JP2533633Y2 - Ａｔカット水晶振動子 - Google Patents
Ａｔカット水晶振動子Info
- Publication number
- JP2533633Y2 JP2533633Y2 JP1987032833U JP3283387U JP2533633Y2 JP 2533633 Y2 JP2533633 Y2 JP 2533633Y2 JP 1987032833 U JP1987032833 U JP 1987032833U JP 3283387 U JP3283387 U JP 3283387U JP 2533633 Y2 JP2533633 Y2 JP 2533633Y2
- Authority
- JP
- Japan
- Prior art keywords
- crystal
- frequency
- view
- thickness
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000013078 crystal Substances 0.000 title claims description 35
- 150000002500 ions Chemical class 0.000 claims description 10
- 239000011261 inert gas Substances 0.000 claims description 7
- 239000010453 quartz Substances 0.000 claims description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- 238000007740 vapor deposition Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 238000000605 extraction Methods 0.000 description 4
- 238000000992 sputter etching Methods 0.000 description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical group [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987032833U JP2533633Y2 (ja) | 1987-03-06 | 1987-03-06 | Ａｔカット水晶振動子 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987032833U JP2533633Y2 (ja) | 1987-03-06 | 1987-03-06 | Ａｔカット水晶振動子 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63140719U JPS63140719U (enExample) | 1988-09-16 |
| JP2533633Y2 true JP2533633Y2 (ja) | 1997-04-23 |
Family
ID=30839882
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987032833U Expired - Lifetime JP2533633Y2 (ja) | 1987-03-06 | 1987-03-06 | Ａｔカット水晶振動子 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2533633Y2 (enExample) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07120914B2 (ja) * | 1989-03-07 | 1995-12-20 | ミヨタ株式会社 | 音叉型圧電振動子の周波数調整方法 |
| JP3157433B2 (ja) * | 1994-09-30 | 2001-04-16 | トッキ株式会社 | 周波数調整装置 |
| JP3823647B2 (ja) * | 1999-12-15 | 2006-09-20 | セイコーエプソン株式会社 | 圧電振動子と圧電振動片の周波数調整方法及び周波数調整用の加工装置 |
| JP2006020020A (ja) * | 2004-07-01 | 2006-01-19 | Nippon Dempa Kogyo Co Ltd | 水晶振動子 |
| JP5088613B2 (ja) * | 2007-08-06 | 2012-12-05 | セイコーエプソン株式会社 | 振動デバイスの周波数調整方法、並びに振動デバイスおよび電子デバイス |
| JP5495080B2 (ja) * | 2012-09-14 | 2014-05-21 | セイコーエプソン株式会社 | 振動デバイスの周波数調整方法、並びに振動デバイス、および電子デバイス |
| JP5591977B2 (ja) * | 2013-04-30 | 2014-09-17 | 太陽誘電株式会社 | 圧電薄膜共振器、フィルタ、デュープレクサ、通信モジュール、および通信装置 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5145430A (en) * | 1974-10-16 | 1976-04-17 | Nittetsu Kinzoku Kogyo Kk | Entosairo niokeru hotsupaakumitatesetsuchiho |
| JPS5824966B2 (ja) * | 1975-07-25 | 1983-05-24 | セイコーインスツルメンツ株式会社 | Ａｔカツト水晶振動子 |
| JPS5849043B2 (ja) * | 1976-03-03 | 1983-11-01 | 株式会社精工舎 | 水晶振動子の周波数微調整方法 |
| JPS52125292A (en) * | 1976-04-14 | 1977-10-20 | Matsushima Kogyo Kk | Method of adjusting frequency |
| JPS5386187A (en) * | 1976-12-17 | 1978-07-29 | Citizen Watch Co Ltd | Production of crystal vibrator for wristwatch |
| JPS53116094A (en) * | 1977-03-19 | 1978-10-11 | Toshiba Corp | Trimming method for elastic surface wave element |
| JPS53131794A (en) * | 1977-04-22 | 1978-11-16 | Citizen Watch Co Ltd | Electrode forming method of tuning fork type crystal vibrator |
| JPS5448190A (en) * | 1977-09-22 | 1979-04-16 | Matsushima Kogyo Kk | Method of regulating frequency |
| JPS54156455A (en) * | 1978-05-31 | 1979-12-10 | Toshiba Corp | Surface acoustic wave element and its trimming method |
| JPS5685915A (en) * | 1979-12-14 | 1981-07-13 | Fujitsu Ltd | Frequency adjusting method of thickness slip quartz oscillator |
-
1987
- 1987-03-06 JP JP1987032833U patent/JP2533633Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63140719U (enExample) | 1988-09-16 |
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