JP2003305337A5 - - Google Patents

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Publication number
JP2003305337A5
JP2003305337A5 JP2002109866A JP2002109866A JP2003305337A5 JP 2003305337 A5 JP2003305337 A5 JP 2003305337A5 JP 2002109866 A JP2002109866 A JP 2002109866A JP 2002109866 A JP2002109866 A JP 2002109866A JP 2003305337 A5 JP2003305337 A5 JP 2003305337A5
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JP
Japan
Prior art keywords
gas
pfc
preheater
mixed gas
heated
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Application number
JP2002109866A
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English (en)
Japanese (ja)
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JP2003305337A (ja
JP3793737B2 (ja
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Priority to JP2002109866A priority Critical patent/JP3793737B2/ja
Priority claimed from JP2002109866A external-priority patent/JP3793737B2/ja
Publication of JP2003305337A publication Critical patent/JP2003305337A/ja
Publication of JP2003305337A5 publication Critical patent/JP2003305337A5/ja
Application granted granted Critical
Publication of JP3793737B2 publication Critical patent/JP3793737B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2002109866A 2002-04-12 2002-04-12 Ｐｆｃガスの処理装置 Expired - Fee Related JP3793737B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002109866A JP3793737B2 (ja) 2002-04-12 2002-04-12 Ｐｆｃガスの処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002109866A JP3793737B2 (ja) 2002-04-12 2002-04-12 Ｐｆｃガスの処理装置

Publications (3)

Publication Number Publication Date
JP2003305337A JP2003305337A (ja) 2003-10-28
JP2003305337A5 true JP2003305337A5 (enExample) 2005-09-22
JP3793737B2 JP3793737B2 (ja) 2006-07-05

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ID=29393169

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002109866A Expired - Fee Related JP3793737B2 (ja) 2002-04-12 2002-04-12 Ｐｆｃガスの処理装置

Country Status (1)

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JP (1) JP3793737B2 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4507934B2 (ja) * 2005-03-24 2010-07-21 株式会社日立製作所 ハロゲン化合物の処理装置
JP4873147B2 (ja) * 2006-11-16 2012-02-08 宇部興産株式会社 フッ素含有化合物ガスの処理装置および処理方法
KR101102230B1 (ko) 2009-02-13 2012-01-03 주식회사 에코프로 촉매식 과불화 화합물 처리 장치 및 방법
KR101451832B1 (ko) * 2013-03-19 2014-10-16 한국원자력연구원 과불화 화합물 처리 시스템
KR102806211B1 (ko) * 2022-03-23 2025-05-14 한국에너지기술연구원 과불화 화합물 처리장치 및 그 처리방법
CN115183252B (zh) * 2022-07-28 2023-05-05 上海协微环境科技有限公司 一种尾气处理装置

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