TWI761973B - 具有被加熱的閥歧管組件的系統及其製造方法 - Google Patents

具有被加熱的閥歧管組件的系統及其製造方法 Download PDF

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Publication number
TWI761973B
TWI761973B TW109133793A TW109133793A TWI761973B TW I761973 B TWI761973 B TW I761973B TW 109133793 A TW109133793 A TW 109133793A TW 109133793 A TW109133793 A TW 109133793A TW I761973 B TWI761973 B TW I761973B
Authority
TW
Taiwan
Prior art keywords
conductive plate
thermally conductive
valve manifold
valves
heated
Prior art date
Application number
TW109133793A
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English (en)
Chinese (zh)
Other versions
TW202204794A (zh
Inventor
克里斯多夫大衛 方達納
大衛卡爾 艾希曼
尤斯拉 法帝馬
湯姆威廉 皮爾茲
梅森 西戴爾
Original Assignee
美商慧盛材料美國責任有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 美商慧盛材料美國責任有限公司 filed Critical 美商慧盛材料美國責任有限公司
Publication of TW202204794A publication Critical patent/TW202204794A/zh
Application granted granted Critical
Publication of TWI761973B publication Critical patent/TWI761973B/zh

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K49/00—Means in or on valves for heating or cooling
    • F16K49/002—Electric heating means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/003—Housing formed from a plurality of the same valve elements
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/20—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater
    • H05B3/22—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater non-flexible
    • H05B3/28—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material
    • H05B3/283—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material the insulating material being an inorganic material, e.g. ceramic
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/6851—With casing, support, protector or static constructional installations
    • Y10T137/7036—Jacketed

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Details Of Valves (AREA)
  • Branch Pipes, Bends, And The Like (AREA)
  • Pipe Accessories (AREA)
TW109133793A 2020-07-28 2020-09-29 具有被加熱的閥歧管組件的系統及其製造方法 TWI761973B (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US202063057872P 2020-07-28 2020-07-28
US63/057,872 2020-07-28
PCT/US2020/053069 WO2022025950A1 (en) 2020-07-28 2020-09-28 Systems having heated valve manifold assemblies, methods of manufacture of same
WOPCT/US2020/053069 2020-09-28

Publications (2)

Publication Number Publication Date
TW202204794A TW202204794A (zh) 2022-02-01
TWI761973B true TWI761973B (zh) 2022-04-21

Family

ID=80036646

Family Applications (1)

Application Number Title Priority Date Filing Date
TW109133793A TWI761973B (zh) 2020-07-28 2020-09-29 具有被加熱的閥歧管組件的系統及其製造方法

Country Status (8)

Country Link
US (1) US12565942B2 (https=)
EP (1) EP4169060A4 (https=)
JP (2) JP2023540004A (https=)
KR (1) KR20230042364A (https=)
CN (1) CN115997477A (https=)
IL (1) IL300012A (https=)
TW (1) TWI761973B (https=)
WO (1) WO2022025950A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022025950A1 (en) 2020-07-28 2022-02-03 Versum Materials Us, Llc Systems having heated valve manifold assemblies, methods of manufacture of same
CN116006728A (zh) * 2022-12-31 2023-04-25 聚光科技(杭州)股份有限公司 一种紧凑型多通道气体选向阀

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW414841B (en) * 1997-04-21 2000-12-11 Fujikin Kk Heating device for fluid controller
TW200504799A (en) * 2003-05-14 2005-02-01 Fujikin Kk Fluid control apparatus with heating device
TW200528654A (en) * 2003-09-24 2005-09-01 Fujikin Kk Method for heating fluid controller
TW201707504A (zh) * 2015-07-01 2017-02-16 霓佳斯股份有限公司 加熱裝置及使用該加熱裝置的被加熱體的加熱方法
CN107367052A (zh) * 2012-07-17 2017-11-21 伊麦克斯公司 流体加热系统和即时流体加热设备
TW201920761A (zh) * 2017-07-25 2019-06-01 日商富士金股份有限公司 流體控制裝置

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3878658A (en) * 1973-08-29 1975-04-22 Chicago Bridge & Iron Co Foam board insulation system
US3858632A (en) * 1973-12-10 1975-01-07 Rhodes Joseph S Insulating cover for ground faucets
US4562857A (en) * 1983-09-19 1986-01-07 Ball Randell D Thermal insulation article
US4792162A (en) * 1986-12-23 1988-12-20 Swagelok Quick Connect Co. Protective device for quick connect coupling
US5451258A (en) * 1994-05-11 1995-09-19 Materials Research Corporation Apparatus and method for improved delivery of vaporized reactant gases to a reaction chamber
JP3317114B2 (ja) * 1995-11-28 2002-08-26 三菱マテリアル株式会社 タンク保護容器
US6257626B1 (en) * 1999-04-27 2001-07-10 Flow-Rite Controls, Ltd. Connector for fluid handling system
US6283143B1 (en) 2000-03-31 2001-09-04 Lam Research Corporation System and method for providing an integrated gas stick
US6578600B1 (en) * 2000-10-31 2003-06-17 International Business Machines Corporation Gas isolation box
JP4487135B2 (ja) * 2001-03-05 2010-06-23 東京エレクトロン株式会社 流体制御装置
JP2005096923A (ja) 2003-09-24 2005-04-14 Shin Meiwa Ind Co Ltd 塵芥貯留排出装置
JP4753173B2 (ja) * 2005-06-17 2011-08-24 株式会社フジキン 流体制御装置
US7775508B2 (en) * 2006-10-31 2010-08-17 Applied Materials, Inc. Ampoule for liquid draw and vapor draw with a continuous level sensor
KR101285562B1 (ko) * 2011-12-15 2013-07-12 주식회사 플로웰 반도체 제조 공정용 블록형 가스 케비넷
US9469976B1 (en) * 2015-03-25 2016-10-18 Douglas W. Banks Housing for drain outlet
JP6627464B2 (ja) 2015-03-30 2020-01-08 東京エレクトロン株式会社 原料ガス供給装置及び成膜装置
WO2018179999A1 (ja) * 2017-03-29 2018-10-04 日立金属株式会社 気化器
WO2022025950A1 (en) 2020-07-28 2022-02-03 Versum Materials Us, Llc Systems having heated valve manifold assemblies, methods of manufacture of same

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW414841B (en) * 1997-04-21 2000-12-11 Fujikin Kk Heating device for fluid controller
TW200504799A (en) * 2003-05-14 2005-02-01 Fujikin Kk Fluid control apparatus with heating device
TW200528654A (en) * 2003-09-24 2005-09-01 Fujikin Kk Method for heating fluid controller
CN107367052A (zh) * 2012-07-17 2017-11-21 伊麦克斯公司 流体加热系统和即时流体加热设备
TW201707504A (zh) * 2015-07-01 2017-02-16 霓佳斯股份有限公司 加熱裝置及使用該加熱裝置的被加熱體的加熱方法
TW201920761A (zh) * 2017-07-25 2019-06-01 日商富士金股份有限公司 流體控制裝置

Also Published As

Publication number Publication date
IL300012A (en) 2023-03-01
KR20230042364A (ko) 2023-03-28
EP4169060A4 (en) 2024-07-24
CN115997477A (zh) 2023-04-21
TW202204794A (zh) 2022-02-01
JP2023540004A (ja) 2023-09-21
JP2025172963A (ja) 2025-11-26
US12565942B2 (en) 2026-03-03
WO2022025950A1 (en) 2022-02-03
US20230287992A1 (en) 2023-09-14
EP4169060A1 (en) 2023-04-26

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