JP2025510329A5 - - Google Patents
Info
- Publication number
- JP2025510329A5 JP2025510329A5 JP2024557545A JP2024557545A JP2025510329A5 JP 2025510329 A5 JP2025510329 A5 JP 2025510329A5 JP 2024557545 A JP2024557545 A JP 2024557545A JP 2024557545 A JP2024557545 A JP 2024557545A JP 2025510329 A5 JP2025510329 A5 JP 2025510329A5
- Authority
- JP
- Japan
- Prior art keywords
- compound according
- compound
- independently
- formula
- reaction vessel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US202263362012P | 2022-03-28 | 2022-03-28 | |
| US63/362,012 | 2022-03-28 | ||
| PCT/US2023/016176 WO2023192111A1 (en) | 2022-03-28 | 2023-03-24 | Metal carbonyl complexes with phosphorus-based ligands for cvd and ald applications |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2025510329A JP2025510329A (ja) | 2025-04-14 |
| JP2025510329A5 true JP2025510329A5 (https=) | 2025-12-08 |
Family
ID=86185271
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024557545A Pending JP2025510329A (ja) | 2022-03-28 | 2023-03-24 | Ｃｖｄ及びａｌｄに使用するためのリンベース配位子を有する金属カルボニル錯体 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20250092074A1 (https=) |
| JP (1) | JP2025510329A (https=) |
| KR (1) | KR20240167067A (https=) |
| CN (1) | CN118786132A (https=) |
| TW (1) | TW202402774A (https=) |
| WO (1) | WO2023192111A1 (https=) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2001066816A1 (en) * | 2000-03-03 | 2001-09-13 | President And Fellows Of Harvard College | Liquid sources for cvd of group 6 metals and metal compounds |
| US6969539B2 (en) * | 2000-09-28 | 2005-11-29 | President And Fellows Of Harvard College | Vapor deposition of metal oxides, silicates and phosphates, and silicon dioxide |
-
2023
- 2023-03-24 US US18/729,645 patent/US20250092074A1/en active Pending
- 2023-03-24 CN CN202380024254.4A patent/CN118786132A/zh active Pending
- 2023-03-24 TW TW112111130A patent/TW202402774A/zh unknown
- 2023-03-24 WO PCT/US2023/016176 patent/WO2023192111A1/en not_active Ceased
- 2023-03-24 KR KR1020247035998A patent/KR20240167067A/ko active Pending
- 2023-03-24 JP JP2024557545A patent/JP2025510329A/ja active Pending
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