JP2509227Y2 - ア―ム旋回式基板搬送装置 - Google Patents

ア―ム旋回式基板搬送装置

Info

Publication number
JP2509227Y2
JP2509227Y2 JP1990061223U JP6122390U JP2509227Y2 JP 2509227 Y2 JP2509227 Y2 JP 2509227Y2 JP 1990061223 U JP1990061223 U JP 1990061223U JP 6122390 U JP6122390 U JP 6122390U JP 2509227 Y2 JP2509227 Y2 JP 2509227Y2
Authority
JP
Japan
Prior art keywords
arm
shaft
spline
fixed
cylinder shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1990061223U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0420240U (enExample
Inventor
信行 平井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Priority to JP1990061223U priority Critical patent/JP2509227Y2/ja
Publication of JPH0420240U publication Critical patent/JPH0420240U/ja
Application granted granted Critical
Publication of JP2509227Y2 publication Critical patent/JP2509227Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1990061223U 1990-06-08 1990-06-08 ア―ム旋回式基板搬送装置 Expired - Lifetime JP2509227Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990061223U JP2509227Y2 (ja) 1990-06-08 1990-06-08 ア―ム旋回式基板搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990061223U JP2509227Y2 (ja) 1990-06-08 1990-06-08 ア―ム旋回式基板搬送装置

Publications (2)

Publication Number Publication Date
JPH0420240U JPH0420240U (enExample) 1992-02-20
JP2509227Y2 true JP2509227Y2 (ja) 1996-08-28

Family

ID=31589286

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990061223U Expired - Lifetime JP2509227Y2 (ja) 1990-06-08 1990-06-08 ア―ム旋回式基板搬送装置

Country Status (1)

Country Link
JP (1) JP2509227Y2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000042953A (ja) * 1998-07-29 2000-02-15 Janome Sewing Mach Co Ltd 水平多関節ロボット
FR2900591B1 (fr) * 2006-05-02 2008-06-20 Staubli Faverges Sca Structure de robot de type scara, et robot correspondant

Also Published As

Publication number Publication date
JPH0420240U (enExample) 1992-02-20

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