TW550616B - Electrostatic micro-relay, radio device and measuring device using the electrostatic micro-relay, and contact switching method - Google Patents
Electrostatic micro-relay, radio device and measuring device using the electrostatic micro-relay, and contact switching method Download PDFInfo
- Publication number
- TW550616B TW550616B TW091105215A TW91105215A TW550616B TW 550616 B TW550616 B TW 550616B TW 091105215 A TW091105215 A TW 091105215A TW 91105215 A TW91105215 A TW 91105215A TW 550616 B TW550616 B TW 550616B
- Authority
- TW
- Taiwan
- Prior art keywords
- movable
- substrate
- fixed
- contact
- electrode
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims description 7
- 239000000758 substrate Substances 0.000 claims abstract description 104
- 238000005259 measurement Methods 0.000 claims description 4
- 239000002689 soil Substances 0.000 claims description 3
- 230000003068 static effect Effects 0.000 claims description 3
- 239000007787 solid Substances 0.000 claims description 2
- 229910052797 bismuth Inorganic materials 0.000 claims 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 238000000926 separation method Methods 0.000 abstract description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 239000011521 glass Substances 0.000 description 4
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 4
- 238000005530 etching Methods 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 239000005416 organic matter Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 1
- 235000018185 Betula X alpestris Nutrition 0.000 description 1
- 235000018212 Betula X uliginosa Nutrition 0.000 description 1
- 241001327708 Coriaria sarmentosa Species 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- CCAZWUJBLXKBAY-ULZPOIKGSA-N Tutin Chemical compound C([C@]12[C@@H]3O[C@@H]3[C@@]3(O)[C@H]4C(=O)O[C@@H]([C@H]([C@]32C)O)[C@H]4C(=C)C)O1 CCAZWUJBLXKBAY-ULZPOIKGSA-N 0.000 description 1
- 230000003796 beauty Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000005489 elastic deformation Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000002309 gasification Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 239000005297 pyrex Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 210000002784 stomach Anatomy 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H59/00—Electrostatic relays; Electro-adhesion relays
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H59/00—Electrostatic relays; Electro-adhesion relays
- H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H59/00—Electrostatic relays; Electro-adhesion relays
- H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
- H01H2059/0063—Electrostatic relays; Electro-adhesion relays making use of micromechanics with stepped actuation, e.g. actuation voltages applied to different sets of electrodes at different times or different spring constants during actuation
Landscapes
- Micromachines (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001089900A JP3651404B2 (ja) | 2001-03-27 | 2001-03-27 | 静電マイクロリレー、並びに、該静電マイクロリレーを利用した無線装置及び計測装置 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW550616B true TW550616B (en) | 2003-09-01 |
Family
ID=18944757
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW091105215A TW550616B (en) | 2001-03-27 | 2002-03-19 | Electrostatic micro-relay, radio device and measuring device using the electrostatic micro-relay, and contact switching method |
Country Status (5)
| Country | Link |
|---|---|
| EP (1) | EP1246216B1 (enExample) |
| JP (1) | JP3651404B2 (enExample) |
| KR (1) | KR100455949B1 (enExample) |
| CN (1) | CN1234144C (enExample) |
| TW (1) | TW550616B (enExample) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| ATE322033T1 (de) * | 2002-11-19 | 2006-04-15 | Baolab Microsystems Sl | Elektrooptische miniatureinrichtung und entsprechendeverwendungen dafür |
| DE102004010150B9 (de) * | 2004-02-27 | 2012-01-26 | Eads Deutschland Gmbh | Hochfrequenz-MEMS-Schalter mit gebogenem Schaltelement und Verfahren zu seiner Herstellung |
| JP4540443B2 (ja) | 2004-10-21 | 2010-09-08 | 富士通コンポーネント株式会社 | 静電リレー |
| JP2006147540A (ja) | 2004-10-22 | 2006-06-08 | Matsushita Electric Ind Co Ltd | 電気機械スイッチ |
| JP2014130767A (ja) * | 2012-12-28 | 2014-07-10 | Omron Corp | 静電マイクロリレーおよびその製造方法 |
| KR101595453B1 (ko) | 2014-06-30 | 2016-02-19 | 대한민국 | 보안등의 고정식 차광기구 |
| KR101595456B1 (ko) | 2014-06-30 | 2016-02-19 | 대한민국 | 보안등의 가변식 차광기구 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5278368A (en) * | 1991-06-24 | 1994-01-11 | Matsushita Elec. Works, Ltd | Electrostatic relay |
| US6054659A (en) * | 1998-03-09 | 2000-04-25 | General Motors Corporation | Integrated electrostatically-actuated micromachined all-metal micro-relays |
| JP3852224B2 (ja) * | 1998-10-08 | 2006-11-29 | オムロン株式会社 | 静電マイクロリレー |
| JP3796988B2 (ja) * | 1998-11-26 | 2006-07-12 | オムロン株式会社 | 静電マイクロリレー |
-
2001
- 2001-03-27 JP JP2001089900A patent/JP3651404B2/ja not_active Expired - Lifetime
-
2002
- 2002-03-19 TW TW091105215A patent/TW550616B/zh not_active IP Right Cessation
- 2002-03-25 KR KR10-2002-0015990A patent/KR100455949B1/ko not_active Expired - Fee Related
- 2002-03-26 EP EP02252164.5A patent/EP1246216B1/en not_active Expired - Lifetime
- 2002-03-27 CN CNB021082308A patent/CN1234144C/zh not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| KR20020076131A (ko) | 2002-10-09 |
| EP1246216A2 (en) | 2002-10-02 |
| CN1378225A (zh) | 2002-11-06 |
| EP1246216B1 (en) | 2014-06-04 |
| EP1246216A3 (en) | 2004-07-21 |
| JP2002289081A (ja) | 2002-10-04 |
| KR100455949B1 (ko) | 2004-11-08 |
| CN1234144C (zh) | 2005-12-28 |
| JP3651404B2 (ja) | 2005-05-25 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GD4A | Issue of patent certificate for granted invention patent | ||
| MM4A | Annulment or lapse of patent due to non-payment of fees |