JP2544058Y2 - 真空圧回路の漏洩検出装置 - Google Patents

真空圧回路の漏洩検出装置

Info

Publication number
JP2544058Y2
JP2544058Y2 JP1988057368U JP5736888U JP2544058Y2 JP 2544058 Y2 JP2544058 Y2 JP 2544058Y2 JP 1988057368 U JP1988057368 U JP 1988057368U JP 5736888 U JP5736888 U JP 5736888U JP 2544058 Y2 JP2544058 Y2 JP 2544058Y2
Authority
JP
Japan
Prior art keywords
vacuum pressure
pressure circuit
circuit
vacuum
suction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988057368U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01162645U (en, 2012
Inventor
嘉宏 正野
秀次 藤谷
Original Assignee
エスエムシー 株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by エスエムシー 株式会社 filed Critical エスエムシー 株式会社
Priority to JP1988057368U priority Critical patent/JP2544058Y2/ja
Publication of JPH01162645U publication Critical patent/JPH01162645U/ja
Application granted granted Critical
Publication of JP2544058Y2 publication Critical patent/JP2544058Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Examining Or Testing Airtightness (AREA)
JP1988057368U 1988-04-28 1988-04-28 真空圧回路の漏洩検出装置 Expired - Lifetime JP2544058Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988057368U JP2544058Y2 (ja) 1988-04-28 1988-04-28 真空圧回路の漏洩検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988057368U JP2544058Y2 (ja) 1988-04-28 1988-04-28 真空圧回路の漏洩検出装置

Publications (2)

Publication Number Publication Date
JPH01162645U JPH01162645U (en, 2012) 1989-11-13
JP2544058Y2 true JP2544058Y2 (ja) 1997-08-13

Family

ID=31283227

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988057368U Expired - Lifetime JP2544058Y2 (ja) 1988-04-28 1988-04-28 真空圧回路の漏洩検出装置

Country Status (1)

Country Link
JP (1) JP2544058Y2 (en, 2012)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52129257U (en, 2012) * 1976-03-02 1977-10-01
JPS5910598Y2 (ja) * 1976-11-17 1984-04-03 旭産業株式会社 負圧測定装置
JPS61132379U (en, 2012) * 1985-02-06 1986-08-18
JPS6225319U (en, 2012) * 1985-07-31 1987-02-16
JPS62197731A (ja) * 1986-02-25 1987-09-01 Fuji Electric Co Ltd 半導体圧力センサ

Also Published As

Publication number Publication date
JPH01162645U (en, 2012) 1989-11-13

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