JP3172461U - 留め付けられた一体的なシャワーヘッド電極のための位置決め構造を有するガスケット - Google Patents
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- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/16—Vessels; Containers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
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- H—ELECTRICITY
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- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
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Abstract
【解決手段】アセンブリ100は、相隔たれた一連のカムロックによって機械的に受け板140に取り付けられた上側シャワーヘッド電極110を含む。シャワーヘッド電極の中心から3〜4インチの場所では、突出部を上に備えた熱伝導性で且つ導電性のガスケットがシャワーヘッド電極と受け板との間で圧縮される。受け板140は、ガードリング170で取り囲まれ、該ガードリングは、ガードリング内の開口が受け板内の開口に合わさる位置まで移動可能であり、その位置では、電極の上面から伸びるロックピンを解除するために、器具によってカムロックを回転させることができる。
【選択図】図1
Description
Claims (19)
- シャワーヘッド電極が受け板に留め付けられたシャワーヘッド電極アセンブリのためのガスケットであって、
前記ガスケットは、熱伝導性で且つ導電性の材料の環状片と、その表面上の複数の突出部とを備え、前記環状片は、前記シャワーヘッド電極の外径より小さい外径を有し、前記突出部は、各自、前記環状片の厚さの少なくとも2倍の高さを有する、ガスケット。 - 請求項1に記載のガスケットであって、
前記突出部は、2つの円柱状突出部を含み、各自、前記環状片の幅の少なくとも半分の直径と、前記環状片の厚さの少なくとも4倍の厚さとを有する、ガスケット。 - 請求項1に記載のガスケットであって、
前記環状片は、シリコーンゴムの層の間にアルミニウム箔を挟んだ積層体であり、前記突出部は、前記環状片の一方の側に接着接合される、ガスケット。 - 請求項1に記載のガスケットであって、
前記複数の突出部は、180度相隔たった2つの円柱状突出部からなる、ガスケット。 - 請求項1に記載のガスケットであって、
前記環状片は、平面状の上側表面及び下側表面と、0.005〜0.01インチの厚さとを有し、前記突出部は、0.02〜0.04インチの厚さを有する平面状の円板であり、前記突出部は、前記環状片の一方の側に接合される、ガスケット。 - 請求項1に記載のガスケットであって、
前記環状片は、3〜4インチの外径と、2〜3インチの内径と、0.2〜0.4インチの幅とを有する、ガスケット。 - シャワーヘッド電極アセンブリであって、
外側部分に複数のカムロックを設けられた受け板と、
12インチを超える直径を有するシャワーヘッド電極であって、
上面及び下面によって定められた中央部分及び周辺部分であって、前記上面は、前記中央部分を跨いで広がる平面状の表面を含み、前記下面は、前記中央部分を跨いで広がる平面状の内側表面と、前記周辺部分を跨いで広がる段状の外側表面とによって定められ、前記段状の外側表面は、前記シャワーヘッド電極の厚み増し領域を定める平面状の環状表面を含む、中央部分及び周辺部分と、
前記電極の前記中央部分に設けられた複数のガス出口であって、前記シャワーヘッド電極と、半導体基板を支える下側電極との間の隙間にプロセスガスを送ることができる、複数のガス出口と、
前記上面の前記周辺部分に円周方向に相隔てて設けられた複数のポケットであって、前記シャワーヘッド電極を前記受け板に留め付けるために前記受け板の前記カムロックに係合される上向きに伸びるロックピンを支える複数のポケットと、
を含む、シャワーヘッド電極と、
前記シャワーヘッド電極と前記受け板との間で圧縮される請求項1に記載のガスケットであって、前記シャワーヘッド電極内の凹所内に位置する前記ガスケットの前記突出部、及び前記環状片は、前記シャワーヘッド電極の温度サイクルの際の前記シャワーヘッド電極の前記上面と前記受け板の下面との擦れ合いを阻止する、ガスケットと、
を備えるシャワーヘッド電極アセンブリ。 - 請求項7に記載のシャワーヘッド電極アセンブリであって、
前記突出部は、2つの円柱状突出部を含み、各自、前記環状片の幅の少なくとも半分の直径と、前記環状片の厚さの少なくとも4倍の厚さとを有する、シャワーヘッド電極アセンブリ。 - 請求項7に記載のシャワーヘッド電極アセンブリであって、
前記環状片は、シリコーンゴムの層の間にアルミニウム箔を挟んだ積層体であり、前記突出部は、前記環状片の一方の側に接着接合される、シャワーヘッド電極アセンブリ。 - 請求項7に記載のシャワーヘッド電極アセンブリであって、
前記複数の突出部は、180度相隔たった2つの円柱状突出部からなる、シャワーヘッド電極アセンブリ。 - 請求項7に記載のシャワーヘッド電極アセンブリであって、
