JP3863671B2 - 搬送用ロボット装置 - Google Patents

搬送用ロボット装置 Download PDF

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Publication number
JP3863671B2
JP3863671B2 JP22532798A JP22532798A JP3863671B2 JP 3863671 B2 JP3863671 B2 JP 3863671B2 JP 22532798 A JP22532798 A JP 22532798A JP 22532798 A JP22532798 A JP 22532798A JP 3863671 B2 JP3863671 B2 JP 3863671B2
Authority
JP
Japan
Prior art keywords
fulcrum
rotation
hand member
link
arm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP22532798A
Other languages
English (en)
Japanese (ja)
Other versions
JP2000042954A (ja
JP2000042954A5 (enExample
Inventor
弘敬 小川
真司 神谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daihen Corp
Original Assignee
Daihen Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daihen Corp filed Critical Daihen Corp
Priority to JP22532798A priority Critical patent/JP3863671B2/ja
Priority to US09/348,226 priority patent/US6293746B1/en
Publication of JP2000042954A publication Critical patent/JP2000042954A/ja
Publication of JP2000042954A5 publication Critical patent/JP2000042954A5/ja
Application granted granted Critical
Publication of JP3863671B2 publication Critical patent/JP3863671B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/10—Program-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/106—Program-controlled manipulators characterised by positioning means for manipulator elements with articulated links
    • B25J9/1065—Program-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/02—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/33—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations into and out of processing chamber
    • H10P72/3302—Mechanical parts of transfer devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/141—Associated with semiconductor wafer handling includes means for gripping wafer

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP22532798A 1998-07-25 1998-07-25 搬送用ロボット装置 Expired - Fee Related JP3863671B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP22532798A JP3863671B2 (ja) 1998-07-25 1998-07-25 搬送用ロボット装置
US09/348,226 US6293746B1 (en) 1998-07-25 1999-07-06 Transfer robot

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22532798A JP3863671B2 (ja) 1998-07-25 1998-07-25 搬送用ロボット装置

Publications (3)

Publication Number Publication Date
JP2000042954A JP2000042954A (ja) 2000-02-15
JP2000042954A5 JP2000042954A5 (enExample) 2005-10-20
JP3863671B2 true JP3863671B2 (ja) 2006-12-27

Family

ID=16827624

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22532798A Expired - Fee Related JP3863671B2 (ja) 1998-07-25 1998-07-25 搬送用ロボット装置

Country Status (2)

Country Link
US (1) US6293746B1 (enExample)
JP (1) JP3863671B2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107000204A (zh) * 2015-08-07 2017-08-01 日本电产三协株式会社 工业用机器人

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KR100551806B1 (ko) * 1999-09-06 2006-02-13 동경 엘렉트론 주식회사 반도체 처리용 반송 장치 및 수용 장치와, 반도체 처리시스템
JP4578649B2 (ja) * 2000-08-22 2010-11-10 ナブテスコ株式会社 トラクションドライブ減速機を用いた搬送装置
US6663333B2 (en) * 2001-07-13 2003-12-16 Axcelis Technologies, Inc. Wafer transport apparatus
JP2003203963A (ja) * 2002-01-08 2003-07-18 Tokyo Electron Ltd 搬送機構、処理システム及び搬送方法
US7244088B2 (en) * 2002-12-13 2007-07-17 RECIF Société Anonyme FOUP door transfer system
JP4513435B2 (ja) * 2003-07-16 2010-07-28 東京エレクトロン株式会社 搬送装置
KR100583724B1 (ko) * 2003-10-29 2006-05-25 삼성전자주식회사 기판 이송 장치
KR100578134B1 (ko) * 2003-11-10 2006-05-10 삼성전자주식회사 멀티 챔버 시스템
KR100583727B1 (ko) * 2004-01-07 2006-05-25 삼성전자주식회사 기판 제조 장치 및 이에 사용되는 기판 이송 모듈
US20080257260A9 (en) * 2005-09-30 2008-10-23 Applied Materials, Inc. Batch wafer handling system
ITBO20070318A1 (it) * 2007-05-03 2008-11-04 Marchesini Group Spa Stazione per la pesatura di contenitori
NL1036785A1 (nl) * 2008-04-18 2009-10-20 Asml Netherlands Bv Rapid exchange device for lithography reticles.
JP5463174B2 (ja) * 2010-03-12 2014-04-09 株式会社アルバック 関節装置及び基板搬送装置
JP5770498B2 (ja) * 2011-03-15 2015-08-26 株式会社アルバック 回転駆動装置及び搬送装置
JP5727823B2 (ja) * 2011-03-15 2015-06-03 株式会社アルバック 回転駆動装置
US9452527B2 (en) * 2012-11-19 2016-09-27 Persimmon Technologies, Corp. Robot having high stiffness coupling
US9149936B2 (en) * 2013-01-18 2015-10-06 Persimmon Technologies, Corp. Robot having arm with unequal link lengths
JP2015211998A (ja) * 2014-05-07 2015-11-26 セイコーエプソン株式会社 ロボット
JP7074977B2 (ja) 2015-03-12 2022-05-25 パーシモン テクノロジーズ コーポレイション エンドエフェクタの従動運動を伴うロボット
KR102181121B1 (ko) * 2016-09-20 2020-11-20 주식회사 원익아이피에스 기판 이송 장치 및 기판 이송 장치의 제어 방법
CN107553481B (zh) * 2017-10-20 2023-07-18 广东奥马迪机器人有限公司 关节机构及其控制方法、多臂装置和机器人
US11535460B2 (en) * 2018-05-31 2022-12-27 Brooks Automation Us, Llc Substrate processing apparatus
JP7177332B2 (ja) * 2018-07-03 2022-11-24 シンフォニアテクノロジー株式会社 搬送装置
US11192239B2 (en) 2018-10-05 2021-12-07 Brooks Automation, Inc. Substrate processing apparatus
US11443973B2 (en) * 2019-07-12 2022-09-13 Applied Materials, Inc. Robot for simultaneous substrate transfer
US11574826B2 (en) 2019-07-12 2023-02-07 Applied Materials, Inc. High-density substrate processing systems and methods
WO2021011233A1 (en) 2019-07-12 2021-01-21 Applied Materials, Inc. Robot for simultaneous substrate transfer
US11117265B2 (en) 2019-07-12 2021-09-14 Applied Materials, Inc. Robot for simultaneous substrate transfer
US11476135B2 (en) 2019-07-12 2022-10-18 Applied Materials, Inc. Robot for simultaneous substrate transfer

