JP2024507177A5 - - Google Patents
Info
- Publication number
- JP2024507177A5 JP2024507177A5 JP2023548886A JP2023548886A JP2024507177A5 JP 2024507177 A5 JP2024507177 A5 JP 2024507177A5 JP 2023548886 A JP2023548886 A JP 2023548886A JP 2023548886 A JP2023548886 A JP 2023548886A JP 2024507177 A5 JP2024507177 A5 JP 2024507177A5
- Authority
- JP
- Japan
- Prior art keywords
- precursor according
- following formula
- precursor
- alkyl group
- group
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US202163149524P | 2021-02-15 | 2021-02-15 | |
| US63/149,524 | 2021-02-15 | ||
| PCT/US2022/016044 WO2022173999A1 (en) | 2021-02-15 | 2022-02-11 | Group 6 amidinate paddlewheel compounds for deposition of metal containing thin films |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2024507177A JP2024507177A (ja) | 2024-02-16 |
| JP2024507177A5 true JP2024507177A5 (https=) | 2024-10-17 |
Family
ID=80461102
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023548886A Pending JP2024507177A (ja) | 2021-02-15 | 2022-02-11 | 金属含有薄膜を堆積するための第６族アミジネートパドルホイール型化合物 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20240166676A1 (https=) |
| JP (1) | JP2024507177A (https=) |
| KR (1) | KR20230144628A (https=) |
| CN (1) | CN116917536A (https=) |
| WO (1) | WO2022173999A1 (https=) |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101121734A (zh) * | 2006-07-31 | 2008-02-13 | 罗门哈斯电子材料有限公司 | 有机金属化合物 |
| US8471049B2 (en) * | 2008-12-10 | 2013-06-25 | Air Product And Chemicals, Inc. | Precursors for depositing group 4 metal-containing films |
| US20110256314A1 (en) * | 2009-10-23 | 2011-10-20 | Air Products And Chemicals, Inc. | Methods for deposition of group 4 metal containing films |
| EP3046926A1 (en) * | 2013-09-19 | 2016-07-27 | Arizona Board of Regents for the University of Arizona | Compounds having low ionization energy |
| WO2020185618A1 (en) * | 2019-03-11 | 2020-09-17 | Lam Research Corporation | Precursors for deposition of molybdenum-containing films |
-
2022
- 2022-02-11 KR KR1020237031181A patent/KR20230144628A/ko active Pending
- 2022-02-11 US US18/263,011 patent/US20240166676A1/en not_active Abandoned
- 2022-02-11 CN CN202280014771.9A patent/CN116917536A/zh active Pending
- 2022-02-11 WO PCT/US2022/016044 patent/WO2022173999A1/en not_active Ceased
- 2022-02-11 JP JP2023548886A patent/JP2024507177A/ja active Pending
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