JP2024145744A5 - - Google Patents

Info

Publication number
JP2024145744A5
JP2024145744A5 JP2023058228A JP2023058228A JP2024145744A5 JP 2024145744 A5 JP2024145744 A5 JP 2024145744A5 JP 2023058228 A JP2023058228 A JP 2023058228A JP 2023058228 A JP2023058228 A JP 2023058228A JP 2024145744 A5 JP2024145744 A5 JP 2024145744A5
Authority
JP
Japan
Prior art keywords
semiconductor device
oxide semiconductor
semiconductor layer
less
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2023058228A
Other languages
English (en)
Japanese (ja)
Other versions
JP2024145744A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2023058228A priority Critical patent/JP2024145744A/ja
Priority claimed from JP2023058228A external-priority patent/JP2024145744A/ja
Priority to DE102024202026.5A priority patent/DE102024202026A1/de
Priority to TW113108275A priority patent/TWI915754B/zh
Priority to US18/604,840 priority patent/US20240332427A1/en
Priority to KR1020240035649A priority patent/KR102947069B1/ko
Priority to CN202410326788.9A priority patent/CN118738138A/zh
Publication of JP2024145744A publication Critical patent/JP2024145744A/ja
Publication of JP2024145744A5 publication Critical patent/JP2024145744A5/ja
Pending legal-status Critical Current

Links

JP2023058228A 2023-03-31 2023-03-31 半導体装置及び半導体装置の作製方法 Pending JP2024145744A (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2023058228A JP2024145744A (ja) 2023-03-31 2023-03-31 半導体装置及び半導体装置の作製方法
DE102024202026.5A DE102024202026A1 (de) 2023-03-31 2024-03-05 Halbleitervorrichtung und verfahren zum herstellen einer halbleitervorrichtung
TW113108275A TWI915754B (zh) 2023-03-31 2024-03-07 半導體裝置及半導體裝置之製作方法
US18/604,840 US20240332427A1 (en) 2023-03-31 2024-03-14 Semiconductor device and method of manufacturing semiconductor device
KR1020240035649A KR102947069B1 (ko) 2023-03-31 2024-03-14 반도체 장치 및 반도체 장치의 제작 방법
CN202410326788.9A CN118738138A (zh) 2023-03-31 2024-03-21 半导体装置及半导体装置的制造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2023058228A JP2024145744A (ja) 2023-03-31 2023-03-31 半導体装置及び半導体装置の作製方法

Publications (2)

Publication Number Publication Date
JP2024145744A JP2024145744A (ja) 2024-10-15
JP2024145744A5 true JP2024145744A5 (https=) 2026-04-06

Family

ID=92712874

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023058228A Pending JP2024145744A (ja) 2023-03-31 2023-03-31 半導体装置及び半導体装置の作製方法

Country Status (5)

Country Link
US (1) US20240332427A1 (https=)
JP (1) JP2024145744A (https=)
KR (1) KR102947069B1 (https=)
CN (1) CN118738138A (https=)
DE (1) DE102024202026A1 (https=)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8871565B2 (en) 2010-09-13 2014-10-28 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor device
SG11201505225TA (en) 2012-08-03 2015-08-28 Semiconductor Energy Lab Oxide semiconductor stacked film and semiconductor device
TWI761605B (zh) 2012-09-14 2022-04-21 日商半導體能源研究所股份有限公司 半導體裝置及其製造方法
KR102220279B1 (ko) 2012-10-19 2021-02-24 가부시키가이샤 한도오따이 에네루기 켄큐쇼 산화물 반도체막을 포함하는 다층막 및 반도체 장치의 제작 방법
US9425217B2 (en) 2013-09-23 2016-08-23 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
WO2017137869A1 (en) 2016-02-12 2017-08-17 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and display device including the semiconductor device

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