JP2024066860A5 - - Google Patents
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- Publication number
- JP2024066860A5 JP2024066860A5 JP2022176618A JP2022176618A JP2024066860A5 JP 2024066860 A5 JP2024066860 A5 JP 2024066860A5 JP 2022176618 A JP2022176618 A JP 2022176618A JP 2022176618 A JP2022176618 A JP 2022176618A JP 2024066860 A5 JP2024066860 A5 JP 2024066860A5
- Authority
- JP
- Japan
- Prior art keywords
- layer
- trench
- region
- base layer
- contact
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010410 layer Substances 0.000 claims description 44
- 239000004065 semiconductor Substances 0.000 claims description 17
- 239000012535 impurity Substances 0.000 claims description 15
- 230000002093 peripheral effect Effects 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 7
- 239000011229 interlayer Substances 0.000 claims description 2
- 230000000149 penetrating effect Effects 0.000 claims description 2
- 239000002344 surface layer Substances 0.000 claims description 2
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022176618A JP2024066860A (ja) | 2022-11-02 | 2022-11-02 | 縦型半導体装置 |
| CN202380076082.5A CN120240003A (zh) | 2022-11-02 | 2023-11-01 | 纵型半导体装置 |
| PCT/JP2023/039460 WO2024096070A1 (ja) | 2022-11-02 | 2023-11-01 | 縦型半導体装置 |
| US19/192,895 US20250261439A1 (en) | 2022-11-02 | 2025-04-29 | Vertical semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022176618A JP2024066860A (ja) | 2022-11-02 | 2022-11-02 | 縦型半導体装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2024066860A JP2024066860A (ja) | 2024-05-16 |
| JP2024066860A5 true JP2024066860A5 (enExample) | 2025-01-09 |
Family
ID=90930659
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022176618A Pending JP2024066860A (ja) | 2022-11-02 | 2022-11-02 | 縦型半導体装置 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US20250261439A1 (enExample) |
| JP (1) | JP2024066860A (enExample) |
| CN (1) | CN120240003A (enExample) |
| WO (1) | WO2024096070A1 (enExample) |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7028093B2 (ja) * | 2017-11-08 | 2022-03-02 | 富士電機株式会社 | 半導体装置 |
| JP7085975B2 (ja) * | 2018-12-17 | 2022-06-17 | 三菱電機株式会社 | 半導体装置 |
| JP7392613B2 (ja) * | 2020-08-26 | 2023-12-06 | 株式会社デンソー | 半導体装置 |
-
2022
- 2022-11-02 JP JP2022176618A patent/JP2024066860A/ja active Pending
-
2023
- 2023-11-01 WO PCT/JP2023/039460 patent/WO2024096070A1/ja not_active Ceased
- 2023-11-01 CN CN202380076082.5A patent/CN120240003A/zh active Pending
-
2025
- 2025-04-29 US US19/192,895 patent/US20250261439A1/en active Pending
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