JP3669810B2 - 半導体素子ボンディング用金合金線 - Google Patents
半導体素子ボンディング用金合金線 Download PDFInfo
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- JP3669810B2 JP3669810B2 JP10905597A JP10905597A JP3669810B2 JP 3669810 B2 JP3669810 B2 JP 3669810B2 JP 10905597 A JP10905597 A JP 10905597A JP 10905597 A JP10905597 A JP 10905597A JP 3669810 B2 JP3669810 B2 JP 3669810B2
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- weight
- gold
- alloy wire
- bonding
- gold alloy
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- H01L2924/20—Parameters
- H01L2924/207—Diameter ranges
- H01L2924/2076—Diameter ranges equal to or larger than 100 microns
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Description
【発明の属する技術分野】
本発明は、半導体素子の電極と外部リード部を接続するために使用するボンディング用金合金線に関する。
【0002】
【従来の技術】
従来からトランジスタ、IC,LSI等の半導体素子の電極と外部リードを接続する技術としては、純度99.99重量%以上の高純度金に他の金属元素を微量含有させた金合金線を用いて配線する超音波併用熱圧着ボンディング法が主として用いられている。
【0003】
ここで超音波併用熱圧着ボンディング法により配線し、ループを形成した状態を図1に示す。1はICチップ、2はICチップ上のAl電極、3は金合金線、4はリードフレーム、5はファースト側接合点、6はセカンド側接合点である。最近半導体装置は外部リード材料として放熱性、コストを考慮して銅合金製のリードフレームを用いる事が多くなってきた。銅合金製のリードフレームを用いた場合、封止用樹脂とリードフレームの熱膨張係数の差が大きく、半導体装置の作動による温度上昇によってループを形成した金合金線に外部応力が加わり、とりわけ半導体装置が過酷な熱サイクルの環境に晒された場合、断線を生じ易くなるという問題がある。
【0004】
また半導体装置の小型化、高密度化の要求が高まる中で、ICチップの多ピン化及びこれに伴う狭ピッチ化が要求されている。多ピン化、狭ピッチ化を達成する為には、ループ形状が安定している事が必要である。一方前記の超音波併用熱圧着ボンディング法で配線を行う際、リードフレーム下部に設置された熱源により150〜250℃で加熱されている。この時加熱温度が高いと接着性は良いものの、リードフレームのそりが生じ易くなりループ形状にばらつきが生じ易くなる。また加熱温度が低いとループ形状は安定するものの低温接合であるため、金合金線とリードフレームの接合点(以下セカンド側接合点という)での接合性に問題が生じてくる。この為ループ形状にばらつきが生じることを抑制する為にボンディング時の加熱温度を150℃と低温度で行いながらセカンド側接合点での接合性に優れた金合金線が要求されている。
【0005】
従来から提案されている金合金線として特開昭52−51867号公報には所定量のFe,Co,Ag等を金に含有させることによりボンディングワイヤの強度の向上に効果のあることが提案されている。また特開昭55−158642号、特開昭56−19628号、特開昭56−19629号公報等には所定量のAg又はそれに加えてPdやFe等を金に含有させることによりボンディングワイヤの強度の向上とボールボンディングの接合強度の向上に効果のあることが提案されている。
