JP2023540004A - 加熱バルブ多岐菅組立品を有するシステム、そのシステムの製造方法 - Google Patents

加熱バルブ多岐菅組立品を有するシステム、そのシステムの製造方法 Download PDF

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JP2023540004A
JP2023540004A JP2023506017A JP2023506017A JP2023540004A JP 2023540004 A JP2023540004 A JP 2023540004A JP 2023506017 A JP2023506017 A JP 2023506017A JP 2023506017 A JP2023506017 A JP 2023506017A JP 2023540004 A JP2023540004 A JP 2023540004A
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JP
Japan
Prior art keywords
thermally conductive
conductive plate
valve manifold
pipes
insulation
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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JP2023506017A
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English (en)
Japanese (ja)
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JPWO2022025950A5 (https=
JP2023540004A5 (https=
Inventor
デイビッド フォンタナ クリストファー
カール エシェルマン デイビッド
ファティマ ユスラ
ウィリアム ピルツ トーマス
セイデル メイソン
Original Assignee
バーサム マテリアルズ ユーエス，リミティド ライアビリティ カンパニー
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Application filed by バーサム マテリアルズ ユーエス，リミティド ライアビリティ カンパニー filed Critical バーサム マテリアルズ ユーエス，リミティド ライアビリティ カンパニー
Publication of JP2023540004A publication Critical patent/JP2023540004A/ja
Publication of JPWO2022025950A5 publication Critical patent/JPWO2022025950A5/ja
Publication of JP2023540004A5 publication Critical patent/JP2023540004A5/ja
Priority to JP2025150978A priority Critical patent/JP2025172963A/ja
Withdrawn legal-status Critical Current

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K49/00—Means in or on valves for heating or cooling
    • F16K49/002—Electric heating means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/003—Housing formed from a plurality of the same valve elements
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/20—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater
    • H05B3/22—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater non-flexible
    • H05B3/28—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material
    • H05B3/283—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material the insulating material being an inorganic material, e.g. ceramic
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/6851—With casing, support, protector or static constructional installations
    • Y10T137/7036—Jacketed

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Details Of Valves (AREA)
  • Branch Pipes, Bends, And The Like (AREA)
  • Pipe Accessories (AREA)
JP2023506017A 2020-07-28 2020-09-28 加熱バルブ多岐菅組立品を有するシステム、そのシステムの製造方法 Withdrawn JP2023540004A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2025150978A JP2025172963A (ja) 2020-07-28 2025-09-11 加熱バルブ多岐管組立品を有するシステム、そのシステムの製造方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US202063057872P 2020-07-28 2020-07-28
US63/057,872 2020-07-28
PCT/US2020/053069 WO2022025950A1 (en) 2020-07-28 2020-09-28 Systems having heated valve manifold assemblies, methods of manufacture of same

Related Child Applications (1)

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JP2025150978A Division JP2025172963A (ja) 2020-07-28 2025-09-11 加熱バルブ多岐管組立品を有するシステム、そのシステムの製造方法

Publications (3)

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JP2023540004A true JP2023540004A (ja) 2023-09-21
JPWO2022025950A5 JPWO2022025950A5 (https=) 2025-02-19
JP2023540004A5 JP2023540004A5 (https=) 2025-02-19

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JP2023506017A Withdrawn JP2023540004A (ja) 2020-07-28 2020-09-28 加熱バルブ多岐菅組立品を有するシステム、そのシステムの製造方法
JP2025150978A Pending JP2025172963A (ja) 2020-07-28 2025-09-11 加熱バルブ多岐管組立品を有するシステム、そのシステムの製造方法

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JP2025150978A Pending JP2025172963A (ja) 2020-07-28 2025-09-11 加熱バルブ多岐管組立品を有するシステム、そのシステムの製造方法

Country Status (8)

Country Link
US (1) US12565942B2 (https=)
EP (1) EP4169060A4 (https=)
JP (2) JP2023540004A (https=)
KR (1) KR20230042364A (https=)
CN (1) CN115997477A (https=)
IL (1) IL300012A (https=)
TW (1) TWI761973B (https=)
WO (1) WO2022025950A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022025950A1 (en) 2020-07-28 2022-02-03 Versum Materials Us, Llc Systems having heated valve manifold assemblies, methods of manufacture of same
CN116006728A (zh) * 2022-12-31 2023-04-25 聚光科技(杭州)股份有限公司 一种紧凑型多通道气体选向阀

Citations (7)

