JP3738837B2 - 交互ストライプ電極およびその製造方法 - Google Patents
交互ストライプ電極およびその製造方法 Download PDFInfo
- Publication number
- JP3738837B2 JP3738837B2 JP2002017941A JP2002017941A JP3738837B2 JP 3738837 B2 JP3738837 B2 JP 3738837B2 JP 2002017941 A JP2002017941 A JP 2002017941A JP 2002017941 A JP2002017941 A JP 2002017941A JP 3738837 B2 JP3738837 B2 JP 3738837B2
- Authority
- JP
- Japan
- Prior art keywords
- stripe electrode
- transparent conductive
- conductive film
- electrode
- stripe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
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- 230000005855 radiation Effects 0.000 description 22
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- 230000001678 irradiating effect Effects 0.000 description 3
- 229910044991 metal oxide Inorganic materials 0.000 description 3
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- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
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- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
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- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229910006404 SnO 2 Inorganic materials 0.000 description 1
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- 229910045601 alloy Inorganic materials 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 229910003437 indium oxide Inorganic materials 0.000 description 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
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Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/011—Manufacture or treatment of image sensors covered by group H10F39/12
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F71/00—Manufacture or treatment of devices covered by this subclass
- H10F71/138—Manufacture of transparent electrodes, e.g. transparent conductive oxides [TCO] or indium tin oxide [ITO] electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/20—Electrodes
- H10F77/206—Electrodes for devices having potential barriers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/20—Electrodes
- H10F77/244—Electrodes made of transparent conductive layers, e.g. transparent conductive oxide [TCO] layers
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Manufacturing Of Electric Cables (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Liquid Crystal (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002017941A JP3738837B2 (ja) | 2001-04-16 | 2002-01-28 | 交互ストライプ電極およびその製造方法 |
| US10/122,186 US6831291B2 (en) | 2001-04-16 | 2002-04-16 | Process for producing alternate striped electrode array in which transparent electrodes alternate with opaque electrodes, based on single mask designed for the opaque electrodes in self-aligned manner |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001-116906 | 2001-04-16 | ||
| JP2001116906 | 2001-04-16 | ||
| JP2002017941A JP3738837B2 (ja) | 2001-04-16 | 2002-01-28 | 交互ストライプ電極およびその製造方法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005269575A Division JP2006093702A (ja) | 2001-04-16 | 2005-09-16 | 交互ストライプ電極および画像検出器 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2003005377A JP2003005377A (ja) | 2003-01-08 |
| JP2003005377A5 JP2003005377A5 (enExample) | 2005-02-17 |
| JP3738837B2 true JP3738837B2 (ja) | 2006-01-25 |
Family
ID=26613640
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002017941A Expired - Fee Related JP3738837B2 (ja) | 2001-04-16 | 2002-01-28 | 交互ストライプ電極およびその製造方法 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US6831291B2 (enExample) |
| JP (1) | JP3738837B2 (enExample) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6933191B2 (en) * | 2003-09-18 | 2005-08-23 | International Business Machines Corporation | Two-mask process for metal-insulator-metal capacitors and single mask process for thin film resistors |
| JP2006005057A (ja) * | 2004-06-16 | 2006-01-05 | Fuji Photo Film Co Ltd | 放射線画像記録媒体および画像表示媒体 |
| JP2006100548A (ja) * | 2004-09-29 | 2006-04-13 | Fuji Photo Film Co Ltd | 放射線固体検出器 |
| JP2006210438A (ja) * | 2005-01-25 | 2006-08-10 | Nec Electronics Corp | 半導体装置およびその製造方法 |
| JP2010027743A (ja) * | 2008-07-16 | 2010-02-04 | Ebara Corp | インプリント用ガラス基板、レジストパターン形成方法、インプリント用ガラス基板の検査方法及び検査装置 |
| TWI414170B (zh) * | 2009-04-29 | 2013-11-01 | Unique Instr Co Ltd | A device with a 2D and 3D image display function mobile phone |
| JP5748350B2 (ja) * | 2011-09-05 | 2015-07-15 | 富士フイルム株式会社 | 透明導電フィルム、その製造方法、フレキシブル有機電子デバイス、及び、有機薄膜太陽電池 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56117470A (en) * | 1980-02-20 | 1981-09-14 | Canon Inc | Signal detecting method |
| DE3236137A1 (de) * | 1982-09-29 | 1984-03-29 | Siemens AG, 1000 Berlin und 8000 München | Bildaufnahmeeinrichtung |
| JPS61231754A (ja) * | 1985-04-08 | 1986-10-16 | Nec Corp | 混成集積化一次元光センサ |
| US5187601A (en) * | 1988-03-07 | 1993-02-16 | Semiconductor Energy Laboratory Co., Ltd. | Method for making a high contrast liquid crystal display including laser scribing opaque and transparent conductive strips simultaneously |
| JPH0961834A (ja) * | 1995-08-21 | 1997-03-07 | Toshiba Corp | 液晶表示素子及びその製造方法 |
| JP4040201B2 (ja) | 1999-03-30 | 2008-01-30 | 富士フイルム株式会社 | 放射線固体検出器、並びにそれを用いた放射線画像記録/読取方法および装置 |
| US20020110673A1 (en) * | 2001-02-14 | 2002-08-15 | Ramin Heydarpour | Multilayered electrode/substrate structures and display devices incorporating the same |
-
2002
- 2002-01-28 JP JP2002017941A patent/JP3738837B2/ja not_active Expired - Fee Related
- 2002-04-16 US US10/122,186 patent/US6831291B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2003005377A (ja) | 2003-01-08 |
| US6831291B2 (en) | 2004-12-14 |
| US20020148989A1 (en) | 2002-10-17 |
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