JP3602067B2 - 静電チャック - Google Patents

静電チャック Download PDF

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Publication number
JP3602067B2
JP3602067B2 JP2001134122A JP2001134122A JP3602067B2 JP 3602067 B2 JP3602067 B2 JP 3602067B2 JP 2001134122 A JP2001134122 A JP 2001134122A JP 2001134122 A JP2001134122 A JP 2001134122A JP 3602067 B2 JP3602067 B2 JP 3602067B2
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JP
Japan
Prior art keywords
coating layer
electrostatic chuck
dlc
carbon
electrical resistivity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2001134122A
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English (en)
Japanese (ja)
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JP2002246451A5 (enExample
JP2002246451A (ja
Inventor
眞助 増田
清利 藤井
Original Assignee
ジーイー・スペシャルティ・マテリアルズ・ジャパン株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ジーイー・スペシャルティ・マテリアルズ・ジャパン株式会社 filed Critical ジーイー・スペシャルティ・マテリアルズ・ジャパン株式会社
Priority to JP2001134122A priority Critical patent/JP3602067B2/ja
Priority to KR1020010077914A priority patent/KR20020046214A/ko
Priority to US10/006,657 priority patent/US6678143B2/en
Priority to TW090130670A priority patent/TW516155B/zh
Priority to DE60126576T priority patent/DE60126576T2/de
Priority to EP01310328A priority patent/EP1220311B1/en
Priority to AT01310328T priority patent/ATE354177T1/de
Priority to US10/198,052 priority patent/US20030107865A1/en
Publication of JP2002246451A publication Critical patent/JP2002246451A/ja
Publication of JP2002246451A5 publication Critical patent/JP2002246451A5/ja
Application granted granted Critical
Publication of JP3602067B2 publication Critical patent/JP3602067B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Jigs For Machine Tools (AREA)
  • Chemical Vapour Deposition (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2001134122A 2000-12-11 2001-05-01 静電チャック Expired - Fee Related JP3602067B2 (ja)

Priority Applications (8)

Application Number Priority Date Filing Date Title
JP2001134122A JP3602067B2 (ja) 2000-12-11 2001-05-01 静電チャック
US10/006,657 US6678143B2 (en) 2000-12-11 2001-12-10 Electrostatic chuck and method of manufacturing the same
KR1020010077914A KR20020046214A (ko) 2000-12-11 2001-12-10 정전척 및 그 제조방법
DE60126576T DE60126576T2 (de) 2000-12-11 2001-12-11 Elektrostatische Spannvorrichtung und Verfahren zur Herstellung derselben
TW090130670A TW516155B (en) 2000-12-11 2001-12-11 Electrostatic chuck and the manufacturing method thereof
EP01310328A EP1220311B1 (en) 2000-12-11 2001-12-11 Electrostatic chuck and method of manufacturing the same
AT01310328T ATE354177T1 (de) 2000-12-11 2001-12-11 Elektrostatische haltevorrichtung und methode zur herstellung derselben
US10/198,052 US20030107865A1 (en) 2000-12-11 2002-07-19 Wafer handling apparatus and method of manufacturing the same

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2000-376599 2000-12-11
JP2000376599 2000-12-11
JP2001134122A JP3602067B2 (ja) 2000-12-11 2001-05-01 静電チャック

Publications (3)

Publication Number Publication Date
JP2002246451A JP2002246451A (ja) 2002-08-30
JP2002246451A5 JP2002246451A5 (enExample) 2004-09-02
JP3602067B2 true JP3602067B2 (ja) 2004-12-15

Family

ID=26605626

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001134122A Expired - Fee Related JP3602067B2 (ja) 2000-12-11 2001-05-01 静電チャック

Country Status (1)

Country Link
JP (1) JP3602067B2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111095522A (zh) * 2017-10-09 2020-05-01 应用材料公司 用于无损衬底处理的静电吸盘

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4654152B2 (ja) * 2006-04-13 2011-03-16 信越化学工業株式会社 加熱素子
JP4654153B2 (ja) * 2006-04-13 2011-03-16 信越化学工業株式会社 加熱素子
JP4654151B2 (ja) * 2006-04-13 2011-03-16 信越化学工業株式会社 加熱素子

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111095522A (zh) * 2017-10-09 2020-05-01 应用材料公司 用于无损衬底处理的静电吸盘

Also Published As

Publication number Publication date
JP2002246451A (ja) 2002-08-30

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