JP2511205Y2 - バ―ンイン処理装置 - Google Patents

バ―ンイン処理装置

Info

Publication number
JP2511205Y2
JP2511205Y2 JP1989070687U JP7068789U JP2511205Y2 JP 2511205 Y2 JP2511205 Y2 JP 2511205Y2 JP 1989070687 U JP1989070687 U JP 1989070687U JP 7068789 U JP7068789 U JP 7068789U JP 2511205 Y2 JP2511205 Y2 JP 2511205Y2
Authority
JP
Japan
Prior art keywords
flap
temperature
opening
burn
constant temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989070687U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0310272U (en, 2012
Inventor
光郎 小林
全克 森谷
Original Assignee
株式会社藤田製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社藤田製作所 filed Critical 株式会社藤田製作所
Priority to JP1989070687U priority Critical patent/JP2511205Y2/ja
Publication of JPH0310272U publication Critical patent/JPH0310272U/ja
Application granted granted Critical
Publication of JP2511205Y2 publication Critical patent/JP2511205Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Tests Of Electronic Circuits (AREA)
JP1989070687U 1989-06-16 1989-06-16 バ―ンイン処理装置 Expired - Lifetime JP2511205Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989070687U JP2511205Y2 (ja) 1989-06-16 1989-06-16 バ―ンイン処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989070687U JP2511205Y2 (ja) 1989-06-16 1989-06-16 バ―ンイン処理装置

Publications (2)

Publication Number Publication Date
JPH0310272U JPH0310272U (en, 2012) 1991-01-31
JP2511205Y2 true JP2511205Y2 (ja) 1996-09-25

Family

ID=31607055

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989070687U Expired - Lifetime JP2511205Y2 (ja) 1989-06-16 1989-06-16 バ―ンイン処理装置

Country Status (1)

Country Link
JP (1) JP2511205Y2 (en, 2012)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3513639B2 (ja) * 1997-03-28 2004-03-31 光洋サーモシステム株式会社 半導体熱処理装置およびこれを用いた半導体基板の昇降温方法
JP2005121625A (ja) * 2003-09-24 2005-05-12 Sharp Corp バーンイン装置
WO2008032397A1 (fr) * 2006-09-15 2008-03-20 Advantest Corporation Appareil de test de composant électronique
JP5699108B2 (ja) * 2012-04-27 2015-04-08 エスペック株式会社 環境試験装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5759256A (en) * 1980-09-26 1982-04-09 Fujitsu Ltd Temperature test system
US4515466A (en) * 1982-05-27 1985-05-07 Xerox Corporation Sheet delivery station for copying apparatus
JPS59145949A (ja) * 1983-02-09 1984-08-21 Nippon Saamic:Kk 広域温湿度雰囲気試験装置
JPS619853U (ja) * 1984-06-21 1986-01-21 株式会社 藤田製作所 バ−ンイン処理装置
JPH0127106Y2 (en, 2012) * 1984-09-20 1989-08-14
JPH0668537B2 (ja) * 1986-01-22 1994-08-31 株式会社藤田製作所 バ−ンイン処理装置

Also Published As

Publication number Publication date
JPH0310272U (en, 2012) 1991-01-31

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