JP3629405B2 - マイクロポンプ - Google Patents
マイクロポンプ Download PDFInfo
- Publication number
- JP3629405B2 JP3629405B2 JP2000143124A JP2000143124A JP3629405B2 JP 3629405 B2 JP3629405 B2 JP 3629405B2 JP 2000143124 A JP2000143124 A JP 2000143124A JP 2000143124 A JP2000143124 A JP 2000143124A JP 3629405 B2 JP3629405 B2 JP 3629405B2
- Authority
- JP
- Japan
- Prior art keywords
- flow path
- channel
- pressurizing chamber
- time
- resistance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Reciprocating Pumps (AREA)
- Micromachines (AREA)
- Details Of Reciprocating Pumps (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000143124A JP3629405B2 (ja) | 2000-05-16 | 2000-05-16 | マイクロポンプ |
| US09/855,371 US6716002B2 (en) | 2000-05-16 | 2001-05-15 | Micro pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000143124A JP3629405B2 (ja) | 2000-05-16 | 2000-05-16 | マイクロポンプ |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004319256A Division JP4645159B2 (ja) | 2004-11-02 | 2004-11-02 | マイクロポンプ |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2001322099A JP2001322099A (ja) | 2001-11-20 |
| JP2001322099A5 JP2001322099A5 (enExample) | 2004-09-16 |
| JP3629405B2 true JP3629405B2 (ja) | 2005-03-16 |
Family
ID=18649987
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000143124A Expired - Fee Related JP3629405B2 (ja) | 2000-05-16 | 2000-05-16 | マイクロポンプ |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US6716002B2 (enExample) |
| JP (1) | JP3629405B2 (enExample) |
Families Citing this family (75)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6752601B2 (en) * | 2001-04-06 | 2004-06-22 | Ngk Insulators, Ltd. | Micropump |
| DE10202996A1 (de) | 2002-01-26 | 2003-08-14 | Eppendorf Ag | Piezoelektrisch steuerbare Mikrofluidaktorik |
| JP4221184B2 (ja) * | 2002-02-19 | 2009-02-12 | 日本碍子株式会社 | マイクロ化学チップ |
| US7094040B2 (en) | 2002-03-27 | 2006-08-22 | Minolta Co., Ltd. | Fluid transferring system and micropump suitable therefor |
| EP1500937B1 (en) | 2002-04-30 | 2017-06-28 | ARKRAY, Inc. | Analyzing article, analyzer and method of analyzing a sample using the analyzing article |
| JP4396095B2 (ja) * | 2002-06-03 | 2010-01-13 | セイコーエプソン株式会社 | ポンプ |
| JP4378937B2 (ja) * | 2002-06-03 | 2009-12-09 | セイコーエプソン株式会社 | ポンプ |
| JP3595808B2 (ja) | 2002-07-11 | 2004-12-02 | コニカミノルタホールディングス株式会社 | 電圧発生回路及び該回路を備えた駆動装置 |
| JP3725109B2 (ja) * | 2002-09-19 | 2005-12-07 | 財団法人生産技術研究奨励会 | マイクロ流体デバイス |
| JP3865134B2 (ja) * | 2003-01-09 | 2007-01-10 | 横河電機株式会社 | バイオチップ用カートリッジ |
| US7290993B2 (en) * | 2004-04-02 | 2007-11-06 | Adaptivenergy Llc | Piezoelectric devices and methods and circuits for driving same |
| US7287965B2 (en) * | 2004-04-02 | 2007-10-30 | Adaptiv Energy Llc | Piezoelectric devices and methods and circuits for driving same |
| US7312554B2 (en) | 2004-04-02 | 2007-12-25 | Adaptivenergy, Llc | Piezoelectric devices and methods and circuits for driving same |
| US20050225201A1 (en) * | 2004-04-02 | 2005-10-13 | Par Technologies, Llc | Piezoelectric devices and methods and circuits for driving same |
