JP2523463Y2 - 真空成膜装置の基板保持機構 - Google Patents

真空成膜装置の基板保持機構

Info

Publication number
JP2523463Y2
JP2523463Y2 JP1990048929U JP4892990U JP2523463Y2 JP 2523463 Y2 JP2523463 Y2 JP 2523463Y2 JP 1990048929 U JP1990048929 U JP 1990048929U JP 4892990 U JP4892990 U JP 4892990U JP 2523463 Y2 JP2523463 Y2 JP 2523463Y2
Authority
JP
Japan
Prior art keywords
substrate
film forming
substrate holder
vacuum film
cart
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1990048929U
Other languages
English (en)
Japanese (ja)
Other versions
JPH047654U (enrdf_load_html_response
Inventor
博 高宮
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP1990048929U priority Critical patent/JP2523463Y2/ja
Publication of JPH047654U publication Critical patent/JPH047654U/ja
Application granted granted Critical
Publication of JP2523463Y2 publication Critical patent/JP2523463Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)
  • Physical Vapour Deposition (AREA)
JP1990048929U 1990-05-09 1990-05-09 真空成膜装置の基板保持機構 Expired - Lifetime JP2523463Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990048929U JP2523463Y2 (ja) 1990-05-09 1990-05-09 真空成膜装置の基板保持機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990048929U JP2523463Y2 (ja) 1990-05-09 1990-05-09 真空成膜装置の基板保持機構

Publications (2)

Publication Number Publication Date
JPH047654U JPH047654U (enrdf_load_html_response) 1992-01-23
JP2523463Y2 true JP2523463Y2 (ja) 1997-01-22

Family

ID=31566177

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990048929U Expired - Lifetime JP2523463Y2 (ja) 1990-05-09 1990-05-09 真空成膜装置の基板保持機構

Country Status (1)

Country Link
JP (1) JP2523463Y2 (enrdf_load_html_response)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0774451B2 (ja) * 1986-11-29 1995-08-09 京セラ株式会社 成膜装置

Also Published As

Publication number Publication date
JPH047654U (enrdf_load_html_response) 1992-01-23

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term