en) 1997-04-24
ATE288170T1 (de) 2005-02-15
US20010001562A1 (en) 2001-05-24
CN1132408C (zh) 2003-12-24
IL113921A0 (en) 1995-08-31
WO1995033332A3 (en) 1996-01-18
NO965104D0 (no) 1996-11-29
US20030164888A1 (en) 2003-09-04
DE69533967T2 (de) 2006-06-14
EP0763302B1 (en) 1998-10-14
JPH10505469A (ja) 1998-05-26
US20010002844A1 (en) 2001-06-07

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