| EP1746158A4 (en) * | 2004-05-07 | 2009-11-25 | Konica Minolta Med & Graphic | MICROREACTOR FOR TESTING, GENETIC TEST EQUIPMENT AND GENETIC TEST PROCEDURE |
| JP3952036B2 (ja) | 2004-05-13 | 2007-08-01 | コニカミノルタセンシング株式会社 | マイクロ流体デバイス並びに試液の試験方法および試験システム |
| CN1583541B (zh) * | 2004-05-27 | 2010-09-29 | 哈尔滨工程大学 | 采用多层驱动膜结构的微驱动器及其制作方法 |
| US20050272144A1 (en) * | 2004-06-08 | 2005-12-08 | Konica Minolta Medical & Graphic, Inc. | Micro-reactor for improving efficiency of liquid mixing and reaction |
| US20060012793A1 (en) * | 2004-07-19 | 2006-01-19 | Helicos Biosciences Corporation | Apparatus and methods for analyzing samples |
| US7276720B2 (en) * | 2004-07-19 | 2007-10-02 | Helicos Biosciences Corporation | Apparatus and methods for analyzing samples |
| WO2006046433A1 (ja) * | 2004-10-27 | 2006-05-04 | Konica Minolta Medical & Graphic, Inc. | 遺伝子検査用マイクロリアクタ |
| US20070070349A1 (en) * | 2005-09-23 | 2007-03-29 | Helicos Biosciences Corporation | Optical train and method for TIRF single molecule detection and analysis |
| US7398818B2 (en) * | 2004-12-28 | 2008-07-15 | California Institute Of Technology | Fluidic pump for heat management |
| US20060286566A1 (en) * | 2005-02-03 | 2006-12-21 | Helicos Biosciences Corporation | Detecting apparent mutations in nucleic acid sequences |
| US8021629B2 (en) | 2005-03-24 | 2011-09-20 | Konica Minolta Medical & Graphic, Inc. | Analyzer |
| JP4543986B2 (ja) | 2005-03-24 | 2010-09-15 | コニカミノルタエムジー株式会社 | マイクロ総合分析システム |
| JP4548174B2 (ja) | 2005-03-24 | 2010-09-22 | コニカミノルタエムジー株式会社 | 検査用マイクロチップおよびそれを用いた検査装置 |
| EP2597472A3 (en) | 2005-04-01 | 2014-03-05 | Konica Minolta Medical & Graphic, Inc. | Micro integrated analysis system, testing chip, and testing method |
| US7820109B2 (en) | 2005-04-20 | 2010-10-26 | Konica Minolta Medical & Graphic Inc. | Testing chip and micro analysis system |
| WO2007013287A1 (ja) * | 2005-07-27 | 2007-02-01 | Kyushu Institute Of Technology | バルブレスマイクロポンプ |
| US20070062594A1 (en) * | 2005-09-16 | 2007-03-22 | Extrand Charles W | Microfluidic device with anisotropic wetting surfaces |
| US20070065702A1 (en) * | 2005-09-16 | 2007-03-22 | Extrand Charles W | Fuel cell with anisotropic wetting surfaces |
| US20070065637A1 (en) * | 2005-09-16 | 2007-03-22 | Extrand Charles W | Carrier with anisotropic wetting surfaces |
| US20070085449A1 (en) * | 2005-10-13 | 2007-04-19 | Nanyang Technological University | Electro-active valveless pump |
| JP4888394B2 (ja) | 2005-11-07 | 2012-02-29 | コニカミノルタエムジー株式会社 | マイクロリアクタおよびそれを用いた送液方法 |
| WO2007058077A1 (ja) * | 2005-11-18 | 2007-05-24 | Konica Minolta Medical & Graphic, Inc. | 遺伝子検査方法、遺伝子検査用マイクロリアクタ、および遺伝子検査システム |
| JP5077227B2 (ja) | 2006-03-29 | 2012-11-21 | コニカミノルタエムジー株式会社 | マイクロチップの流路内における反応方法及び分析装置 |
| US20100232986A1 (en) | 2006-06-12 | 2010-09-16 | Konica Minolta Medical & Graphic, Inc. | Micro total analysis system equipped with leakage prevention mechanism |
| US20080025853A1 (en) * | 2006-07-10 | 2008-01-31 | Morteza Gharib | Micro Impedance Pump For Fluid Logic, Mixing and Separation |