【0006】
【発明が解決しようとする課題】
しかしながら前記提案においては、前述の要求に対して未だ不十分である。
本発明は上述したような事情に鑑みてなされたものであり、その目的とするところは、銅合金製のリードフレームを用いた半導体装置が過酷な熱サイクルの環境に晒された場合でも、断線を抑制する効果が向上すること及びボンディング時のループ形状を安定させる為に、ボンディング時の加熱温度を150℃と低温度で行いながらセカンド側接合点での接合性、とりわけピール強度及び振動破断性能が向上した金合金線を提供することである。
【0007】
【課題を解決するための手段】
本発明者等が鋭意研究を重ねた結果、所定量のAgとCu,In,Sn,Pb,Sb,Ti,La,Eu,Ybのうち少なくとも1種、及び残部が金と不可避不純物からなる組成の金合金線とすることにより、前述の目的を達成し得ることを知見し、本発明を完成するに至った。
【0008】
本発明は下記にある。
(1)銀(Ag)を5〜50重量%、Cu,In,Sn,Pb,Sb,Ti,La,Eu,Ybのうち少なくとも1種を1〜500重量ppm 、及び残部が金及び不可避不純物からなることを特徴とする半導体素子ボンディング用金合金線。
(2)銀(Ag)を5〜50重量%、Cu,La,Euのうち少なくとも1種を1〜500重量ppm 、及び残部が金及び不可避不純物からなることを特徴とする半導体素子ボンディング用金合金線。
【0009】
【発明の実施の形態】
原料金としては少なくとも99.99重量%以上に精製した高純度金を用いることが好ましい。更に好ましくは99.995重量%以上であり、最も好ましくは99.999重量%以上である。この為合金中の不可避不純物は0.01重量%以下が好ましい。更に好ましくは0.005重量%以下であり、最も好ましくは0.001重量%以下である。
【0010】
高純度金に所定量のAgと所定量のCu,In,Sn,Pb,Sb,Ti,La,Eu,Ybのうち少なくとも1種との共存において、Agを含有した組成とすることにより、前記課題を達成することが出来る。
この共存組成においてAgの含有量が0.6重量%以上になると、0.6重量%未満のものと対比してセカンド側の接合性が向上してくる。即ちピール強度が大きくなり、振動破断性能が向上してくる。又熱サイクル後の断線性能も向上してくる。共存組成に於けるAgの含有量が50重量%を超えると、前記セカンド側の接合性と熱サイクル後の断線性能がともに低下してくる。この為前記共存組成におけるAgの含有量を0.6〜50重量%と定めた。
【0011】
高純度金に所定量のAgとの共存において、所定量のCu,In,Sn,Pb,Sb,Ti,La,Eu,Ybのうち少なくとも1種を含有した組成とすることにより、前記課題を達成することが出来る。
この共存組成とすることにより、金合金線の伸び率にかかわらず、前記課題を達成することが出来る。
【0012】
この共存組成においてCu,In,Sn,Pb,Sb,Ti,La,Eu,Ybのうち少なくとも1種の含有量が1重量ppm 以上になると、1重量ppm 未満のものと対比してセカンド側の接合性が向上してくるとともに熱サイクル後の断線性能も向上してくる。Cu,In,Sn,Pb,Sb,Ti,La,Eu,Ybのうち少なくとも1種の含有量が500重量ppm を超えると、セカンド側の接合性と熱サイクル後の断線性能がともに低下してくる。この為前記共存組成におけるCu,In,Sn,Pb,Sb,Ti,La,Eu,Ybのうち少なくとも1種の含有量を1〜500重量ppm と定めた。
【0013】
さらに前記共存組成におけるCu,In,Sn,Pb,Sb,Ti,La,Eu,Ybのうち少なくとも1種がCu,La,Euのうち少なくとも1種であると、セカンド側の接合性と熱サイクル後の断線性能が更に向上してくる。この為前記共存組成におけるCu,In,Sn,Pb,Sb,Ti,La,Eu,Ybのうち少なくとも1種はCu,La,Euであることが好ましい。
【0014】
本発明になる金合金線の好ましい製造方法を説明する。
