JP2024046686A5 - - Google Patents

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Publication number
JP2024046686A5
JP2024046686A5 JP2024022793A JP2024022793A JP2024046686A5 JP 2024046686 A5 JP2024046686 A5 JP 2024046686A5 JP 2024022793 A JP2024022793 A JP 2024022793A JP 2024022793 A JP2024022793 A JP 2024022793A JP 2024046686 A5 JP2024046686 A5 JP 2024046686A5
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JP
Japan
Prior art keywords
holding device
joint
plate
thermal resistance
base portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2024022793A
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English (en)
Japanese (ja)
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JP2024046686A (ja
JP7656109B2 (ja
Filing date
Publication date
Priority claimed from JP2022095406A external-priority patent/JP7578642B2/ja
Application filed filed Critical
Priority to JP2024022793A priority Critical patent/JP7656109B2/ja
Publication of JP2024046686A publication Critical patent/JP2024046686A/ja
Publication of JP2024046686A5 publication Critical patent/JP2024046686A5/ja
Priority to JP2025046321A priority patent/JP2025094146A/ja
Application granted granted Critical
Publication of JP7656109B2 publication Critical patent/JP7656109B2/ja
Active legal-status Critical Current
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JP2024022793A 2022-06-14 2024-02-19 保持装置 Active JP7656109B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2024022793A JP7656109B2 (ja) 2022-06-14 2024-02-19 保持装置
JP2025046321A JP2025094146A (ja) 2022-06-14 2025-03-21 保持装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022095406A JP7578642B2 (ja) 2022-06-14 2022-06-14 保持装置
JP2024022793A JP7656109B2 (ja) 2022-06-14 2024-02-19 保持装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2022095406A Division JP7578642B2 (ja) 2022-06-14 2022-06-14 保持装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2025046321A Division JP2025094146A (ja) 2022-06-14 2025-03-21 保持装置

Publications (3)

Publication Number Publication Date
JP2024046686A JP2024046686A (ja) 2024-04-03
JP2024046686A5 true JP2024046686A5 (enExample) 2024-07-24
JP7656109B2 JP7656109B2 (ja) 2025-04-02

Family

ID=89310161

Family Applications (3)

Application Number Title Priority Date Filing Date
JP2022095406A Active JP7578642B2 (ja) 2022-06-14 2022-06-14 保持装置
JP2024022793A Active JP7656109B2 (ja) 2022-06-14 2024-02-19 保持装置
JP2025046321A Pending JP2025094146A (ja) 2022-06-14 2025-03-21 保持装置

Family Applications Before (1)

Application Number Title Priority Date Filing Date
JP2022095406A Active JP7578642B2 (ja) 2022-06-14 2022-06-14 保持装置

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2025046321A Pending JP2025094146A (ja) 2022-06-14 2025-03-21 保持装置

Country Status (1)

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JP (3) JP7578642B2 (enExample)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4727434B2 (ja) * 2006-01-18 2011-07-20 住友大阪セメント株式会社 静電チャック装置
JP5829509B2 (ja) * 2011-12-20 2015-12-09 東京エレクトロン株式会社 載置台及びプラズマ処理装置
JP6250949B2 (ja) * 2013-04-15 2017-12-20 日本特殊陶業株式会社 半導体製造装置用部品及びその製造方法
JP6886439B2 (ja) * 2018-08-07 2021-06-16 日本特殊陶業株式会社 複合部材および接着剤組成物
JP6859309B2 (ja) * 2018-10-22 2021-04-14 日本特殊陶業株式会社 保持装置
JP7108586B2 (ja) * 2019-08-16 2022-07-28 日本特殊陶業株式会社 保持装置
JP7441046B2 (ja) * 2020-01-10 2024-02-29 日本特殊陶業株式会社 保持装置

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