JP3189661B2 - 光源装置 - Google Patents

光源装置

Info

Publication number
JP3189661B2
JP3189661B2 JP01850796A JP1850796A JP3189661B2 JP 3189661 B2 JP3189661 B2 JP 3189661B2 JP 01850796 A JP01850796 A JP 01850796A JP 1850796 A JP1850796 A JP 1850796A JP 3189661 B2 JP3189661 B2 JP 3189661B2
Authority
JP
Japan
Prior art keywords
cooling air
discharge lamp
mercury discharge
metal member
light source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP01850796A
Other languages
English (en)
Japanese (ja)
Other versions
JPH09213129A (ja
Inventor
清忠 中村
昭 里見
利之 嶋
真吉 森本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
Original Assignee
Ushio Denki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Denki KK filed Critical Ushio Denki KK
Priority to JP01850796A priority Critical patent/JP3189661B2/ja
Priority to KR1019970003596A priority patent/KR100428959B1/ko
Publication of JPH09213129A publication Critical patent/JPH09213129A/ja
Application granted granted Critical
Publication of JP3189661B2 publication Critical patent/JP3189661B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/82—Lamps with high-pressure unconstricted discharge having a cold pressure > 400 Torr
    • H01J61/822—High-pressure mercury lamps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/52—Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/12—Selection of substances for gas fillings; Specified operating pressure or temperature
    • H01J61/18—Selection of substances for gas fillings; Specified operating pressure or temperature having a metallic vapour as the principal constituent
    • H01J61/20—Selection of substances for gas fillings; Specified operating pressure or temperature having a metallic vapour as the principal constituent mercury vapour

Landscapes

  • Non-Portable Lighting Devices Or Systems Thereof (AREA)
  • Arrangement Of Elements, Cooling, Sealing, Or The Like Of Lighting Devices (AREA)
  • Liquid Crystal (AREA)
  • Fastening Of Light Sources Or Lamp Holders (AREA)
  • Discharge Lamps And Accessories Thereof (AREA)
  • Projection Apparatus (AREA)
JP01850796A 1996-02-05 1996-02-05 光源装置 Expired - Lifetime JP3189661B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP01850796A JP3189661B2 (ja) 1996-02-05 1996-02-05 光源装置
KR1019970003596A KR100428959B1 (ko) 1996-02-05 1997-02-05 광원장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP01850796A JP3189661B2 (ja) 1996-02-05 1996-02-05 光源装置

Publications (2)

Publication Number Publication Date
JPH09213129A JPH09213129A (ja) 1997-08-15
JP3189661B2 true JP3189661B2 (ja) 2001-07-16

Family

ID=11973547

Family Applications (1)

Application Number Title Priority Date Filing Date
JP01850796A Expired - Lifetime JP3189661B2 (ja) 1996-02-05 1996-02-05 光源装置

Country Status (2)

Country Link
JP (1) JP3189661B2 (ko)
KR (1) KR100428959B1 (ko)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000082322A (ja) * 1998-09-08 2000-03-21 Ushio Inc 光源ユニット
KR20150036786A (ko) 2003-04-09 2015-04-07 가부시키가이샤 니콘 노광 방법 및 장치, 그리고 디바이스 제조 방법
TWI569308B (zh) 2003-10-28 2017-02-01 尼康股份有限公司 照明光學裝置、曝光裝置、曝光方法以及元件製造 方法
TWI519819B (zh) 2003-11-20 2016-02-01 尼康股份有限公司 光束變換元件、光學照明裝置、曝光裝置、以及曝光方法
TWI412067B (zh) 2004-02-06 2013-10-11 尼康股份有限公司 偏光變換元件、光學照明裝置、曝光裝置以及曝光方法
KR101524964B1 (ko) 2005-05-12 2015-06-01 가부시키가이샤 니콘 투영 광학계, 노광 장치 및 노광 방법
KR102157236B1 (ko) * 2006-09-01 2020-09-17 가부시키가이샤 니콘 방전램프
CN102446669B (zh) 2007-04-12 2015-06-24 株式会社尼康 放电灯、连接用线缆、光源装置及曝光装置
US9165738B2 (en) 2007-04-12 2015-10-20 Nikon Corporation Discharge lamp, connecting cable, light source apparatus, and exposure apparatus
KR101834803B1 (ko) * 2007-04-12 2018-03-06 가부시키가이샤 니콘 방전램프, 접속용 케이블, 광원장치 및 노광장치
US7728495B2 (en) * 2007-08-01 2010-06-01 Osram Sylvania Inc. HID lamp with frit seal thermal control
DE102007045079A1 (de) * 2007-09-21 2009-04-02 Osram Gesellschaft mit beschränkter Haftung Hochdruckentladungslampe
JP5267029B2 (ja) 2007-10-12 2013-08-21 株式会社ニコン 照明光学装置、露光装置及びデバイスの製造方法
US8379187B2 (en) 2007-10-24 2013-02-19 Nikon Corporation Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method
US9116346B2 (en) 2007-11-06 2015-08-25 Nikon Corporation Illumination apparatus, illumination method, exposure apparatus, and device manufacturing method
JP4811482B2 (ja) 2009-03-16 2011-11-09 セイコーエプソン株式会社 光源装置およびプロジェクター
DE102009029867A1 (de) * 2009-06-22 2010-12-23 Osram Gesellschaft mit beschränkter Haftung Hochdruckentladungslampe
JP6645532B2 (ja) * 2018-04-11 2020-02-14 株式会社ニコン 光源装置、露光装置、およびデバイス製造方法
JP2020060798A (ja) * 2020-01-09 2020-04-16 株式会社ニコン 光源装置、露光装置、ランプ、メンテナンス方法およびデバイス製造方法
JP2022162413A (ja) * 2021-04-12 2022-10-24 キヤノン株式会社 ランプ、光源装置、露光装置、および物品製造方法

Also Published As

Publication number Publication date
KR970063379A (ko) 1997-09-12
JPH09213129A (ja) 1997-08-15
KR100428959B1 (ko) 2004-07-16

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