JP2501329Y2 - ウェ―ハ搬送ロボット - Google Patents

ウェ―ハ搬送ロボット

Info

Publication number
JP2501329Y2
JP2501329Y2 JP1990046145U JP4614590U JP2501329Y2 JP 2501329 Y2 JP2501329 Y2 JP 2501329Y2 JP 1990046145 U JP1990046145 U JP 1990046145U JP 4614590 U JP4614590 U JP 4614590U JP 2501329 Y2 JP2501329 Y2 JP 2501329Y2
Authority
JP
Japan
Prior art keywords
wafer
sensor
transfer robot
mounting stage
wafer transfer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1990046145U
Other languages
English (en)
Japanese (ja)
Other versions
JPH045393U (cs
Inventor
博文 戸田
Original Assignee
関西日本電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 関西日本電気株式会社 filed Critical 関西日本電気株式会社
Priority to JP1990046145U priority Critical patent/JP2501329Y2/ja
Publication of JPH045393U publication Critical patent/JPH045393U/ja
Application granted granted Critical
Publication of JP2501329Y2 publication Critical patent/JP2501329Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP1990046145U 1990-04-26 1990-04-26 ウェ―ハ搬送ロボット Expired - Fee Related JP2501329Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990046145U JP2501329Y2 (ja) 1990-04-26 1990-04-26 ウェ―ハ搬送ロボット

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990046145U JP2501329Y2 (ja) 1990-04-26 1990-04-26 ウェ―ハ搬送ロボット

Publications (2)

Publication Number Publication Date
JPH045393U JPH045393U (cs) 1992-01-17
JP2501329Y2 true JP2501329Y2 (ja) 1996-06-19

Family

ID=31560966

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990046145U Expired - Fee Related JP2501329Y2 (ja) 1990-04-26 1990-04-26 ウェ―ハ搬送ロボット

Country Status (1)

Country Link
JP (1) JP2501329Y2 (cs)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60153788U (ja) * 1984-03-21 1985-10-14 シャープ株式会社 位置検知センサ付ロボツトハンド

Also Published As

Publication number Publication date
JPH045393U (cs) 1992-01-17

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