| US8202267B2 (en) * | 2006-10-10 | 2012-06-19 | Medsolve Technologies, Inc. | Method and apparatus for infusing liquid to a body |
| WO2008047533A1 (en) | 2006-10-18 | 2008-04-24 | Konica Minolta Medical & Graphic, Inc. | Microchip reaction detection system, and method of reaction of microchip in flow path |
| EP2077451A4 (en) * | 2006-10-26 | 2011-03-02 | Konica Minolta Med & Graphic | MICROCHIP AND METHOD FOR THE PRODUCTION THEREOF |
| JP2008128706A (ja) | 2006-11-17 | 2008-06-05 | Konica Minolta Medical & Graphic Inc | マイクロチップ検査システム、およびマイクロチップ検査システムに用いるプログラム |
| EP2037124A1 (en) * | 2006-12-09 | 2009-03-18 | Murata Manufacturing Co. Ltd. | Piezoelectric pump |
| US20100028896A1 (en) | 2006-12-19 | 2010-02-04 | Konica Minolta Medical & Graphic, Inc. | Rotary extraction container and method of identifying cell species, method of detecting gene, and automatic nucleic acid extractor using the same |
| US20080161754A1 (en) * | 2006-12-29 | 2008-07-03 | Medsolve Technologies, Inc. | Method and apparatus for infusing liquid to a body |
| JP2008167722A (ja) | 2007-01-15 | 2008-07-24 | Konica Minolta Medical & Graphic Inc | 磁性支持体上での加熱による核酸単離方法 |
| JP2010519460A (ja) * | 2007-02-22 | 2010-06-03 | スターリング・インベストメンツ・エルシー | マイクロ流体伝達システム |
| JP2009019890A (ja) * | 2007-07-10 | 2009-01-29 | Konica Minolta Medical & Graphic Inc | マイクロ検査チップおよび検査装置 |
| JP2009019891A (ja) * | 2007-07-10 | 2009-01-29 | Konica Minolta Medical & Graphic Inc | マイクロ検査チップおよび検査装置 |
| WO2009009131A2 (en) | 2007-07-11 | 2009-01-15 | California Institute Of Technology | Cardiac assist system using helical arrangement of contractile bands and helically-twisting cardiac assist device |
| US20090050299A1 (en) * | 2007-08-21 | 2009-02-26 | Tektronix, Inc. | Cooling facility for an electronic component |
| US8708961B2 (en) * | 2008-01-28 | 2014-04-29 | Medsolve Technologies, Inc. | Apparatus for infusing liquid to a body |
| EP2703500B1 (en) * | 2008-05-09 | 2020-01-08 | Akonni Biosystems | Microarray system |
| US8017409B2 (en) * | 2009-05-29 | 2011-09-13 | Ecolab Usa Inc. | Microflow analytical system |
| WO2011146069A1 (en) | 2010-05-21 | 2011-11-24 | Hewlett-Packard Development Company, L.P. | Fluid ejection device including recirculation system |
| US10132303B2 (en) | 2010-05-21 | 2018-11-20 | Hewlett-Packard Development Company, L.P. | Generating fluid flow in a fluidic network |
| US9395050B2 (en) * | 2010-05-21 | 2016-07-19 | Hewlett-Packard Development Company, L.P. | Microfluidic systems and networks |
| EP2571696B1 (en) * | 2010-05-21 | 2019-08-07 | Hewlett-Packard Development Company, L.P. | Fluid ejection device with circulation pump |
| US8721061B2 (en) | 2010-05-21 | 2014-05-13 | Hewlett-Packard Development Company, L.P. | Fluid ejection device with circulation pump |
| US9963739B2 (en) | 2010-05-21 | 2018-05-08 | Hewlett-Packard Development Company, L.P. | Polymerase chain reaction systems |
| CN102985261B (zh) * | 2010-05-21 | 2016-02-03 | 惠普发展公司,有限责任合伙企业 | 具有循环泵的流体喷射设备 |
| US9125655B2 (en) | 2010-07-16 | 2015-09-08 | California Institute Of Technology | Correction and optimization of wave reflection in blood vessels |
