JP3874993B2 - ターボ分子ポンプ - Google Patents

ターボ分子ポンプ Download PDF

Info

Publication number
JP3874993B2
JP3874993B2 JP2000147035A JP2000147035A JP3874993B2 JP 3874993 B2 JP3874993 B2 JP 3874993B2 JP 2000147035 A JP2000147035 A JP 2000147035A JP 2000147035 A JP2000147035 A JP 2000147035A JP 3874993 B2 JP3874993 B2 JP 3874993B2
Authority
JP
Japan
Prior art keywords
molecular pump
turbo molecular
temperature
fixed
rotating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2000147035A
Other languages
English (en)
Japanese (ja)
Other versions
JP2001329991A (ja
JP2001329991A5 (fr
Inventor
真 佐々木
泰彦 笠間
忠弘 大見
裕一 木下
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alps Alpine Co Ltd
Original Assignee
Alps Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=18653278&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=JP3874993(B2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Alps Electric Co Ltd filed Critical Alps Electric Co Ltd
Priority to JP2000147035A priority Critical patent/JP3874993B2/ja
Publication of JP2001329991A publication Critical patent/JP2001329991A/ja
Publication of JP2001329991A5 publication Critical patent/JP2001329991A5/ja
Application granted granted Critical
Publication of JP3874993B2 publication Critical patent/JP3874993B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/001—Testing thereof; Determination or simulation of flow characteristics; Stall or surge detection, e.g. condition monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0292—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/584—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps cooling or heating the machine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F04D29/642—Mounting; Assembling; Disassembling of axial pumps by adjusting the clearances between rotary and stationary parts

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP2000147035A 2000-05-18 2000-05-18 ターボ分子ポンプ Expired - Lifetime JP3874993B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000147035A JP3874993B2 (ja) 2000-05-18 2000-05-18 ターボ分子ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000147035A JP3874993B2 (ja) 2000-05-18 2000-05-18 ターボ分子ポンプ

Publications (3)

Publication Number Publication Date
JP2001329991A JP2001329991A (ja) 2001-11-30
JP2001329991A5 JP2001329991A5 (fr) 2004-09-02
JP3874993B2 true JP3874993B2 (ja) 2007-01-31

Family

ID=18653278

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000147035A Expired - Lifetime JP3874993B2 (ja) 2000-05-18 2000-05-18 ターボ分子ポンプ

Country Status (1)

Country Link
JP (1) JP3874993B2 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4528019B2 (ja) * 2004-04-27 2010-08-18 株式会社大阪真空機器製作所 分子ポンプの温度制御装置
JP4710322B2 (ja) * 2005-01-11 2011-06-29 株式会社島津製作所 真空ポンプ
US7965054B2 (en) 2007-07-26 2011-06-21 Shimadzu Corporation Vacuum pump
US10001126B2 (en) 2009-08-21 2018-06-19 Edwards Japan Limited Vacuum pump
JP7242321B2 (ja) * 2019-02-01 2023-03-20 エドワーズ株式会社 真空ポンプ及び真空ポンプの制御装置
CN116123143B (zh) * 2023-04-19 2023-06-16 鸿陆智能科技(山东)有限公司 一种磁悬浮透平真空泵的自冷却机构

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04127894U (ja) * 1991-05-14 1992-11-20 セイコー精機株式会社 真空ポンプ
JPH0612794U (ja) * 1992-07-13 1994-02-18 株式会社大阪真空機器製作所 複合型真空ポンプの加熱装置
JP3524174B2 (ja) * 1994-10-13 2004-05-10 株式会社大阪真空機器製作所 ねじ溝式真空ポンプ
JP3510007B2 (ja) * 1995-06-13 2004-03-22 日本原子力研究所 分子ポンプ
JPH0914184A (ja) * 1995-06-28 1997-01-14 Daikin Ind Ltd ターボ分子ポンプ
JP3672630B2 (ja) * 1995-07-21 2005-07-20 株式会社大阪真空機器製作所 分子ポンプ
JP3057486B2 (ja) * 1997-01-22 2000-06-26 セイコー精機株式会社 ターボ分子ポンプ
JP3716068B2 (ja) * 1997-04-22 2005-11-16 三菱重工業株式会社 ターボ分子ポンプ及び同ターボ分子ポンプを有する真空容器
JPH116774A (ja) * 1997-04-25 1999-01-12 Daikin Ind Ltd ロータ温度検出装置及び温度検出方法
JPH10306790A (ja) * 1997-05-01 1998-11-17 Daikin Ind Ltd 分子ポンプ
JPH118774A (ja) * 1997-06-17 1999-01-12 Konica Corp 画像処理システム及び画像処理方法
JPH11148487A (ja) * 1997-11-18 1999-06-02 Shimadzu Corp ターボ分子ポンプ
JPH11280690A (ja) * 1998-03-27 1999-10-15 Ebara Corp ターボ分子ポンプ
JP3576818B2 (ja) * 1998-06-30 2004-10-13 株式会社荏原製作所 ターボ分子ポンプ

