JP3865854B2 - 振動子を用いた角速度センサ - Google Patents

振動子を用いた角速度センサ

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Publication number
JP3865854B2
JP3865854B2 JP04304797A JP4304797A JP3865854B2 JP 3865854 B2 JP3865854 B2 JP 3865854B2 JP 04304797 A JP04304797 A JP 04304797A JP 4304797 A JP4304797 A JP 4304797A JP 3865854 B2 JP3865854 B2 JP 3865854B2
Authority
JP
Japan
Prior art keywords
angular velocity
signal
vibrator
phase difference
period
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP04304797A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10227644A (ja
JPH10227644A5 (enExample
Inventor
和廣 岡田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Wacoh Corp
Original Assignee
Wacoh Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wacoh Corp filed Critical Wacoh Corp
Priority to JP04304797A priority Critical patent/JP3865854B2/ja
Publication of JPH10227644A publication Critical patent/JPH10227644A/ja
Publication of JPH10227644A5 publication Critical patent/JPH10227644A5/ja
Application granted granted Critical
Publication of JP3865854B2 publication Critical patent/JP3865854B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Gyroscopes (AREA)
JP04304797A 1997-02-12 1997-02-12 振動子を用いた角速度センサ Expired - Fee Related JP3865854B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP04304797A JP3865854B2 (ja) 1997-02-12 1997-02-12 振動子を用いた角速度センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP04304797A JP3865854B2 (ja) 1997-02-12 1997-02-12 振動子を用いた角速度センサ

Publications (3)

Publication Number Publication Date
JPH10227644A JPH10227644A (ja) 1998-08-25
JPH10227644A5 JPH10227644A5 (enExample) 2004-12-24
JP3865854B2 true JP3865854B2 (ja) 2007-01-10

Family

ID=12652981

Family Applications (1)

Application Number Title Priority Date Filing Date
JP04304797A Expired - Fee Related JP3865854B2 (ja) 1997-02-12 1997-02-12 振動子を用いた角速度センサ

Country Status (1)

Country Link
JP (1) JP3865854B2 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7017410B2 (en) * 2001-08-10 2006-03-28 The Boeing Company Isolated resonator gyroscope with a drive and sense plate
JP4455201B2 (ja) 2004-07-20 2010-04-21 富士通マイクロエレクトロニクス株式会社 検出回路
JP2007046927A (ja) * 2005-08-08 2007-02-22 Wacoh Corp 加速度・角速度センサおよびその製造方法
JP2007292499A (ja) 2006-04-21 2007-11-08 Sony Corp モーションセンサ及びその製造方法
JP2009145301A (ja) * 2007-12-18 2009-07-02 Wacoh Corp 角速度センサ
JP5003740B2 (ja) * 2009-10-02 2012-08-15 富士通セミコンダクター株式会社 検出回路

Also Published As

Publication number Publication date
JPH10227644A (ja) 1998-08-25

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