JP2024145782A5 - - Google Patents
Info
- Publication number
- JP2024145782A5 JP2024145782A5 JP2023058279A JP2023058279A JP2024145782A5 JP 2024145782 A5 JP2024145782 A5 JP 2024145782A5 JP 2023058279 A JP2023058279 A JP 2023058279A JP 2023058279 A JP2023058279 A JP 2023058279A JP 2024145782 A5 JP2024145782 A5 JP 2024145782A5
- Authority
- JP
- Japan
- Prior art keywords
- oxide semiconductor
- semiconductor device
- semiconductor layer
- region
- less
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2023058279A JP2024145782A (ja) | 2023-03-31 | 2023-03-31 | 半導体装置及びその製造方法 |
| DE102024202034.6A DE102024202034A1 (de) | 2023-03-31 | 2024-03-05 | Halbleitervorrichtung und verfahren zu ihrer herstellung |
| US18/597,186 US20240332308A1 (en) | 2023-03-31 | 2024-03-06 | Semiconductor device and manufacturing method thereof |
| TW113108273A TW202441796A (zh) | 2023-03-31 | 2024-03-07 | 半導體裝置及其製造方法 |
| KR1020240036232A KR102947071B1 (ko) | 2023-03-31 | 2024-03-15 | 반도체 장치 및 그 제조 방법 |
| CN202410316931.6A CN118738137A (zh) | 2023-03-31 | 2024-03-19 | 半导体装置及其制造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2023058279A JP2024145782A (ja) | 2023-03-31 | 2023-03-31 | 半導体装置及びその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2024145782A JP2024145782A (ja) | 2024-10-15 |
| JP2024145782A5 true JP2024145782A5 (https=) | 2026-03-19 |
Family
ID=92712789
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023058279A Pending JP2024145782A (ja) | 2023-03-31 | 2023-03-31 | 半導体装置及びその製造方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20240332308A1 (https=) |
| JP (1) | JP2024145782A (https=) |
| KR (1) | KR102947071B1 (https=) |
| CN (1) | CN118738137A (https=) |
| DE (1) | DE102024202034A1 (https=) |
| TW (1) | TW202441796A (https=) |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8871565B2 (en) | 2010-09-13 | 2014-10-28 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
| SG11201505225TA (en) | 2012-08-03 | 2015-08-28 | Semiconductor Energy Lab | Oxide semiconductor stacked film and semiconductor device |
| TWI761605B (zh) | 2012-09-14 | 2022-04-21 | 日商半導體能源研究所股份有限公司 | 半導體裝置及其製造方法 |
| KR102220279B1 (ko) | 2012-10-19 | 2021-02-24 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 산화물 반도체막을 포함하는 다층막 및 반도체 장치의 제작 방법 |
| US9425217B2 (en) | 2013-09-23 | 2016-08-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
| JP2015119175A (ja) * | 2013-11-15 | 2015-06-25 | 株式会社半導体エネルギー研究所 | 半導体装置及び表示装置 |
| WO2017137869A1 (en) | 2016-02-12 | 2017-08-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device including the semiconductor device |
-
2023
- 2023-03-31 JP JP2023058279A patent/JP2024145782A/ja active Pending
-
2024
- 2024-03-05 DE DE102024202034.6A patent/DE102024202034A1/de active Pending
- 2024-03-06 US US18/597,186 patent/US20240332308A1/en active Pending
- 2024-03-07 TW TW113108273A patent/TW202441796A/zh unknown
- 2024-03-15 KR KR1020240036232A patent/KR102947071B1/ko active Active
- 2024-03-19 CN CN202410316931.6A patent/CN118738137A/zh active Pending
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