JP2501798Y2 - 低温処理装置 - Google Patents

低温処理装置

Info

Publication number
JP2501798Y2
JP2501798Y2 JP11197589U JP11197589U JP2501798Y2 JP 2501798 Y2 JP2501798 Y2 JP 2501798Y2 JP 11197589 U JP11197589 U JP 11197589U JP 11197589 U JP11197589 U JP 11197589U JP 2501798 Y2 JP2501798 Y2 JP 2501798Y2
Authority
JP
Japan
Prior art keywords
substrate
processed
low temperature
temperature
mounting tray
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP11197589U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0350335U (enExample
Inventor
淳一 佐藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP11197589U priority Critical patent/JP2501798Y2/ja
Publication of JPH0350335U publication Critical patent/JPH0350335U/ja
Application granted granted Critical
Publication of JP2501798Y2 publication Critical patent/JP2501798Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP11197589U 1989-09-25 1989-09-25 低温処理装置 Expired - Fee Related JP2501798Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11197589U JP2501798Y2 (ja) 1989-09-25 1989-09-25 低温処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11197589U JP2501798Y2 (ja) 1989-09-25 1989-09-25 低温処理装置

Publications (2)

Publication Number Publication Date
JPH0350335U JPH0350335U (enExample) 1991-05-16
JP2501798Y2 true JP2501798Y2 (ja) 1996-06-19

Family

ID=31660432

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11197589U Expired - Fee Related JP2501798Y2 (ja) 1989-09-25 1989-09-25 低温処理装置

Country Status (1)

Country Link
JP (1) JP2501798Y2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5945050B1 (ja) * 2015-03-24 2016-07-05 株式会社アックスヤマザキ 複数枚の布の縫合及びその縫合用ミシン

Also Published As

Publication number Publication date
JPH0350335U (enExample) 1991-05-16

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