前記環状片は、平面状の上側表面及び下側表面と、0.005〜0.01インチの厚さとを有し、前記突出部は、0.02〜0.04インチの厚さを有する平面状の円板であり、前記突出部は、前記環状片の一方の側に接合される、シャワーヘッド電極アセンブリ。 - 請求項7に記載のシャワーヘッド電極アセンブリであって、
前記環状片は、3〜4インチの外径と、2〜3インチの内径と、0.2〜0.4インチの幅とを有する、シャワーヘッド電極アセンブリ。 - 請求項7に記載のシャワーヘッド電極アセンブリであって、更に、
前記受け板と前記シャワーヘッド電極との間にガスシールを備え、前記ガスシールは、前記ガス通路より外側に設けられ、前記シャワーヘッド電極は、多結晶シリコンを含み、前記受け板は、アルミニウムを含む、シャワーヘッド電極アセンブリ。 - プラズマチャンバ内において半導体基板を処理する方法であって、
前記半導体基板を前記チャンバ内の下側電極で支える工程と、
前記チャンバにプロセスガスを供給する工程と、
上側電極の曝露表面の付近においてプラズマを発生させる工程と、
前記プラズマによって前記半導体基板を処理する工程と
を備え、
前記上側電極は、請求項7に記載のシャワーヘッド電極アセンブリのシャワーヘッド電極を含む、方法。 - 請求項14に記載の方法であって、
前記シャワーヘッド電極の温度は、前記チャンバの温度制御上壁と、熱制御板と、前記受け板とによって制御され、前記熱制御板は、前記熱制御板と前記受け板との間にプレナムを形成する環状突出部を含み、前記プレナムは、前記シャワーヘッド電極内のガス通路に位置合わせされた前記受け板内のガス通路と流体連通しており、前記受け板は、前記シャワーヘッド電極と前記熱制御板との間に熱経路を提供する、方法。 - 請求項14に記載の方法であって、
前記半導体基板は、半導体ウエハを含み、前記処理する工程は、前記プラズマによって前記半導体ウエハをエッチングすることを含む、方法。 - 請求項14に記載の方法であって、
前記上側電極は、接地され、前記下部電極は、前記処理する工程の際に通電される、方法。 - 請求項14に記載の方法であって、
前記シャワーヘッド電極及び前記受け板の熱膨張に差を生じさせる高温に、前記シャワーヘッド電極及び前記受け板を加熱することと、
前記ガスケットによって前記シャワーヘッド電極と前記受け板との擦れ合いを阻止しつつ、前記ロックピンの動きによって前記熱膨張に順応させることと、
を備える方法。 - 請求項7に記載のシャワーヘッド電極アセンブリのシャワーヘッド電極を交換する方法であって、
前記カムロックを前記ロックピンから切り離すために前記カムロックを解除することと、
前記シャワーヘッド電極を取り外すことと、
新しいガスケットの下側表面上の突出部を新しい又は修復されたシャワーヘッド電極の上面内の凹所に入れることによって、前記ガスケットを新しいガスケットに交換することと、
前記新しい又は修復されたシャワーヘッド電極のロックピンを前記受け板内の軸方向孔に合わせることと、
前記カムロックを回転させて前記ロックピンのヘッドに係合させることと、
を備える方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/421,845 | 2009-04-10 | ||
US12/421,845 US8272346B2 (en) | 2009-04-10 | 2009-04-10 | Gasket with positioning feature for clamped monolithic showerhead electrode |
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Cited By (3)
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JP2016111284A (ja) * | 2014-12-10 | 2016-06-20 | 東京エレクトロン株式会社 | プラズマ処理方法 |
KR102556317B1 (ko) * | 2022-08-12 | 2023-07-18 | 주식회사 에이티에스 | 플라즈마 에칭 장비용 합금 및 이를 포함하는 체결기구 |
WO2024034937A1 (ko) * | 2022-08-12 | 2024-02-15 | 주식회사 에이티에스 | 플라즈마 에칭 장비용 합금 및 이를 포함하는 체결기구 |
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US20100261354A1 (en) | 2010-10-14 |
KR200464038Y1 (ko) | 2013-02-19 |
US20130034967A1 (en) | 2013-02-07 |
CN202025711U (zh) | 2011-11-02 |
KR20100010304U (ko) | 2010-10-20 |
US8272346B2 (en) | 2012-09-25 |
TWM396482U (en) | 2011-01-11 |
DE202010004773U1 (de) | 2010-08-12 |
US8536071B2 (en) | 2013-09-17 |
JP2010251752A (ja) | 2010-11-04 |
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