* Cited by examiner, † Cited by third party
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JPS63246592A (ja) * 1986-12-23 1988-10-13 スウェイジロック　クウィック　コネクト　コムパニー 迅速連結形管継手の保護装置
JPH10500733A (ja) * 1994-05-11 1998-01-20 マテリアルズ リサーチ コーポレーション 反応チャンバへのガス供給装置及び方法
JP2000310380A (ja) * 1999-04-27 2000-11-07 Flow Rite Control Ltd 流体取扱装置用コネクタ
US6283143B1 (en) * 2000-03-31 2001-09-04 Lam Research Corporation System and method for providing an integrated gas stick
US7775508B2 (en) * 2006-10-31 2010-08-17 Applied Materials, Inc. Ampoule for liquid draw and vapor draw with a continuous level sensor
WO2017002241A1 (ja) * 2015-07-01 2017-01-05 ニチアス株式会社 ヒータ装置及びそれを用いた被加熱体の加熱方法
WO2018179999A1 (ja) * 2017-03-29 2018-10-04 日立金属株式会社 気化器

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US3878658A (en) * 1973-08-29 1975-04-22 Chicago Bridge & Iron Co Foam board insulation system
US3858632A (en) * 1973-12-10 1975-01-07 Rhodes Joseph S Insulating cover for ground faucets
US4562857A (en) * 1983-09-19 1986-01-07 Ball Randell D Thermal insulation article
JP3317114B2 (ja) * 1995-11-28 2002-08-26 三菱マテリアル株式会社 タンク保護容器
JP3752578B2 (ja) 1997-04-21 2006-03-08 株式会社フジキン 流体制御器用加熱装置
US6578600B1 (en) * 2000-10-31 2003-06-17 International Business Machines Corporation Gas isolation box
JP4487135B2 (ja) * 2001-03-05 2010-06-23 東京エレクトロン株式会社 流体制御装置
JP2004340199A (ja) 2003-05-14 2004-12-02 Fujikin Inc 加熱装置付き流体制御装置
JP2005098347A (ja) 2003-09-24 2005-04-14 Fujikin Inc 流体制御器の加熱方法
JP2005096923A (ja) 2003-09-24 2005-04-14 Shin Meiwa Ind Co Ltd 塵芥貯留排出装置
JP4753173B2 (ja) * 2005-06-17 2011-08-24 株式会社フジキン 流体制御装置
KR101285562B1 (ko) * 2011-12-15 2013-07-12 주식회사 플로웰 반도체 제조 공정용 블록형 가스 케비넷
US9140466B2 (en) 2012-07-17 2015-09-22 Eemax, Inc. Fluid heating system and instant fluid heating device
US9469976B1 (en) * 2015-03-25 2016-10-18 Douglas W. Banks Housing for drain outlet
JP6627464B2 (ja) 2015-03-30 2020-01-08 東京エレクトロン株式会社 原料ガス供給装置及び成膜装置
CN110914959A (zh) 2017-07-25 2020-03-24 株式会社富士金 流体控制装置
WO2022025950A1 (en) 2020-07-28 2022-02-03 Versum Materials Us, Llc Systems having heated valve manifold assemblies, methods of manufacture of same

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63246592A (ja) * 1986-12-23 1988-10-13 スウェイジロック　クウィック　コネクト　コムパニー 迅速連結形管継手の保護装置
JPH10500733A (ja) * 1994-05-11 1998-01-20 マテリアルズ リサーチ コーポレーション 反応チャンバへのガス供給装置及び方法
JP2000310380A (ja) * 1999-04-27 2000-11-07 Flow Rite Control Ltd 流体取扱装置用コネクタ
US6283143B1 (en) * 2000-03-31 2001-09-04 Lam Research Corporation System and method for providing an integrated gas stick
US7775508B2 (en) * 2006-10-31 2010-08-17 Applied Materials, Inc. Ampoule for liquid draw and vapor draw with a continuous level sensor
WO2017002241A1 (ja) * 2015-07-01 2017-01-05 ニチアス株式会社 ヒータ装置及びそれを用いた被加熱体の加熱方法
WO2018179999A1 (ja) * 2017-03-29 2018-10-04 日立金属株式会社 気化器

Also Published As

Publication number Publication date
IL300012A (en) 2023-03-01
KR20230042364A (ko) 2023-03-28
EP4169060A4 (en) 2024-07-24
CN115997477A (zh) 2023-04-21
TW202204794A (zh) 2022-02-01
JP2025172963A (ja) 2025-11-26
US12565942B2 (en) 2026-03-03
TWI761973B (zh) 2022-04-21
WO2022025950A1 (en) 2022-02-03
US20230287992A1 (en) 2023-09-14
EP4169060A1 (en) 2023-04-26

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