JP2024063338A5 - - Google Patents

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Publication number
JP2024063338A5
JP2024063338A5 JP2022171186A JP2022171186A JP2024063338A5 JP 2024063338 A5 JP2024063338 A5 JP 2024063338A5 JP 2022171186 A JP2022171186 A JP 2022171186A JP 2022171186 A JP2022171186 A JP 2022171186A JP 2024063338 A5 JP2024063338 A5 JP 2024063338A5
Authority
JP
Japan
Prior art keywords
evaporation source
film forming
chamber
moving
forming material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2022171186A
Other languages
English (en)
Japanese (ja)
Other versions
JP2024063338A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2022171186A priority Critical patent/JP2024063338A/ja
Priority claimed from JP2022171186A external-priority patent/JP2024063338A/ja
Priority to CN202380074655.0A priority patent/CN120092102A/zh
Priority to KR1020257015448A priority patent/KR20250086741A/ko
Priority to PCT/JP2023/036492 priority patent/WO2024090178A1/ja
Publication of JP2024063338A publication Critical patent/JP2024063338A/ja
Publication of JP2024063338A5 publication Critical patent/JP2024063338A5/ja
Pending legal-status Critical Current

Links

JP2022171186A 2022-10-26 2022-10-26 蒸発源、成膜装置、及び成膜方法 Pending JP2024063338A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2022171186A JP2024063338A (ja) 2022-10-26 2022-10-26 蒸発源、成膜装置、及び成膜方法
CN202380074655.0A CN120092102A (zh) 2022-10-26 2023-10-06 蒸发源、成膜装置、以及成膜方法
KR1020257015448A KR20250086741A (ko) 2022-10-26 2023-10-06 증발원, 성막 장치, 및 성막 방법
PCT/JP2023/036492 WO2024090178A1 (ja) 2022-10-26 2023-10-06 蒸発源、成膜装置、及び成膜方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2022171186A JP2024063338A (ja) 2022-10-26 2022-10-26 蒸発源、成膜装置、及び成膜方法

Publications (2)

Publication Number Publication Date
JP2024063338A JP2024063338A (ja) 2024-05-13
JP2024063338A5 true JP2024063338A5 (enExample) 2025-10-23

Family

ID=90830627

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022171186A Pending JP2024063338A (ja) 2022-10-26 2022-10-26 蒸発源、成膜装置、及び成膜方法

Country Status (4)

Country Link
JP (1) JP2024063338A (enExample)
KR (1) KR20250086741A (enExample)
CN (1) CN120092102A (enExample)
WO (1) WO2024090178A1 (enExample)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6526880B1 (ja) * 2018-06-29 2019-06-05 キヤノントッキ株式会社 蒸発源及び蒸着装置
JP2022107982A (ja) * 2021-01-12 2022-07-25 キヤノントッキ株式会社 蒸発源装置、成膜装置、成膜方法及び電子デバイスの製造方法
CN216514090U (zh) * 2021-12-20 2022-05-13 乐金显示光电科技(中国)有限公司 能提高热量利用率的蒸镀装置

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