JP3651404B2 - 静電マイクロリレー、並びに、該静電マイクロリレーを利用した無線装置及び計測装置 - Google Patents

静電マイクロリレー、並びに、該静電マイクロリレーを利用した無線装置及び計測装置 Download PDF

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Publication number
JP3651404B2
JP3651404B2 JP2001089900A JP2001089900A JP3651404B2 JP 3651404 B2 JP3651404 B2 JP 3651404B2 JP 2001089900 A JP2001089900 A JP 2001089900A JP 2001089900 A JP2001089900 A JP 2001089900A JP 3651404 B2 JP3651404 B2 JP 3651404B2
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Japan
Prior art keywords
substrate
contact
movable
fixed
electrostatic
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Expired - Lifetime
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JP2001089900A
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English (en)
Japanese (ja)
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JP2002289081A5 (enExample
JP2002289081A (ja
Inventor
知範 積
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Omron Corp
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Omron Corp
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Publication date
Application filed by Omron Corp filed Critical Omron Corp
Priority to JP2001089900A priority Critical patent/JP3651404B2/ja
Priority to TW091105215A priority patent/TW550616B/zh
Priority to KR10-2002-0015990A priority patent/KR100455949B1/ko
Priority to EP02252164.5A priority patent/EP1246216B1/en
Priority to CNB021082308A priority patent/CN1234144C/zh
Publication of JP2002289081A publication Critical patent/JP2002289081A/ja
Publication of JP2002289081A5 publication Critical patent/JP2002289081A5/ja
Application granted granted Critical
Publication of JP3651404B2 publication Critical patent/JP3651404B2/ja
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Expired - Lifetime legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H01H2059/0063—Electrostatic relays; Electro-adhesion relays making use of micromechanics with stepped actuation, e.g. actuation voltages applied to different sets of electrodes at different times or different spring constants during actuation

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  • Micromachines (AREA)
JP2001089900A 2001-03-27 2001-03-27 静電マイクロリレー、並びに、該静電マイクロリレーを利用した無線装置及び計測装置 Expired - Lifetime JP3651404B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2001089900A JP3651404B2 (ja) 2001-03-27 2001-03-27 静電マイクロリレー、並びに、該静電マイクロリレーを利用した無線装置及び計測装置
TW091105215A TW550616B (en) 2001-03-27 2002-03-19 Electrostatic micro-relay, radio device and measuring device using the electrostatic micro-relay, and contact switching method
KR10-2002-0015990A KR100455949B1 (ko) 2001-03-27 2002-03-25 정전 마이크로 릴레이, 그 정전 마이크로 릴레이를 이용한무선장치, 계측장치 및 접점 개폐방법
EP02252164.5A EP1246216B1 (en) 2001-03-27 2002-03-26 Electrostatic micro-relay, radio device and measuring device using the electrostatic micro-relay, and contact switching method
CNB021082308A CN1234144C (zh) 2001-03-27 2002-03-27 静电微型继电器、无线电器件和测量器件及触点切换方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001089900A JP3651404B2 (ja) 2001-03-27 2001-03-27 静電マイクロリレー、並びに、該静電マイクロリレーを利用した無線装置及び計測装置

Publications (3)

Publication Number Publication Date
JP2002289081A JP2002289081A (ja) 2002-10-04
JP2002289081A5 JP2002289081A5 (enExample) 2005-02-17
JP3651404B2 true JP3651404B2 (ja) 2005-05-25

Family

ID=18944757

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001089900A Expired - Lifetime JP3651404B2 (ja) 2001-03-27 2001-03-27 静電マイクロリレー、並びに、該静電マイクロリレーを利用した無線装置及び計測装置

Country Status (5)

Country Link
EP (1) EP1246216B1 (enExample)
JP (1) JP3651404B2 (enExample)
KR (1) KR100455949B1 (enExample)
CN (1) CN1234144C (enExample)
TW (1) TW550616B (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ATE322033T1 (de) * 2002-11-19 2006-04-15 Baolab Microsystems Sl Elektrooptische miniatureinrichtung und entsprechendeverwendungen dafür
DE102004010150B9 (de) * 2004-02-27 2012-01-26 Eads Deutschland Gmbh Hochfrequenz-MEMS-Schalter mit gebogenem Schaltelement und Verfahren zu seiner Herstellung
JP4540443B2 (ja) 2004-10-21 2010-09-08 富士通コンポーネント株式会社 静電リレー
JP2006147540A (ja) 2004-10-22 2006-06-08 Matsushita Electric Ind Co Ltd 電気機械スイッチ
JP2014130767A (ja) * 2012-12-28 2014-07-10 Omron Corp 静電マイクロリレーおよびその製造方法
KR101595453B1 (ko) 2014-06-30 2016-02-19 대한민국 보안등의 고정식 차광기구
KR101595456B1 (ko) 2014-06-30 2016-02-19 대한민국 보안등의 가변식 차광기구

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5278368A (en) * 1991-06-24 1994-01-11 Matsushita Elec. Works, Ltd Electrostatic relay
US6054659A (en) * 1998-03-09 2000-04-25 General Motors Corporation Integrated electrostatically-actuated micromachined all-metal micro-relays
JP3852224B2 (ja) * 1998-10-08 2006-11-29 オムロン株式会社 静電マイクロリレー
JP3796988B2 (ja) * 1998-11-26 2006-07-12 オムロン株式会社 静電マイクロリレー

Also Published As

Publication number Publication date
KR20020076131A (ko) 2002-10-09
EP1246216A2 (en) 2002-10-02
CN1378225A (zh) 2002-11-06
EP1246216B1 (en) 2014-06-04
TW550616B (en) 2003-09-01
EP1246216A3 (en) 2004-07-21
JP2002289081A (ja) 2002-10-04
KR100455949B1 (ko) 2004-11-08
CN1234144C (zh) 2005-12-28

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