| JP5555648B2 (ja) * | 2011-03-03 | 2014-07-23 | 積水化学工業株式会社 | マイクロポンプ |
| JP5826376B2 (ja) | 2011-04-29 | 2015-12-02 | ヒューレット−パッカード デベロップメント カンパニー エル.ピー.Hewlett‐Packard Development Company, L.P. | 流体をガス抜きするためのシステム及び方法 |
| JP5731712B2 (ja) * | 2011-08-31 | 2015-06-10 | ヒューレット−パッカード デベロップメント カンパニー エル.ピー.Hewlett‐Packard Development Company, L.P. | 流体変位アクチュエータを備える流体吐出デバイス及び関連方法 |
| WO2013112755A1 (en) | 2012-01-24 | 2013-08-01 | The Trustees Of Columbia University In The City Of New York | Field optimized assay devices, methods, and systems |
| US9662877B2 (en) | 2013-07-02 | 2017-05-30 | Konica Minolta, Inc. | Inkjet head and inkjet printer |
| US10444232B2 (en) | 2014-08-13 | 2019-10-15 | The Trustees Of Columbia University In The City Of New York | Diagnostic devices, systems, and methods |
| DE102016201718B4 (de) * | 2016-02-04 | 2022-02-17 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Pumpe mit polygonförmigem Piezo-Membranwandler |
| TWI652652B (zh) * | 2017-08-21 | 2019-03-01 | 研能科技股份有限公司 | 具致動傳感模組之裝置 |
| CN110206717B (zh) * | 2019-05-14 | 2020-09-11 | 广州大学 | 双向压电泵 |
| CN110594138A (zh) * | 2019-10-28 | 2019-12-20 | 南京航空航天大学 | 一种夹心式无阀压电泵及其工作方法 |
| WO2023105565A1 (ja) * | 2021-12-06 | 2023-06-15 | 日本電信電話株式会社 | マイクロダイアフラムポンプ |
| CN114100375B (zh) * | 2021-12-08 | 2024-04-02 | 浙江华强环境科技有限公司 | 一种改变流道结构的流道板及采用该流道板的膜组件 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5406318A (en) | 1989-11-01 | 1995-04-11 | Tektronix, Inc. | Ink jet print head with electropolished diaphragm |
| JP3531027B2 (ja) | 1996-10-04 | 2004-05-24 | 株式会社日立製作所 | マイクロポンプおよびポンプシステム |
| DE19648694C1 (de) * | 1996-11-25 | 1998-04-30 | Vermes Mikrotechnik Gmbh | Bidirektionale dynamische Mikropumpe |
| DE19648695C2 (de) * | 1996-11-25 | 1999-07-22 | Abb Patent Gmbh | Vorrichtung zur automatischen und kontinuierlichen Analyse von Flüssigkeitsproben |
| JP3202643B2 (ja) | 1997-02-19 | 2001-08-27 | セイコーインスツルメンツ株式会社 | マイクロポンプおよびマイクロポンプの製造方法 |
| US6116863A (en) * | 1997-05-30 | 2000-09-12 | University Of Cincinnati | Electromagnetically driven microactuated device and method of making the same |
| US6126140A (en) * | 1997-12-29 | 2000-10-03 | Honeywell International Inc. | Monolithic bi-directional microvalve with enclosed drive electric field |
| US6247908B1 (en) * | 1998-03-05 | 2001-06-19 | Seiko Instruments Inc. | Micropump |
| JP3020488B2 (ja) | 1999-01-22 | 2000-03-15 | 科学技術振興事業団 | 液体マイクロポンプ |
-
2000
- 2000-05-16 JP JP2000143124A patent/JP3629405B2/ja not_active Expired - Fee Related
-
2001
- 2001-05-15 US US09/855,371 patent/US6716002B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| US6716002B2 (en) | 2004-04-06 |
| US20020009374A1 (en) | 2002-01-24 |
| JP2001322099A (ja) | 2001-11-20 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP3629405B2 (ja) | マイクロポンプ | |
| JP2001322099A5 (enExample) | ||
| Xia et al. | Electroactive polymer based microfluidic pump | |
| TWI595738B (zh) | 微機電系統及其相關系統、用途、微機電系統揚聲器和調節單元 | |
| CN100389263C (zh) | 蠕动微型泵 | |
| US8353682B2 (en) | Microfluidic-device systems and methods for manufacturing microfluidic-device systems | |