高純度金に所定量の元素を添加し、真空溶解炉で溶解した後インゴットに鋳造する。該インゴットに溝ロール、伸線機を用いた冷間加工と中間アニールを施し、最終冷間加工により直径10〜100μmの細線とした後最終アニールを施すものである。
【0015】
本発明に於いて伸び率の調整は最終アニール温度を変えることにより行う。
本発明に於いて伸び率は金合金線を標点距離を100mmとして引張速度100mm/分で引張試験機で引っ張り、破断した時の伸び量を測定して次式の値を伸び率とする。
【0016】
【数1】
【0017】
ここで破断した時の伸び量はチャート紙の図形から測定することが好ましい。本発明になる半導体素子ボンディング用金合金線は半導体装置の実装に際して、ICチップ等の半導体素子をリードフレームに接続する超音波併用熱圧着ボンディング法で好ましく用いられる。特にはリードフレームとして銅製リードフレームを用いる半導体装置用に好ましく用いられる。
【0018】
【実施例】
(実施例1)
純度99.999重量%の高純度金に所定量のAg及びCuを添加し真空溶解炉で溶解した後、鋳造して表1に示す組成の金合金インゴットを得た。これに溝ロール、伸線機を用いた冷間加工と中間アニールを施し、最終冷間加工により直径30μmとし、伸び率4%となるように最終アニールを行った。
【0019】
この金合金線を全自動ワイヤボンダー(新川株式会社製 UTC−50型)を用いて加熱温度150℃でICチップのAl電極と銅合金リードフレームを超音波併用熱圧着ボンディング法でボンディングした。そして、ピン数100個のボンディングした試料を作成した。次いで試料をエポキシ樹脂で樹脂封止した後、−10℃×30分と150℃×30分の熱サイクルテストを100回行った。
【0020】
100個の試料を測定に供し、導通テストにより断線の有無を確認し、熱サイクル後の破断率を求めその結果を表1に示した。
更にボンディングした試料のリードフレーム側即ちセカンド側のピール強度及び振動破断性能を測定した。ピール強度は前記直径30μmのピール荷重で表示した。
【0021】
振動破断性能の測定方法
図2を用いて説明する。11はICチップ、12はAl電極、13は金合金線、14はリードフレーム、15は鉄製台、16はリードフレーム固定用磁石、17は振動子である。
リードフレーム14をリードフレーム固定用磁石16で固定し、ICチップ11を搭載した部分を振動子17で上下方向(矢印方向)に振動させた。周波数100Hz、上下振幅合計0.4mm、振動数20000回振動させた後、400倍の金属顕微鏡を用いてリードフレーム側即ちセカンド側のワイヤの破断数を調査した。300箇所調査しその破断数の割合を振動破断率として表1に示した。
【0022】
(実施例2〜40)(比較例1〜6)
金合金線の組成及び伸び率を表1〜3に示すようにしたこと以外は実施例1と同様にして直径30μmの線に仕上げ、熱サイクル後の破断率、セカンド側のピール強度及び振動破断率を実施例1と同様にして測定し、その測定結果を表1〜3に示した。
【0023】
【表1】
【0024】
【表2】
【0025】
【表3】
【0026】
(試験結果)
(1)高純度金にAgを0.6〜50重量%、及びCu,In,Sn,Pb,Sb,Ti,La,Eu,Ybのうち少なくとも1種を1〜500重量ppm 含有した組成である実施例1〜40は、熱サイクル後の破断率が0.8%以下であり、ピール強度は11.2〜13.9g、振動破断率は0.9%以下と、優れた効果を示した。
【0027】
(2)この中でも高純度金にAgを0.6〜50重量%、及びCu,Eu,Laのうち少なくとも1種を1〜500重量ppm 含有した組成では、熱サイクル後の破断率が0%であり、ピール強度は12.2〜13.9g、振動破断率は0%と、さらに優れた効果を示した。
この為好ましくは、Agを0.6〜50重量%、Cu,La,Euのうち少なくとも1種を1〜500重量ppm 、及び残部が金及び不可避不純物からなる組成とすることである。
【0028】
(3)本発明の必須成分の何れも含有しない高純度金を用いた比較例1は、熱サイクル後の破断率が5.9%、ピール強度は1.6g、振動破断率は4.8%と何れも悪いものであった。
