CN1234144C - 静电微型继电器、无线电器件和测量器件及触点切换方法 - Google Patents

静电微型继电器、无线电器件和测量器件及触点切换方法 Download PDF

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Publication number
CN1234144C
CN1234144C CNB021082308A CN02108230A CN1234144C CN 1234144 C CN1234144 C CN 1234144C CN B021082308 A CNB021082308 A CN B021082308A CN 02108230 A CN02108230 A CN 02108230A CN 1234144 C CN1234144 C CN 1234144C
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CN
China
Prior art keywords
substrate
contact
fixed
holding wire
movable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB021082308A
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English (en)
Chinese (zh)
Other versions
CN1378225A (zh
Inventor
积知范
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omron Corp
Original Assignee
Omron Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Omron Corp filed Critical Omron Corp
Publication of CN1378225A publication Critical patent/CN1378225A/zh
Application granted granted Critical
Publication of CN1234144C publication Critical patent/CN1234144C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H01H2059/0063—Electrostatic relays; Electro-adhesion relays making use of micromechanics with stepped actuation, e.g. actuation voltages applied to different sets of electrodes at different times or different spring constants during actuation

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  • Micromachines (AREA)
CNB021082308A 2001-03-27 2002-03-27 静电微型继电器、无线电器件和测量器件及触点切换方法 Expired - Fee Related CN1234144C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001089900A JP3651404B2 (ja) 2001-03-27 2001-03-27 静電マイクロリレー、並びに、該静電マイクロリレーを利用した無線装置及び計測装置
JP089900/2001 2001-03-27

Publications (2)

Publication Number Publication Date
CN1378225A CN1378225A (zh) 2002-11-06
CN1234144C true CN1234144C (zh) 2005-12-28

Family

ID=18944757

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB021082308A Expired - Fee Related CN1234144C (zh) 2001-03-27 2002-03-27 静电微型继电器、无线电器件和测量器件及触点切换方法

Country Status (5)

Country Link
EP (1) EP1246216B1 (enExample)
JP (1) JP3651404B2 (enExample)
KR (1) KR100455949B1 (enExample)
CN (1) CN1234144C (enExample)
TW (1) TW550616B (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ATE322033T1 (de) * 2002-11-19 2006-04-15 Baolab Microsystems Sl Elektrooptische miniatureinrichtung und entsprechendeverwendungen dafür
DE102004010150B9 (de) * 2004-02-27 2012-01-26 Eads Deutschland Gmbh Hochfrequenz-MEMS-Schalter mit gebogenem Schaltelement und Verfahren zu seiner Herstellung
JP4540443B2 (ja) 2004-10-21 2010-09-08 富士通コンポーネント株式会社 静電リレー
JP2006147540A (ja) 2004-10-22 2006-06-08 Matsushita Electric Ind Co Ltd 電気機械スイッチ
JP2014130767A (ja) * 2012-12-28 2014-07-10 Omron Corp 静電マイクロリレーおよびその製造方法
KR101595453B1 (ko) 2014-06-30 2016-02-19 대한민국 보안등의 고정식 차광기구
KR101595456B1 (ko) 2014-06-30 2016-02-19 대한민국 보안등의 가변식 차광기구

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5278368A (en) * 1991-06-24 1994-01-11 Matsushita Elec. Works, Ltd Electrostatic relay
US6054659A (en) * 1998-03-09 2000-04-25 General Motors Corporation Integrated electrostatically-actuated micromachined all-metal micro-relays
JP3852224B2 (ja) * 1998-10-08 2006-11-29 オムロン株式会社 静電マイクロリレー
JP3796988B2 (ja) * 1998-11-26 2006-07-12 オムロン株式会社 静電マイクロリレー

Also Published As

Publication number Publication date
KR20020076131A (ko) 2002-10-09
EP1246216A2 (en) 2002-10-02
CN1378225A (zh) 2002-11-06
EP1246216B1 (en) 2014-06-04
TW550616B (en) 2003-09-01
EP1246216A3 (en) 2004-07-21
JP2002289081A (ja) 2002-10-04
KR100455949B1 (ko) 2004-11-08
JP3651404B2 (ja) 2005-05-25

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Legal Events

Date Code Title Description
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C06 Publication
PB01 Publication
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20051228

Termination date: 20210327