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US4909701A (en) * 1983-02-14 1990-03-20 Brooks Automation Inc. Articulated arm transfer device
US4666366A (en) * 1983-02-14 1987-05-19 Canon Kabushiki Kaisha Articulated arm transfer device
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US4951601A (en) * 1986-12-19 1990-08-28 Applied Materials, Inc. Multi-chamber integrated process system
JPH0825151B2 (ja) 1988-09-16 1996-03-13 東京応化工業株式会社 ハンドリングユニット
US5447409A (en) * 1989-10-20 1995-09-05 Applied Materials, Inc. Robot assembly
US5227708A (en) * 1989-10-20 1993-07-13 Applied Materials, Inc. Two-axis magnetically coupled robot
JP2808826B2 (ja) * 1990-05-25 1998-10-08 松下電器産業株式会社 基板の移し換え装置
US5180276A (en) * 1991-04-18 1993-01-19 Brooks Automation, Inc. Articulated arm transfer device
KR0162102B1 (ko) 1991-05-29 1999-02-01 이노우에 아키라 반도체 제조장치
JP3030667B2 (ja) 1991-07-29 2000-04-10 東京エレクトロン株式会社 搬送装置
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GB2298934B (en) 1993-11-22 1998-03-25 Sony Corp Multi-articulate arm type transport device
JP3264076B2 (ja) 1994-01-31 2002-03-11 松下電器産業株式会社 真空処理装置
JPH07223180A (ja) 1994-02-10 1995-08-22 Tescon:Kk 水平多関節ロボット
KR0129582B1 (ko) 1994-06-23 1998-04-06 김주용 다중 기판 전달 장치
US5765444A (en) 1995-07-10 1998-06-16 Kensington Laboratories, Inc. Dual end effector, multiple link robot arm system with corner reacharound and extended reach capabilities
US5647724A (en) * 1995-10-27 1997-07-15 Brooks Automation Inc. Substrate transport apparatus with dual substrate holders
JP3204115B2 (ja) * 1996-01-25 2001-09-04 ダイキン工業株式会社 ワーク搬送ロボット
US5789878A (en) * 1996-07-15 1998-08-04 Applied Materials, Inc. Dual plane robot
JP3722598B2 (ja) * 1997-07-16 2005-11-30 株式会社ダイヘン ２アーム方式の搬送用ロボット装置
JPH1138909A (ja) * 1997-07-18 1999-02-12 Toa Resin Kk 看 板
JP2001514439A (ja) * 1997-08-28 2001-09-11 シーブイシー プロダクツ， インク． 複数ステーションの機械のウエハー取り扱い装置
JPH11188671A (ja) * 1997-12-26 1999-07-13 Daihen Corp ２アーム方式の搬送用ロボット装置
JPH11188670A (ja) * 1997-12-26 1999-07-13 Daihen Corp ２アーム方式の搬送用ロボット装置
US6057662A (en) * 1998-02-25 2000-05-02 Applied Materials, Inc. Single motor control for substrate handler in processing system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107000204A (zh) * 2015-08-07 2017-08-01 日本电产三协株式会社 工业用机器人

Also Published As

Publication number Publication date
JP2000042954A (ja) 2000-02-15
US6293746B1 (en) 2001-09-25

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