Also Published As

Publication number Publication date
JP2001329991A (ja) 2001-11-30

Similar Documents

Publication Publication Date Title
JP3057486B2 (ja) ターボ分子ポンプ
KR102620442B1 (ko) 진공 펌프
WO2011021428A1 (fr) Pompe à vide
US6851848B2 (en) Turbo-molecular pump having radiation temperature apparatus
US7245097B2 (en) Motor control system and vacuum pump equipped with the motor control system
WO2014038416A1 (fr) Organe à côté fixe et pompe à vide
JP3874993B2 (ja) ターボ分子ポンプ
JP2017166360A (ja) 温度制御装置およびターボ分子ポンプ
CN112219034B (zh) 真空泵及温度控制装置
JP2009074512A (ja) ターボ分子ポンプ
JP2001329991A5 (fr)
JP3716068B2 (ja) ターボ分子ポンプ及び同ターボ分子ポンプを有する真空容器
US11971042B2 (en) Vacuum pump and control device for vacuum pump
JP2003278692A (ja) 真空ポンプ
JPH03107599A (ja) 軸流ポンプ装置の制御システム
JP7147401B2 (ja) ターボ分子ポンプ
JP2004116328A (ja) 真空ポンプ
JPH116774A (ja) ロータ温度検出装置及び温度検出方法
JP7408618B2 (ja) 真空ポンプ及び制御装置
JP2014029130A (ja) 真空ポンプ
WO2021166777A1 (fr) Pompe à vide et dispositif de commande
WO2022186075A1 (fr) Pompe à vide
CN114427539B (zh) 涡轮分子泵
WO2023095851A1 (fr) Pompe à vide et dispositif de commande
JP2006083924A (ja) 磁気軸受制御装置

Legal Events

Date Code Title Description
A711 Notification of change in applicant

Free format text: JAPANESE INTERMEDIATE CODE: A712

Effective date: 20040108

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20040301

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20051207

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20051213

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20060213

RD03 Notification of appointment of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7423

Effective date: 20060213

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A821

Effective date: 20060213

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20060516

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20060718

A911 Transfer to examiner for re-examination before appeal (zenchi)

Free format text: JAPANESE INTERMEDIATE CODE: A911

Effective date: 20060905

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20061017

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20061025

R150 Certificate of patent or registration of utility model

Ref document number: 3874993

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20091102

Year of fee payment: 3

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313111

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20091102

Year of fee payment: 3

R360 Written notification for declining of transfer of rights

Free format text: JAPANESE INTERMEDIATE CODE: R360

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20091102

Year of fee payment: 3

R370 Written measure of declining of transfer procedure

Free format text: JAPANESE INTERMEDIATE CODE: R370

S531 Written request for registration of change of domicile

Free format text: JAPANESE INTERMEDIATE CODE: R313531

S533 Written request for registration of change of name

Free format text: JAPANESE INTERMEDIATE CODE: R313533

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20091102

Year of fee payment: 3

R360 Written notification for declining of transfer of rights

Free format text: JAPANESE INTERMEDIATE CODE: R360

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20091102

Year of fee payment: 3

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313115

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20091102

Year of fee payment: 3

R360 Written notification for declining of transfer of rights

Free format text: JAPANESE INTERMEDIATE CODE: R360

R371 Transfer withdrawn

Free format text: JAPANESE INTERMEDIATE CODE: R371

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20091102

Year of fee payment: 3

S531 Written request for registration of change of domicile

Free format text: JAPANESE INTERMEDIATE CODE: R313531

S533 Written request for registration of change of name

Free format text: JAPANESE INTERMEDIATE CODE: R313533

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20091102

Year of fee payment: 3

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313115

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20091102

Year of fee payment: 3

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20091102

Year of fee payment: 3

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313117

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20091102

Year of fee payment: 3

R371 Transfer withdrawn

Free format text: JAPANESE INTERMEDIATE CODE: R371

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20091102

Year of fee payment: 3

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313117

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20091102

Year of fee payment: 3

R360 Written notification for declining of transfer of rights

Free format text: JAPANESE INTERMEDIATE CODE: R360

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20091102

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20091102

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20101102

Year of fee payment: 4

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20101102

Year of fee payment: 4

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20101102

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20111102

Year of fee payment: 5

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20121102

Year of fee payment: 6

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20121102

Year of fee payment: 6

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20131102

Year of fee payment: 7

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term