JP7578642B2 - 保持装置 - Google Patents

保持装置 Download PDF

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Publication number
JP7578642B2
JP7578642B2 JP2022095406A JP2022095406A JP7578642B2 JP 7578642 B2 JP7578642 B2 JP 7578642B2 JP 2022095406 A JP2022095406 A JP 2022095406A JP 2022095406 A JP2022095406 A JP 2022095406A JP 7578642 B2 JP7578642 B2 JP 7578642B2
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JP
Japan
Prior art keywords
joint
plate
thermal conductivity
holding device
shaped portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2022095406A
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English (en)
Japanese (ja)
Other versions
JP2023182033A (ja
Inventor
敦 鈴木
絵里 早川
雅 安藤
輝 稲吉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Niterra Co Ltd
Original Assignee
NGK Spark Plug Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Spark Plug Co Ltd filed Critical NGK Spark Plug Co Ltd
Priority to JP2022095406A priority Critical patent/JP7578642B2/ja
Publication of JP2023182033A publication Critical patent/JP2023182033A/ja
Priority to JP2024022793A priority patent/JP7656109B2/ja
Application granted granted Critical
Publication of JP7578642B2 publication Critical patent/JP7578642B2/ja
Priority to JP2025046321A priority patent/JP2025094146A/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Drying Of Semiconductors (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
  • Ceramic Products (AREA)
JP2022095406A 2022-06-14 2022-06-14 保持装置 Active JP7578642B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2022095406A JP7578642B2 (ja) 2022-06-14 2022-06-14 保持装置
JP2024022793A JP7656109B2 (ja) 2022-06-14 2024-02-19 保持装置
JP2025046321A JP2025094146A (ja) 2022-06-14 2025-03-21 保持装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2022095406A JP7578642B2 (ja) 2022-06-14 2022-06-14 保持装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2024022793A Division JP7656109B2 (ja) 2022-06-14 2024-02-19 保持装置

Publications (2)

Publication Number Publication Date
JP2023182033A JP2023182033A (ja) 2023-12-26
JP7578642B2 true JP7578642B2 (ja) 2024-11-06

Family

ID=89310161

Family Applications (3)

Application Number Title Priority Date Filing Date
JP2022095406A Active JP7578642B2 (ja) 2022-06-14 2022-06-14 保持装置
JP2024022793A Active JP7656109B2 (ja) 2022-06-14 2024-02-19 保持装置
JP2025046321A Pending JP2025094146A (ja) 2022-06-14 2025-03-21 保持装置

Family Applications After (2)

Application Number Title Priority Date Filing Date
JP2024022793A Active JP7656109B2 (ja) 2022-06-14 2024-02-19 保持装置
JP2025046321A Pending JP2025094146A (ja) 2022-06-14 2025-03-21 保持装置

Country Status (1)

Country Link
JP (3) JP7578642B2 (enExample)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007194320A (ja) 2006-01-18 2007-08-02 Sumitomo Osaka Cement Co Ltd 静電チャック装置
JP2013131541A (ja) 2011-12-20 2013-07-04 Tokyo Electron Ltd 載置台及びプラズマ処理装置
JP2020023088A (ja) 2018-08-07 2020-02-13 日本特殊陶業株式会社 複合部材および接着剤組成物
JP2021034413A (ja) 2019-08-16 2021-03-01 日本特殊陶業株式会社 保持装置
JP2021111688A (ja) 2020-01-10 2021-08-02 日本特殊陶業株式会社 保持装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6250949B2 (ja) * 2013-04-15 2017-12-20 日本特殊陶業株式会社 半導体製造装置用部品及びその製造方法
JP6859309B2 (ja) * 2018-10-22 2021-04-14 日本特殊陶業株式会社 保持装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007194320A (ja) 2006-01-18 2007-08-02 Sumitomo Osaka Cement Co Ltd 静電チャック装置
JP2013131541A (ja) 2011-12-20 2013-07-04 Tokyo Electron Ltd 載置台及びプラズマ処理装置
JP2020023088A (ja) 2018-08-07 2020-02-13 日本特殊陶業株式会社 複合部材および接着剤組成物
JP2021034413A (ja) 2019-08-16 2021-03-01 日本特殊陶業株式会社 保持装置
JP2021111688A (ja) 2020-01-10 2021-08-02 日本特殊陶業株式会社 保持装置

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
J.Hone,M.C.Llaguno,M.J.Biercuk,A.T.Johson,B.Batlogg,Z.Benes,J.E.Fischer，Thermal properties of carbon nanotubes and nanotube-based materials，Applied physics A，米国，2001年10月17日，74，339-343
五十嵐一郎，高分子系複合材料の熱伝導性制御，日本ゴム協会誌，第70巻第3号，日本，日本ゴム協会，1997年，115-122

Also Published As

Publication number Publication date
JP7656109B2 (ja) 2025-04-02
JP2025094146A (ja) 2025-06-24
JP2024046686A (ja) 2024-04-03
JP2023182033A (ja) 2023-12-26

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