JP2644399B2 - フィルムテープ上に金属で覆われない縞状部分を形成する装置 - Google Patents

フィルムテープ上に金属で覆われない縞状部分を形成する装置

Info

Publication number
JP2644399B2
JP2644399B2 JP3287144A JP28714491A JP2644399B2 JP 2644399 B2 JP2644399 B2 JP 2644399B2 JP 3287144 A JP3287144 A JP 3287144A JP 28714491 A JP28714491 A JP 28714491A JP 2644399 B2 JP2644399 B2 JP 2644399B2
Authority
JP
Japan
Prior art keywords
roller
film tape
nozzle
film
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP3287144A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0661113A (ja
Inventor
ジークフリート、クライエル
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BARUTSUAASU UNTO RAIBORUTO DOICHURANTO HOORUDEINGU AG
Original Assignee
BARUTSUAASU UNTO RAIBORUTO DOICHURANTO HOORUDEINGU AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BARUTSUAASU UNTO RAIBORUTO DOICHURANTO HOORUDEINGU AG filed Critical BARUTSUAASU UNTO RAIBORUTO DOICHURANTO HOORUDEINGU AG
Publication of JPH0661113A publication Critical patent/JPH0661113A/ja
Application granted granted Critical
Publication of JP2644399B2 publication Critical patent/JP2644399B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00—Fixed capacitors; Processes of their manufacture
    • H01G4/002—Details
    • H01G4/018—Dielectrics
    • H01G4/06—Solid dielectrics
    • H01G4/14—Organic dielectrics
    • H01G4/145—Organic dielectrics vapour deposited

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physical Vapour Deposition (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
  • Coating Of Shaped Articles Made Of Macromolecular Substances (AREA)
JP3287144A 1991-01-11 1991-10-07 フィルムテープ上に金属で覆われない縞状部分を形成する装置 Expired - Fee Related JP2644399B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4100643A DE4100643C1 (OSRAM) 1991-01-11 1991-01-11
DE4100643.7 1991-01-11

Publications (2)

Publication Number Publication Date
JPH0661113A JPH0661113A (ja) 1994-03-04
JP2644399B2 true JP2644399B2 (ja) 1997-08-25

Family

ID=6422849

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3287144A Expired - Fee Related JP2644399B2 (ja) 1991-01-11 1991-10-07 フィルムテープ上に金属で覆われない縞状部分を形成する装置

Country Status (4)

Country Link
US (1) US5223038A (OSRAM)
EP (1) EP0494340B1 (OSRAM)
JP (1) JP2644399B2 (OSRAM)
DE (2) DE4100643C1 (OSRAM)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4310085A1 (de) * 1993-03-27 1994-09-29 Leybold Ag Verfahren und Vorrichtung zur Erzeugung von Mustern auf Substraten
DE19527604A1 (de) * 1995-07-28 1997-01-30 Leybold Ag Verfahren und Vorrichtung zur Herstellung von metallfreien Streifen bei der Metallbedampfung
CN1975944B (zh) * 1997-03-19 2010-04-14 松下电器产业株式会社 薄膜层叠体和电子元件
US6576523B1 (en) * 1997-11-18 2003-06-10 Matsushita Electric Industrial Co., Ltd. Layered product, capacitor and a method for producing the layered product
DE19819672A1 (de) * 1998-05-02 1999-11-04 Leybold Ag Musterträger für Pattern-Verdampfer
US6686027B1 (en) 2000-09-25 2004-02-03 Agra Vadeko Inc. Security substrate for documents of value
DE10330401B3 (de) * 2003-07-04 2005-02-24 Applied Films Gmbh & Co. Kg Verfahren und Vorrichtung zum bereichsweisen Auftragen von Trennmitteln
CN101817269B (zh) 2003-07-14 2012-01-18 Jds尤尼费斯公司 光学可变装置
EP1788112B1 (de) * 2005-10-26 2011-08-17 Applied Materials GmbH & Co. KG Vorrichtung zum Bedampfen von Substraten
EP1788113B1 (de) * 2005-10-26 2011-05-11 Applied Materials GmbH & Co. KG Verdampfervorrichtung mit einem Behälter für die Aufnahme von zu verdampfendem Material
EP1693481A1 (en) 2005-11-23 2006-08-23 Galileo Vacuum Systems S.R.L. Vacuum metallization device with means to create metal-free areas
EP1990442A1 (en) 2007-03-27 2008-11-12 Galileo Vacuum Systems S.p.A. Device for vacuum deposition of a coating on a continuous material, with liquid applicator
DE502007003847D1 (de) * 2007-04-03 2010-07-01 Applied Materials Inc Vorrichtung zum kontinuierlichen Beschichten eines bandförmigen Substrates
WO2012015744A1 (en) * 2010-07-28 2012-02-02 Synos Technology, Inc. Rotating reactor assembly for depositing film on substrate
DE202014104199U1 (de) 2014-09-05 2014-10-22 Applied Materials, Inc. Substrat mit Beschichtung mit variablem Reflexionsverhalten
DE102016108583B4 (de) * 2016-05-10 2022-06-23 Siempelkamp Maschinen- Und Anlagenbau Gmbh Vorrichtung und Verfahren zum Besprühen einer Materialbahn
DE102021117574A1 (de) * 2021-07-07 2023-01-12 Thyssenkrupp Steel Europe Ag Beschichtungsanlage zur Beschichtung eines flächigen Gegenstands sowie ein Verfahren zum Beschichten eines flächigen Gegenstands
WO2023018600A1 (en) 2021-08-12 2023-02-16 Applied Materials, Inc. Evaporator for effective surface area evaporation

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE452116A (OSRAM) * 1939-02-10
NL287577A (OSRAM) * 1962-01-16
DE1262732B (de) * 1962-07-04 1968-03-07 Siemens Ag Vorrichtung zum gleichzeitigen Aufdampfen von mehreren parallelen Streifen aus fluessigen oder fettartigen Stoffen mit niedrigem Dampfdruck auf insbesondere fuer die Herstellung elektrischer Kondensatoren bestimmten Baendern als Abdeckmittel fuer eine nachfolgende Metallbedampfung
US3764382A (en) * 1970-01-14 1973-10-09 N Danilov Method of producing anisotropic magnetic films
JPS57152122A (en) * 1981-03-16 1982-09-20 Matsushita Electric Industrial Co Ltd Method of producing metallized film capacitor
JPS59179777A (ja) * 1983-03-30 1984-10-12 Ulvac Corp 連続薄膜形成装置に於けるパタ−ン形成装置
US4832983A (en) * 1987-03-05 1989-05-23 Shizuki Electric Co., Inc. Process for producing metallized plastic film
DE3817513C2 (de) * 1988-05-24 1996-01-25 Leybold Ag Vorrichtung zum Verdampfen von Metallen
KR910700536A (ko) * 1988-12-07 1991-03-15 요네사와 요시노부 적층형 칩 콘덴서용 금속화 필름 및 그 제조방법
DE3922187A1 (de) * 1989-07-06 1991-01-17 Leybold Ag Vorrichtung zum herstellen von metallfreien streifen bei im vakuum beschichteten folienbahnen, insbesondere fuer kondensatoren

Also Published As

Publication number Publication date
DE4100643C1 (OSRAM) 1991-10-31
US5223038A (en) 1993-06-29
EP0494340B1 (de) 1995-03-15
JPH0661113A (ja) 1994-03-04
EP0494340A1 (de) 1992-07-15
DE59104963D1 (de) 1995-04-20

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