(4)高純度金に本発明の必須成分であるAgを含有するものの、Agの含有量が0.6重量%未満である比較例2、その含有量が50重量%を超える比較例3は、熱サイクル後の破断率が2.6〜3.8%、ピール強度は3.6〜3.7g、振動破断率は3.0〜3.3%と何れも高純度金と対比すると効果は得られているものの、本発明に於いては更に優れた効果が得られていることが判る。
【0029】
(5)高純度金に本発明の必須成分である0.6〜50重量%のAgを含有するものの、1〜500重量ppm のCu,In,Sn,Pb,Sb,Ti,La,Eu,Ybのうち少なくとも1種を含有せずに、400重量ppm のIrを含有する比較例4、100重量ppm のCoを含有する比較例5は、熱サイクル後の破断率が3.2〜3.3%、ピール強度は3.4〜4.8g、振動破断率は2.7〜3.0%と何れも高純度金と対比すると効果は得られているものの、本発明に於いては更に優れた効果が得られていることが判る。
【0030】
(6)高純度金に本発明の必須成分である0.6〜50重量%のAgを含有するものの、1〜500重量ppm のCu,In,Sn,Pb,Sb,Ti,La,Eu,Ybのうち少なくとも1種を含有せずに、伸び率が10%である比較例6は、熱サイクル後の破断率が3.1%、ピール強度は5.3g、振動破断率は2.4%と何れも高純度金と対比すると効果は得られているものの、本発明に於いては更に優れた効果が得られていることが判る。
【0031】
(7)実施例3、実施例32、比較例6を対比すると20重量%のAgのみを含有し、伸び率が10%である比較例6と対比して、20重量%のAgと100重量ppm のCuを含有し、伸び率が4%と10%である実施例3、実施例32は、セカンド側の接合性が向上してくるとともに熱サイクル後の断線性能も向上してくる。このことから所定量のAgに加えて所定量のCuを含有すると伸び率にかかわらず、本発明の課題に対して効果がある事が判る。
【0032】
Cuと同様にIn,Sn,Pb,Sb,Ti,La,Eu,Ybについても、本発明の課題に対して効果がある事が判る。
【0033】
【発明の効果】
本発明により所定量のAgと、所定量のCu,In,Sn,Pb,Sb,Ti,La,Eu,Ybのうち少なくとも1種を含有し残部が金及び不純物からなる組成を有する半導体素子ボンディング用金合金線によれば、銅合金製のリードフレームを用いた半導体装置が過酷な熱サイクルの環境に晒された場合でも、断線を抑制する効果が向上すること及びボンディング時のループ形状を安定させる為に、ボンディング時の加熱温度を150℃と低温度で行いながらセカンド側接合点での接合性、とりわけピール強度及び振動破断性能が向上に効果的である。
【0034】
前記組成の中でも、所定量のAgと、所定量のCu,La,Euのうち少なくとも1種を含有し残部が金及び不純物からなる組成とすることにより、さらに優れた効果を示すものである。
【図面の簡単な説明】
【図1】金合金線で電極とリードフレームをボンディングした半導体素子を示す。
【図2】振動破断性能の測定方法を示す。
【符号の説明】
1…ICチップ
2…ICチップの電極
3…金合金線
4…リードフレーム
5…ファースト側接合点
6…セカンド側接合点
Claims (2)
- 銀(Ag)を5〜50重量%、Cu,In,Sn,Pb,Sb,Ti,La,Eu,Ybのうち少なくとも1種を1〜500重量ppm 、及び残部が金及び不可避不純物からなることを特徴とする半導体素子ボンディング用金合金線。
- 銀(Ag)を5〜50重量%、Cu,La,Euのうち少なくとも1種を1〜500重量ppm 、及び残部が金及び不可避不純物からなることを特徴とする半導体素子ボンディング用金合金線。
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JP4130843B1 (ja) * | 2007-04-17 | 2008-08-06 | 田中電子工業株式会社 | 高信頼性金合金ボンディングワイヤ及び半導体装置 |
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