| CN102884352B (zh) | 弯曲换能器、微型泵和微型阀的制造方法以及微型泵和微型阀 | |
| DE112007000669B4 (de) | Piezoelektrische Mikropumpe | |
| Van der Wijngaart et al. | The first self-priming and bi-directional valve-less diffuser micropump for both liquid and gas | |
| Lee et al. | Bidirectional pumping properties of a peristaltic piezoelectric micropump with simple design and chemical resistance | |
| JPH02149778A (ja) | 圧電マイクロポンプ | |
| CN101303085A (zh) | 一种具有圆环面边界的微流体主动控制阀 | |
| JP4645159B2 (ja) | マイクロポンプ | |
| JP3130483B2 (ja) | マイクロポンプ | |
| Wen et al. | A valveless micro impedance pump driven by PZT actuation | |
| JP2003139064A (ja) | 小型ポンプ | |
| Tracey et al. | Dual independent displacement-amplified micropumps with a single actuator | |
| JP2003322085A (ja) | 小型ポンプ | |
| Cui et al. | Modeling and numerical analysis of a circular piezoelectric actuator for valveless micropumps | |
| WO2000028213A1 (en) | Micropump | |
| JP3896141B2 (ja) | マイクロポンプおよびマイクロポンプシステム | |
| JP3705265B2 (ja) | マイクロポンプ | |
| Xu et al. | Design, modeling, fabrication, and performances of bridge-type high-performance electroactive polymer micromachined actuators | |
| CN103814217B (zh) | 盘泵和阀结构 | |
| JP5120243B2 (ja) | 光学装置 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20031209 |
|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20040206 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20040302 |
|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20040426 |
|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20040907 |
|
| A711 | Notification of change in applicant |
Free format text: JAPANESE INTERMEDIATE CODE: A712 Effective date: 20041001 |
|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20041007 |
|
| A911 | Transfer of reconsideration by examiner before appeal (zenchi) |
Free format text: JAPANESE INTERMEDIATE CODE: A911 Effective date: 20041109 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20041130 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20041213 |
|
| R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20071217 Year of fee payment: 3 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20081217 Year of fee payment: 4 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20081217 Year of fee payment: 4 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20091217 Year of fee payment: 5 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20101217 Year of fee payment: 6 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20101217 Year of fee payment: 6 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20111217 Year of fee payment: 7 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20111217 Year of fee payment: 7 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20121217 Year of fee payment: 8 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20131217 Year of fee payment: 9 |
|
| S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313531 |
|
| S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| LAPS | Cancellation because of no payment of annual fees |