JPWO2022025950A5 - - Google Patents

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Publication number
JPWO2022025950A5
JPWO2022025950A5 JP2023506017A JP2023506017A JPWO2022025950A5 JP WO2022025950 A5 JPWO2022025950 A5 JP WO2022025950A5 JP 2023506017 A JP2023506017 A JP 2023506017A JP 2023506017 A JP2023506017 A JP 2023506017A JP WO2022025950 A5 JPWO2022025950 A5 JP WO2022025950A5
Authority
JP
Japan
Prior art keywords
thermally conductive
conductive plate
valve manifold
insulation
pipes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2023506017A
Other languages
English (en)
Japanese (ja)
Other versions
JP2023540004A (ja
JP2023540004A5 (https=
Publication date
Application filed filed Critical
Priority claimed from PCT/US2020/053069 external-priority patent/WO2022025950A1/en
Publication of JP2023540004A publication Critical patent/JP2023540004A/ja
Publication of JPWO2022025950A5 publication Critical patent/JPWO2022025950A5/ja
Publication of JP2023540004A5 publication Critical patent/JP2023540004A5/ja
Priority to JP2025150978A priority Critical patent/JP2025172963A/ja
Withdrawn legal-status Critical Current

Links

JP2023506017A 2020-07-28 2020-09-28 加熱バルブ多岐菅組立品を有するシステム、そのシステムの製造方法 Withdrawn JP2023540004A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2025150978A JP2025172963A (ja) 2020-07-28 2025-09-11 加熱バルブ多岐管組立品を有するシステム、そのシステムの製造方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US202063057872P 2020-07-28 2020-07-28
US63/057,872 2020-07-28
PCT/US2020/053069 WO2022025950A1 (en) 2020-07-28 2020-09-28 Systems having heated valve manifold assemblies, methods of manufacture of same

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2025150978A Division JP2025172963A (ja) 2020-07-28 2025-09-11 加熱バルブ多岐管組立品を有するシステム、そのシステムの製造方法

Publications (3)

Publication Number Publication Date
JP2023540004A JP2023540004A (ja) 2023-09-21
JPWO2022025950A5 true JPWO2022025950A5 (https=) 2025-02-19
JP2023540004A5 JP2023540004A5 (https=) 2025-02-19

Family

ID=80036646

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2023506017A Withdrawn JP2023540004A (ja) 2020-07-28 2020-09-28 加熱バルブ多岐菅組立品を有するシステム、そのシステムの製造方法
JP2025150978A Pending JP2025172963A (ja) 2020-07-28 2025-09-11 加熱バルブ多岐管組立品を有するシステム、そのシステムの製造方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2025150978A Pending JP2025172963A (ja) 2020-07-28 2025-09-11 加熱バルブ多岐管組立品を有するシステム、そのシステムの製造方法

Country Status (8)

Country Link
US (1) US12565942B2 (https=)
EP (1) EP4169060A4 (https=)
JP (2) JP2023540004A (https=)
KR (1) KR20230042364A (https=)
CN (1) CN115997477A (https=)
IL (1) IL300012A (https=)
TW (1) TWI761973B (https=)
WO (1) WO2022025950A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022025950A1 (en) 2020-07-28 2022-02-03 Versum Materials Us, Llc Systems having heated valve manifold assemblies, methods of manufacture of same
CN116006728A (zh) * 2022-12-31 2023-04-25 聚光科技(杭州)股份有限公司 一种紧凑型多通道气体选向阀

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3878658A (en) * 1973-08-29 1975-04-22 Chicago Bridge & Iron Co Foam board insulation system
US3858632A (en) * 1973-12-10 1975-01-07 Rhodes Joseph S Insulating cover for ground faucets
US4562857A (en) * 1983-09-19 1986-01-07 Ball Randell D Thermal insulation article
US4792162A (en) * 1986-12-23 1988-12-20 Swagelok Quick Connect Co. Protective device for quick connect coupling
US5451258A (en) * 1994-05-11 1995-09-19 Materials Research Corporation Apparatus and method for improved delivery of vaporized reactant gases to a reaction chamber
JP3317114B2 (ja) * 1995-11-28 2002-08-26 三菱マテリアル株式会社 タンク保護容器
JP3752578B2 (ja) 1997-04-21 2006-03-08 株式会社フジキン 流体制御器用加熱装置
US6257626B1 (en) * 1999-04-27 2001-07-10 Flow-Rite Controls, Ltd. Connector for fluid handling system
US6283143B1 (en) 2000-03-31 2001-09-04 Lam Research Corporation System and method for providing an integrated gas stick
US6578600B1 (en) * 2000-10-31 2003-06-17 International Business Machines Corporation Gas isolation box
JP4487135B2 (ja) * 2001-03-05 2010-06-23 東京エレクトロン株式会社 流体制御装置
JP2004340199A (ja) 2003-05-14 2004-12-02 Fujikin Inc 加熱装置付き流体制御装置
JP2005098347A (ja) 2003-09-24 2005-04-14 Fujikin Inc 流体制御器の加熱方法
JP2005096923A (ja) 2003-09-24 2005-04-14 Shin Meiwa Ind Co Ltd 塵芥貯留排出装置
JP4753173B2 (ja) * 2005-06-17 2011-08-24 株式会社フジキン 流体制御装置
US7775508B2 (en) * 2006-10-31 2010-08-17 Applied Materials, Inc. Ampoule for liquid draw and vapor draw with a continuous level sensor
KR101285562B1 (ko) * 2011-12-15 2013-07-12 주식회사 플로웰 반도체 제조 공정용 블록형 가스 케비넷
US9140466B2 (en) 2012-07-17 2015-09-22 Eemax, Inc. Fluid heating system and instant fluid heating device
US9469976B1 (en) * 2015-03-25 2016-10-18 Douglas W. Banks Housing for drain outlet
JP6627464B2 (ja) 2015-03-30 2020-01-08 東京エレクトロン株式会社 原料ガス供給装置及び成膜装置
WO2017002241A1 (ja) * 2015-07-01 2017-01-05 ニチアス株式会社 ヒータ装置及びそれを用いた被加熱体の加熱方法
WO2018179999A1 (ja) * 2017-03-29 2018-10-04 日立金属株式会社 気化器
CN110914959A (zh) 2017-07-25 2020-03-24 株式会社富士金 流体控制装置
WO2022025950A1 (en) 2020-07-28 2022-02-03 Versum Materials Us, Llc Systems having heated valve manifold assemblies, methods of manufacture of same

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