JP3793737B2 - Ｐｆｃガスの処理装置 - Google Patents

Ｐｆｃガスの処理装置 Download PDF

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Publication number
JP3793737B2
JP3793737B2 JP2002109866A JP2002109866A JP3793737B2 JP 3793737 B2 JP3793737 B2 JP 3793737B2 JP 2002109866 A JP2002109866 A JP 2002109866A JP 2002109866 A JP2002109866 A JP 2002109866A JP 3793737 B2 JP3793737 B2 JP 3793737B2
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JP
Japan
Prior art keywords
preheater
pfc
gas
inner cylinder
mixed gas
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2002109866A
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English (en)
Japanese (ja)
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JP2003305337A (ja
JP2003305337A5 (enExample
Inventor
林一 浅野
勝久 一沢
慎 玉田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
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Hitachi Ltd
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Publication date
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Priority to JP2002109866A priority Critical patent/JP3793737B2/ja
Publication of JP2003305337A publication Critical patent/JP2003305337A/ja
Publication of JP2003305337A5 publication Critical patent/JP2003305337A5/ja
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Publication of JP3793737B2 publication Critical patent/JP3793737B2/ja
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    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]

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  • Treating Waste Gases (AREA)
  • Exhaust Gas Treatment By Means Of Catalyst (AREA)
JP2002109866A 2002-04-12 2002-04-12 Ｐｆｃガスの処理装置 Expired - Fee Related JP3793737B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002109866A JP3793737B2 (ja) 2002-04-12 2002-04-12 Ｐｆｃガスの処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002109866A JP3793737B2 (ja) 2002-04-12 2002-04-12 Ｐｆｃガスの処理装置

Publications (3)

Publication Number Publication Date
JP2003305337A JP2003305337A (ja) 2003-10-28
JP2003305337A5 JP2003305337A5 (enExample) 2005-09-22
JP3793737B2 true JP3793737B2 (ja) 2006-07-05

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ID=29393169

Family Applications (1)

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JP2002109866A Expired - Fee Related JP3793737B2 (ja) 2002-04-12 2002-04-12 Ｐｆｃガスの処理装置

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JP (1) JP3793737B2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20230138090A (ko) * 2022-03-23 2023-10-05 한국에너지기술연구원 과불화 화합물 처리장치 및 그 처리방법

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4507934B2 (ja) * 2005-03-24 2010-07-21 株式会社日立製作所 ハロゲン化合物の処理装置
JP4873147B2 (ja) * 2006-11-16 2012-02-08 宇部興産株式会社 フッ素含有化合物ガスの処理装置および処理方法
KR101102230B1 (ko) 2009-02-13 2012-01-03 주식회사 에코프로 촉매식 과불화 화합물 처리 장치 및 방법
KR101451832B1 (ko) * 2013-03-19 2014-10-16 한국원자력연구원 과불화 화합물 처리 시스템
CN115183252B (zh) * 2022-07-28 2023-05-05 上海协微环境科技有限公司 一种尾气处理装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20230138090A (ko) * 2022-03-23 2023-10-05 한국에너지기술연구원 과불화 화합물 처리장치 및 그 처리방법
KR102806211B1 (ko) * 2022-03-23 2025-05-14 한국에너지기술연구원 과불화 화합물 처리장치 및 그 처리방법

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Publication number Publication date
JP2003305337A (ja) 2003-10-28

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