JP3073321B2 - 有害ガスの浄化方法 - Google Patents

有害ガスの浄化方法

Info

Publication number
JP3073321B2
JP3073321B2 JP04169104A JP16910492A JP3073321B2 JP 3073321 B2 JP3073321 B2 JP 3073321B2 JP 04169104 A JP04169104 A JP 04169104A JP 16910492 A JP16910492 A JP 16910492A JP 3073321 B2 JP3073321 B2 JP 3073321B2
Authority
JP
Japan
Prior art keywords
gas
atom
harmful
purification method
concentration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP04169104A
Other languages
English (en)
Japanese (ja)
Other versions
JPH05237324A (ja
Inventor
昇 秋田
俊哉 畠山
孝 島田
恵一 岩田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Pionics Ltd
Original Assignee
Japan Pionics Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Pionics Ltd filed Critical Japan Pionics Ltd
Priority to US07/975,698 priority Critical patent/US5378444A/en
Priority to DE69218133T priority patent/DE69218133T2/de
Priority to EP92120702A priority patent/EP0546464B1/en
Priority to TW081109782A priority patent/TW254860B/zh
Priority to KR1019920023903A priority patent/KR0126123B1/ko
Publication of JPH05237324A publication Critical patent/JPH05237324A/ja
Priority to US08/308,648 priority patent/US5597540A/en
Application granted granted Critical
Publication of JP3073321B2 publication Critical patent/JP3073321B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Biomedical Technology (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Treating Waste Gases (AREA)
  • Separation Of Gases By Adsorption (AREA)
  • Gas Separation By Absorption (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
JP04169104A 1991-12-11 1992-06-26 有害ガスの浄化方法 Expired - Fee Related JP3073321B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
US07/975,698 US5378444A (en) 1991-12-11 1992-11-13 Process for cleaning harmful gas
DE69218133T DE69218133T2 (de) 1991-12-11 1992-12-04 Verfahren zum Reinigen eines schädlichen Gases
EP92120702A EP0546464B1 (en) 1991-12-11 1992-12-04 Process for cleaning harmful gas
TW081109782A TW254860B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-12-11 1992-12-07
KR1019920023903A KR0126123B1 (ko) 1991-12-11 1992-12-11 유해가스의 정화방법
US08/308,648 US5597540A (en) 1991-12-11 1994-09-19 Process for cleaning harmful gas

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP3-327576 1991-12-11
JP32757691 1991-12-11

Publications (2)

Publication Number Publication Date
JPH05237324A JPH05237324A (ja) 1993-09-17
JP3073321B2 true JP3073321B2 (ja) 2000-08-07

Family

ID=18200604

Family Applications (1)

Application Number Title Priority Date Filing Date
JP04169104A Expired - Fee Related JP3073321B2 (ja) 1991-12-11 1992-06-26 有害ガスの浄化方法

Country Status (3)

Country Link
JP (1) JP3073321B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
KR (1) KR0126123B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
TW (1) TW254860B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3781871B2 (ja) * 1997-07-22 2006-05-31 ズードケミー触媒株式会社 塩化物吸収剤
FR2776536B1 (fr) * 1998-03-31 2000-04-28 Rhodia Chimie Sa Procede d'elimination de composes halogenes contenus dans un gaz ou un liquide avec une composition a base d'au moins un element metallique
JP4276333B2 (ja) * 1998-09-22 2009-06-10 日本パイオニクス株式会社 排ガスの浄化方法
TW581708B (en) 1998-09-22 2004-04-01 Japan Pionics Cleaning agent and cleaning method for halogen-containing exhaust gas
KR100520450B1 (ko) * 1999-06-08 2005-10-12 주식회사 코캣 반도체 식각공정용 할로겐족 폐가스 처리제 및 이를 이용한 할로겐족 폐가스의 처리방법
KR20020025466A (ko) * 2000-09-29 2002-04-04 조승훈 탈염소중화장치
JP4620897B2 (ja) * 2001-04-23 2011-01-26 サンワケミカル株式会社 ハロゲン系ガスの除去方法
JP4711550B2 (ja) * 2001-07-04 2011-06-29 サンワケミカル株式会社 ハロゲンガスの除去方法
JP5008801B2 (ja) * 2001-04-23 2012-08-22 サンワケミカル株式会社 ハロゲン系ガスの除去方法
KR20010025405A (ko) * 2000-12-15 2001-04-06 조창균 에어를 이용한 염소가스 중화장치.
JPWO2009125457A1 (ja) * 2008-04-11 2011-07-28 カンケンテクノ株式会社 シラン系ガス及びフッ素系ガス含有排ガスの処理方法及び該方法を用いた排ガス処理装置
JP5639757B2 (ja) * 2009-12-10 2014-12-10 中部電力株式会社 ガス処理方法
JP2011062697A (ja) * 2010-11-26 2011-03-31 Sanwa Chemical Kk ハロゲン系ガスの除去方法
CN109012092A (zh) * 2018-08-09 2018-12-18 全椒南大光电材料有限公司 一种高浓度三氟化氯尾气处理装置及处理方法
KR102256134B1 (ko) * 2019-12-05 2021-05-25 상우기업(주) 고농도 액상 유해가스 제거제

Also Published As

Publication number Publication date
KR0126123B1 (ko) 1997-12-19
KR930012082A (ko) 1993-07-20
JPH05237324A (ja) 1993-09-17
TW254860B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1995-08-21

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