EP1246216A3 - Electrostatic micro-relay, radio device and measuring device using the electrostatic micro-relay, and contact switching method - Google Patents

Electrostatic micro-relay, radio device and measuring device using the electrostatic micro-relay, and contact switching method Download PDF

Info

Publication number
EP1246216A3
EP1246216A3 EP02252164A EP02252164A EP1246216A3 EP 1246216 A3 EP1246216 A3 EP 1246216A3 EP 02252164 A EP02252164 A EP 02252164A EP 02252164 A EP02252164 A EP 02252164A EP 1246216 A3 EP1246216 A3 EP 1246216A3
Authority
EP
European Patent Office
Prior art keywords
contact
relay
movable
electrostatic micro
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP02252164A
Other languages
German (de)
French (fr)
Other versions
EP1246216A2 (en
EP1246216B1 (en
Inventor
Tomonori c/o Omron Corporation Seki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omron Corp
Original Assignee
Omron Corp
Omron Tateisi Electronics Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Omron Corp, Omron Tateisi Electronics Co filed Critical Omron Corp
Publication of EP1246216A2 publication Critical patent/EP1246216A2/en
Publication of EP1246216A3 publication Critical patent/EP1246216A3/en
Application granted granted Critical
Publication of EP1246216B1 publication Critical patent/EP1246216B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H01H2059/0063—Electrostatic relays; Electro-adhesion relays making use of micromechanics with stepped actuation, e.g. actuation voltages applied to different sets of electrodes at different times or different spring constants during actuation

Landscapes

  • Micromachines (AREA)

Abstract

Signal lines (5a, 5b) formed on a fixed substrate 1 are arranged on the same straight line. A movable substrate (2) is elastically supported on the fixed substrate (1) through beam portions (11) provided at two positions which are point-symmetrical with each other with a movable contact (16) centered thereon. At least portions opposing the signal lines (5a, 5b) are removed from the movable substrate (2). The movable contact (16) is elastically supported at two points that are orthogonal to the straight line on which the signal lines (5a, 5b) are arranged and do not face the signal lines (5a, 5b). A pair of protrusions 17 are formed at positions at which after closing the contacts, if a voltage were applied between the fixed electrode 4 and the movable electrode 12 without the protrusion, the fixed substrate 1 and the movable substrate 2 would contact each other following the contact between the fixed contact 7 and the movable contact 16, in a point-symmetrical manner with the movable contact 16 centered thereon. With this arrangement, it is possible to provide an electrostatic micro-relay which has a simple and small-size structure that is easily manufactured at low costs, and is superior in high-frequency characteristics with a suitable contact release force.
EP02252164.5A 2001-03-27 2002-03-26 Electrostatic micro-relay, radio device and measuring device using the electrostatic micro-relay, and contact switching method Expired - Lifetime EP1246216B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001089900A JP3651404B2 (en) 2001-03-27 2001-03-27 Electrostatic micro relay, and radio apparatus and measuring apparatus using the electrostatic micro relay
JP2001089900 2001-03-27

Publications (3)

Publication Number Publication Date
EP1246216A2 EP1246216A2 (en) 2002-10-02
EP1246216A3 true EP1246216A3 (en) 2004-07-21
EP1246216B1 EP1246216B1 (en) 2014-06-04

Family

ID=18944757

Family Applications (1)

Application Number Title Priority Date Filing Date
EP02252164.5A Expired - Lifetime EP1246216B1 (en) 2001-03-27 2002-03-26 Electrostatic micro-relay, radio device and measuring device using the electrostatic micro-relay, and contact switching method

Country Status (5)

Country Link
EP (1) EP1246216B1 (en)
JP (1) JP3651404B2 (en)
KR (1) KR100455949B1 (en)
CN (1) CN1234144C (en)
TW (1) TW550616B (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100410165C (en) * 2002-11-19 2008-08-13 宝兰微系统公司 Miniature relay and corresponding uses thereof
DE102004010150B9 (en) * 2004-02-27 2012-01-26 Eads Deutschland Gmbh High-frequency MEMS switch with bent switching element and method for its production
JP4540443B2 (en) 2004-10-21 2010-09-08 富士通コンポーネント株式会社 Electrostatic relay
JP2006147540A (en) 2004-10-22 2006-06-08 Matsushita Electric Ind Co Ltd Electric mechanical switch
JP2014130767A (en) * 2012-12-28 2014-07-10 Omron Corp Electrostatic microrelay and manufacturing method therefor
KR101595453B1 (en) 2014-06-30 2016-02-19 대한민국 Stationary blind device for shadowing security light
KR101595456B1 (en) 2014-06-30 2016-02-19 대한민국 Convertible blind device for shadowing security light

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0520407A1 (en) * 1991-06-24 1992-12-30 Matsushita Electric Works, Ltd. Electrostatic relay
JP2000113792A (en) * 1998-10-08 2000-04-21 Omron Corp Electrostatic micro relay
US6054659A (en) * 1998-03-09 2000-04-25 General Motors Corporation Integrated electrostatically-actuated micromachined all-metal micro-relays
JP2000164104A (en) * 1998-11-26 2000-06-16 Omron Corp Electrostatic microrelay

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0520407A1 (en) * 1991-06-24 1992-12-30 Matsushita Electric Works, Ltd. Electrostatic relay
US6054659A (en) * 1998-03-09 2000-04-25 General Motors Corporation Integrated electrostatically-actuated micromachined all-metal micro-relays
JP2000113792A (en) * 1998-10-08 2000-04-21 Omron Corp Electrostatic micro relay
JP2000164104A (en) * 1998-11-26 2000-06-16 Omron Corp Electrostatic microrelay
US20020005341A1 (en) * 1998-11-26 2002-01-17 Tomonori Seki Radio device and measuring device utilizing electrostatic microrelay and electrostatic microrelay

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 2000, no. 07 29 September 2000 (2000-09-29) *
PATENT ABSTRACTS OF JAPAN vol. 2000, no. 09 13 October 2000 (2000-10-13) *

Also Published As

Publication number Publication date
KR100455949B1 (en) 2004-11-08
CN1378225A (en) 2002-11-06
JP3651404B2 (en) 2005-05-25
JP2002289081A (en) 2002-10-04
CN1234144C (en) 2005-12-28
KR20020076131A (en) 2002-10-09
EP1246216A2 (en) 2002-10-02
EP1246216B1 (en) 2014-06-04
TW550616B (en) 2003-09-01

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